TY  - JOUR
T1  - In2O3 ince filmlerin yapısal, morfolojik, optik ve elektriksel özelliklerinin incelenmesi: gaz sensörü uygulamaları
TT  - Investigation of the structural, morphological, optical and electrical properties of In2O3 thin films: gas sensor applications
AU  - Asar, Tarık
AU  - Korkmaz, Burak
AU  - Efkere, H. İbrahim
AU  - Akın, Nihan
AU  - Özçelik, Süleyman
PY  - 2018
DA  - June
DO  - 10.2339/politeknik.403971
JF  - Politeknik Dergisi
PB  - Gazi University
WT  - DergiPark
SN  - 2147-9429
SP  - 265
EP  - 271
VL  - 21
IS  - 2
LA  - tr
AB  - Buçalışmada, RF magnetron püskürtme yöntemi ile 50W ve 100W güçdeğerlerinde, iki adet In2O3ince film üretildi. Üretilen ince filmlerin yapısal, morfolojik ve optiközellikleri belirlendi. In2O3ince filmlerin sensör fabrikasyonları tamamlanarak, In2O3 gaz sensörleri elde edildi. Gaz sensörleri; bütangazı konsantrasyonu, uygulama voltajı ve sensör çalışma sıcaklığıdeğiştirilerek test edildi. Test sonuçları incelendiğinde, üretilen her ikisensörün de farklı sensör çalışma sıcaklığı ve gaz konsantrasyonları içinkullanıma uygun olduğu görüldü.
KW  - Metal oksit yarıiletken
KW  - indiyum oksit
KW  - gaz sensörü
N2  - In this study, two In2O3thin films were prepared at 50W and 100W target power by using RF magnetronsputtering technique. Thestructural, morphological and optical properties of the produced thin filmswere investigated. TheIn2O3 gassensors were produced by completing the fabrications of In2O3 thin films. The gas sensors were testedwith changing butane gas concentration, application voltage and sensoroperating temperature. When the test results were examined, it was seen thatboth of the produced sensors were found to be suitable for using with differentsensor operating temperatures and gas concentrations.
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UR  - https://doi.org/10.2339/politeknik.403971
L1  - https://dergipark.org.tr/en/download/article-file/438467
ER  -