MEMS Tabanlı Piezoelektrik Enerji Hasadı Sisteminin Tasarımı ve Analizi

Year 2024, Volume: 1 Issue: 1, 46 - 49, 26.04.2024

Ümit Söylemez

https://doi.org/10.5281/zenodo.11068974

Abstract

Bu çalışmanın temel amacı, Mikro-Elektro-Mekanik Sistemler (MEMS) tabanlı düşük güçlü elektronik sensörlerin ve kablosuz sistemlerin enerji ihtiyacını karşılamak üzere geliştirilen enerji hasadı tekniklerine odaklanmaktadır. Özellikle, minyatür jeneratörlerin tasarımı ve performansını artırmaya yönelik bir perspektif sunulmuştur.
Model, piezoelektrik özelliklere sahip bir MEMS sensörünü içermekte ve bu sensör, titreşimlere maruz kaldığında meydana gelen yerel ivme değişimlerini kullanarak elektrik enerjisi üretme yeteneğini değerlendirmektedir. Analiz edilen enerji hasadı sistemi, titreşen makineye bir uçta kelepçelenmiş bir piezoelektrik malzeme ve diğer uçta monta edilmiş bir denge kütle içermektedir Bu çalışmada, tasarlanan sismik enerji toplayıcısının belirli titreşim koşullarında etkili bir şekilde elektrik enerjisi üretebildiğini göstermektedir. SEA, sensörün geometrisini ve malzeme özelliklerini optimize etme potansiyelini ortaya koymuştur.

Keywords

Mems, Eneri Hasadı, Piezoelektrik, Sensörler

DESIGN AND ANALYSIS OF MEMS BASED PIEZOELECTRIC ENERGY HARVESTING SYSTEM

Abstract

The primary objective of this study is to focus on energy harvesting techniques developed to meet the energy requirements of Micro-Electro-Mechanical Systems (MEMS)-based low-power electronic sensors and wireless systems. Specifically, a perspective is presented to enhance the design and performance of miniature generators.
The model incorporates a MEMS sensor with piezoelectric properties, and it evaluates the ability to generate electrical energy by utilizing changes in local acceleration induced by vibrations. The analyzed energy harvesting system includes a piezoelectric material clamped at one end to the vibrating machine and a balancing mass mounted at the other end. This study demonstrates that the designed seismic energy harvester can effectively generate electrical energy under specific vibration conditions. The Structural Eigenvalue Analysis (SEA) has revealed the potential to optimize the sensor's geometry and material properties.

Keywords

Mems, Sensors, Piezoeletric, Enenrgy harvesting

References

• Gök, M. O., Karadöl, İ., “Piezoelektrik Uygulamali Ayakkabi Tasarimi”, International Journal Of Social And Humanities Sciences Research (Jshsr), Cilt 5, Sayı 22, Sayfa 888-893, 2018
• Akgün, M., “Piezoelektrik özellikli, polimer nano kompozit malzeme geliştirilmesi ve titreşim sensörü olarak kullanilabilirliğinin incelenmesi”, Uludaǧ Üniversitesi Fen Bilimleri Enstitüsü, Doktora Tezi, Bursa, 2018.
• Lefeuvre, E., Audigier, D., Richard, C., Guyomar, D., “Buck-boost converter for sensorless power optimization of piezoelectric energy harvester”, IEEE Transactions on Power Electronics, Vol. 22, Issue 5, Sayfa 2018-2025, 2007.
• Ulkir, O., Ertugrul, I., Akkus, N., Ozer, S., “Production of the piezoelectric cantilever using MEMS-based layered manufacturing technology”, Optik, 170472, 2023.
• Ertugrul, I., Ulkir, O., Ersoy, S., Ragulskis, M., “Additive Manufactured Strain Sensor Using Stereolithography Method with Photopolymer Material”, Polymers, Vol. 15, Issue 4, Pages 991-998, 2023.
• Angelou, A., Norman, C., Miran, N., Albers, S., Moradi-Dastjerdi, R., Behdinan, K., “An eco-friendly, biocompatible, and reliable piezoelectric nanocomposite actuator for the new generation of microelectronic devices”, The European Physical Journal Plus, Vol. 136, Issue 6, Pages 1-17, 2021.
• Sekhar, M. C., Veena, E., Kumar, N. S., Naidu, K. C. B., Mallikarjuna, A., Basha, D. B., “A review on piezoelectric materials and their applications”, Crystal Research and Technology, Vol. 58, Issue 2, Pages 2200130, 2023.
• Ertugrul, I., Ersoy, S., Ragulskis, M., “Computational model for the nonlinear dynamic response of MEMS-based micromirror”, In Vibroengineering procedia: 58th international conference on vibroengineering, Ventspils, Latvia, August 25-26, 2022.
• Kumar, A., Prasad, M., Janyani, V., Yadav, R. P., “Development of diaphragm and microtunnel structures for MEMS piezoelectric sensors”, IEEE Transactions on Semiconductor Manufacturing, Vol. 33, Issue 4, Pages 606-613, 2020.
• Ertugrul, I., Akkus, N., Yuce, H., “Fabrication Of Mems-Based Electrothermal Microactuators With Additive Manufacturing Technologies”, Materials & Technologies/Materiali in Tehnologije, Vol. 53, Issue 5, Pages 665-670, 2019.
• Junjie, G., Zhilin, R., Kangchao, L., Yixiang, B.J., “Study on the generating performance of a novel piezoelectric generator with multilayer cantilevers”, Journal of Mechanical Engineering, Vol. 50, Issue 5, Pages 135-140, 2014.
• Rastegar, J., Pereira, C., Nguyen, H.L., “Piezoelectric-based power sources for harvesting energy from platforms with low-frequency vibration, Smart Structures and Materials”, Industrial and Commercial Applications of Smart Structures Technologies, SPIE, 617101, 2006.
• Wang, Q., “Research of Vibration Energy Harvesting Based on Piezoelectric Material”, Doctoral dissertation, Jiangsu University Zhenjiang, China, 2008.
• Varadha, E., Kumar, S.R., Jain, X.A., “Wind-Driven Leaf-Like Thin-Film Piezoelectric Harvester for Low Wind Applications”, Journal of Vibration Engineering & Technologies, Vol. 9, Pages 1005-10221, 2021.
• Song, J., Zhao, G., Li, B., Wang, J., “Design optimization of PVDF-based piezoelectric energy harvesters”, Heliyon, Vol. 3, Issue 9, 2017.
• Jasim, A., Yesner, G., Wang, H., Safari, A., Maher, A., Basily, B., “Laboratory testing and numerical simulation of piezoelectric energy harvester for roadway applications”, Applied Energy, Vol. 224, Pages 438-447, 2018.