Isıl Püskürtme Yöntemi ile Büyütülen SnO2 nin Karakteristik Özelliklerine Sb-Katkısının Etkisi

Yıl 2019, Cilt: 40 Sayı: 1, 162 - 169, 22.03.2019

Güven Turgut

https://doi.org/10.17776/csj.512892

Öz

Bu çalışma Sb-katkısının SnO₂ nin
kristal, yüzeysel, optik ve elektriksel özelliklerine etkisini sunmaktadır. Sb
katkılı numuneler ısıl püskürtme yöntemi ile cam altlıklar üzerine büyütmüştür.
Piramit ve çok yüzlü şekilli tetragonal Sb katkılı SnO₂ taneleri XRD ve SEM
analizleri ile belirlenmiştir. Filmler için dejenere n-tipi iletkenlik özelliği
elektriksel ve optiksel karakterizasyonlar ile belirlenmiştir. Özdirenç ve
tabaka direnci değerleri ilk olarak ağırlıkça % 1.5 Sb içeriği ile azalmıştır
ve sonra bu değerler daha fazla Sb içeriği ile artmıştır. Fakat taşıyıcı
konsantrasyonu ağırlıkça % 2.5 Sb içeriği ile artmıştır, sonra ise % 3.5 Sb
içeriği ile azalmaya başlamıştır. Numunelerin optik bant aralığı Sb katkılama
ile azalma eğilimindedir. Bu çalışmada elde edilen sonuçlardan Sb katkılı kalay
oksit ince filmlerin optoelektronik uygulamalarda kullanılabileceği
söylenebilir.

Anahtar Kelimeler

Isıl püskürtme, SnO2, Sb-katkılama, Elektriksel özellikler

Sb-Contribution Influence on the Characteristics of Spray-Coated SnO2

Öz

This work presents that the impact of Sb-additive on the crystalline,
morphological, optical, and electrical features of SnO₂.
Sb-incorporated samples were fabricated on glass substrates with spray
pyrolysis. Pyramidal and polyhedron shaped tetragonal Sb-introduced SnO₂
grains were identified with XRD and SEM analysis. The degenerate n-type
character for films was determined by electrical and optical characterizations.
The resistivity and sheet resistance values initially decreased with Sb-content
until 1.5 wt. %, then they increased with further Sb-level. However, carrier
concentration increased with 2.5 wt. % Sb-contribution, then it started to goes
down with 3.5 wt. %. The optical band-gap values of samples had a decreasing
tendency with Sb-doping. From the results obtained in the present study, it is
said that Sb-incorporated tin oxide films can be utilized in optoelectronic
implements.

Anahtar Kelimeler

Sb-doping, Electrical properties, Spray Pyrolysis, SnO2, Electrical properties

Kaynakça

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