Year 2020, Volume 4 , Issue 1, Pages 12 - 17 2020-04-30

ABSTRACT This study aims to fabricate Electro-Thermal Micro Actuator with a support structure by using the Two-Photon Polymerization (2PP) technique based 3D printer. This study was carried out with the 3D printer which is possible to fabricate the actuator which can be fabricated by the traditional Micro Electro Mechanical System (MEMS) methods. Due to the high cost of traditional MEMS methods, difficult and excessive processing, many studies have been carried out for new fabrication methods. 2PP is the most widely used and developed method of production. With this method, direct fabrication up to nano level is possible. Also, many chemical processes used in traditional methods will not be applied using 2PP based 3D printers. The design of the bi-directional movable Electro-Thermal Micro Actuator is carried out in this study. Supporting structures with a diameter of 2 microns allow the Actuator to be fabricated without breakage. 2PP method of the 2-micron length of the very easy and low-cost production was seen in this study. Thanks to this method, traditional MEMS production methods will be replaced by 3D printers in the following years.
3D Printing, MEMS, Fabrication, 2PP
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Primary Language en
Subjects Engineering, Mechanical
Journal Section Research Article
Authors

Orcid: 0000-0001-9586-0377
Author: İshak ERTUGRUL
Institution: MUS ALPARSLAN UNIVERSITY
Country: Turkey


Orcid: 0000-0002-3891-5340
Author: Nihat AKKUŞ
Institution: MARMARA ÜNİVERSİTESİ
Country: Turkey


Orcid: 0000-0003-0930-3975
Author: Ebuzer AYGÜL
Institution: MARMARA ÜNİVERSİTESİ
Country: Turkey


Orcid: 0000-0001-7076-7766
Author: Senai YALCİNKAYA (Primary Author)
Institution: Marmara University
Country: Turkey


Dates

Publication Date : April 30, 2020

Bibtex @conference paper { ij3dptdi669513, journal = {International Journal of 3D Printing Technologies and Digital Industry}, issn = {2602-3350}, address = {info@3dprintturkey.org}, publisher = {Kerim ÇETİNKAYA}, year = {2020}, volume = {4}, pages = {12 - 17}, doi = {}, title = {MEMS FABRICATION USING 2PP TECHNIQUE BASED 3D PRINTER}, key = {cite}, author = {Ertugrul, İshak and Akkuş, Nihat and Aygül, Ebuzer and Yalci̇nkaya, Senai} }
APA Ertugrul, İ , Akkuş, N , Aygül, E , Yalci̇nkaya, S . (2020). MEMS FABRICATION USING 2PP TECHNIQUE BASED 3D PRINTER . International Journal of 3D Printing Technologies and Digital Industry , 4 (1) , 12-17 . Retrieved from https://dergipark.org.tr/en/pub/ij3dptdi/issue/54120/669513
MLA Ertugrul, İ , Akkuş, N , Aygül, E , Yalci̇nkaya, S . "MEMS FABRICATION USING 2PP TECHNIQUE BASED 3D PRINTER" . International Journal of 3D Printing Technologies and Digital Industry 4 (2020 ): 12-17 <https://dergipark.org.tr/en/pub/ij3dptdi/issue/54120/669513>
Chicago Ertugrul, İ , Akkuş, N , Aygül, E , Yalci̇nkaya, S . "MEMS FABRICATION USING 2PP TECHNIQUE BASED 3D PRINTER". International Journal of 3D Printing Technologies and Digital Industry 4 (2020 ): 12-17
RIS TY - JOUR T1 - MEMS FABRICATION USING 2PP TECHNIQUE BASED 3D PRINTER AU - İshak Ertugrul , Nihat Akkuş , Ebuzer Aygül , Senai Yalci̇nkaya Y1 - 2020 PY - 2020 N1 - DO - T2 - International Journal of 3D Printing Technologies and Digital Industry JF - Journal JO - JOR SP - 12 EP - 17 VL - 4 IS - 1 SN - 2602-3350- M3 - UR - Y2 - 2020 ER -
EndNote %0 International Journal of 3D Printing Technologies and Digital Industry MEMS FABRICATION USING 2PP TECHNIQUE BASED 3D PRINTER %A İshak Ertugrul , Nihat Akkuş , Ebuzer Aygül , Senai Yalci̇nkaya %T MEMS FABRICATION USING 2PP TECHNIQUE BASED 3D PRINTER %D 2020 %J International Journal of 3D Printing Technologies and Digital Industry %P 2602-3350- %V 4 %N 1 %R %U
ISNAD Ertugrul, İshak , Akkuş, Nihat , Aygül, Ebuzer , Yalci̇nkaya, Senai . "MEMS FABRICATION USING 2PP TECHNIQUE BASED 3D PRINTER". International Journal of 3D Printing Technologies and Digital Industry 4 / 1 (April 2020): 12-17 .
AMA Ertugrul İ , Akkuş N , Aygül E , Yalci̇nkaya S . MEMS FABRICATION USING 2PP TECHNIQUE BASED 3D PRINTER. IJ3DPTDI. 2020; 4(1): 12-17.
Vancouver Ertugrul İ , Akkuş N , Aygül E , Yalci̇nkaya S . MEMS FABRICATION USING 2PP TECHNIQUE BASED 3D PRINTER. International Journal of 3D Printing Technologies and Digital Industry. 2020; 4(1): 12-17.