In2O3 ince filmlerin yapısal, morfolojik, optik ve elektriksel özelliklerinin incelenmesi: gaz sensörü uygulamaları

Tarık Asar; Burak Korkmaz; H. İbrahim Efkere; Nihan Akın; Süleyman Özçelik

doi:10.2339/politeknik.403971

Research Article

Investigation of the structural, morphological, optical and electrical properties of In2O3 thin films: gas sensor applications

Year 2018, Volume: 21 Issue: 2, 265 - 271, 01.06.2018

Tarık Asar , Burak Korkmaz H. İbrahim Efkere Nihan Akın Süleyman Özçelik

https://doi.org/10.2339/politeknik.403971

Abstract

In this study, two In2O3
thin films were prepared at 50W and 100W target power by using RF magnetron
sputtering technique. The
structural, morphological and optical properties of the produced thin films
were investigated. The
In2O3 gas
sensors were produced by completing the fabrications of In2O3 thin films. The gas sensors were tested
with changing butane gas concentration, application voltage and sensor
operating temperature. When the test results were examined, it was seen that
both of the produced sensors were found to be suitable for using with different
sensor operating temperatures and gas concentrations.

Keywords

Metal oxide semiconductor, indium oxide, gas sensor

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