Politeknik Dergisi 2147-9429 Gazi University 10.2339/politeknik.403971 Engineering Mühendislik Investigation of the structural, morphological, optical and electrical properties of In2O3 thin films: gas sensor applications In2O3 ince filmlerin yapısal, morfolojik, optik ve elektriksel özelliklerinin incelenmesi: gaz sensörü uygulamaları Asar Tarık Korkmaz Burak Efkere H. İbrahim Akın Nihan Özçelik Süleyman 06 01 2018 21 2 265 271 02 08 2017 Copyright © 1998, Journal of Polytechnic 1998 Journal of Polytechnic

In this study, two In2O3thin films were prepared at 50W and 100W target power by using RF magnetronsputtering technique. Thestructural, morphological and optical properties of the produced thin filmswere investigated. TheIn2O3 gassensors were produced by completing the fabrications of In2O3 thin films. The gas sensors were testedwith changing butane gas concentration, application voltage and sensoroperating temperature. When the test results were examined, it was seen thatboth of the produced sensors were found to be suitable for using with differentsensor operating temperatures and gas concentrations.

Buçalışmada, RF magnetron püskürtme yöntemi ile 50W ve 100W güçdeğerlerinde, iki adet In2O3ince film üretildi. Üretilen ince filmlerin yapısal, morfolojik ve optiközellikleri belirlendi. In2O3ince filmlerin sensör fabrikasyonları tamamlanarak, In2O3 gaz sensörleri elde edildi. Gaz sensörleri; bütangazı konsantrasyonu, uygulama voltajı ve sensör çalışma sıcaklığıdeğiştirilerek test edildi. Test sonuçları incelendiğinde, üretilen her ikisensörün de farklı sensör çalışma sıcaklığı ve gaz konsantrasyonları içinkullanıma uygun olduğu görüldü.

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