Ionızation, Attachment and Positive Synergism in CF3I+CF4+Ar Gas Mixtures with Dilute CF3I Components

Yıl 2019, Cilt: 32 Sayı: 1, 175 - 184, 01.03.2019

Suleyman Sungur Tezcan Mustafa Sezai Dıncer Hıdır Duzkaya

Öz

The
purpose of the present paper is to evaluate the swarm parameters in CF₃I+CF₄+Ar
ternary gas mixtures with dilute CF₃I components. The swarm
parameters reported are namely, ionization, attachment, effective ionization,
excitation rates and electron mean energies. 
We present the swarm data of the ternary mixture for various CF₄+Ar
base mixtures with dilute CF₃I concentrations and analyze positive
synergism in terms of attachment, ionization and excitation rates in the E/N
range of 50–700 Td (1 Td = 10-21 Vm2).  In the ternary mixture, Ar component of the
ternary mixture is kept constant at concentrations in the range of 40% - 90%
and the CF₃I component is increased from 0.5% to 55%. In the dilute
CF₃I mixtures, there is a marked increase in the electronegativity
together with increased total excitation rates while the CF₃I
component is increased. The mean energy of electrons is also reduced with
increasing CF₃I content at given E/N accordingly. The limiting E/N
values are obtained at the E/N values where the rate of ionization is equal to
the rate of attachment. The limiting E/N increases in the ternary mixture as
the CF₃I ratio is increased in the present study. The synergism is
calculated using the Boltzmann solution results of the limiting E/N fields.
Positive synergism is observed within the parameter range of this study. The
degree of synergy is very high with dilute CF₃I components.

Anahtar Kelimeler

Gas discharges, Trifluoromethyliodinecation (CF3I), Tetraflorometan (CF4), Argon, Electron swarm parameters

Kaynakça

• Tezcan, S. S., Dincer, M. S. and Bektas S., “Effective ionization coefficients, limiting electric fields, and electron energy distributions in CF3I+CF4+Ar ternary gas mixtures”, Phys. Plasmas, 23(7): 073507, (2016).
• Proshina, O. V., Rakhimova, T. V., Lopaev, D. V., Samara, V., Baklanov, M. R. and Marneffe, J. F., “Experimental and theoretical study of RF capacitively coupled plasma in Ar–CF4–CF3I mixtures”, Plasma Sources Sci. Technol., 24(5): 055006, (2015).
• Solomon, S., Burkholder, J. B., Ravishankara, A. R. and Garcia, R.R., “Ozone depletion and global warming potentials of CF3I”, J. Geophys. Res., 99(D10): 20929, (1994).
• Misraa, A., Sees, J., Hall, L., Levy, R.A., Zaitsev, V.B., Aryusook, K., Ravindranath, C., Sigal, V., Kesari and S., Rufin, D., “Plasma etching of dielectric films using the non-global-warming gas CF3I”, Materials Letters; 34(3-6): 415-419, (1998).
• Samukawa, S., Ichihashi, Y., Ohtake, H., Soda, E. and Saito, S., “Environmentally harmonized CF3I plasma for low-damage and highly selective low-k etching”, J. Appl. Phys., 103(5): 053310, (2008).
• Otell, Z., Samara, V., Zotovich, A., Hansen, T., Marneffe, J. F. and Baklanov, M. R., “Vacuum ultra-violet emission of CF4 and CF3I containing plasmas and their effect on low-k materials”, J. Phys. D: Appl. Phys., 48(39): 395202, (2015).
• Takeda, T., Matsuoka, S., Kumada, A. and Hidaka, K., “Sparkover characteristics in CF3I gas and CF3I/N2 gas mixture under non-uniform field gaps”, IEEJ Trans. Power Energy, 130(9): 813-818, (2010).
• Miric, J., Bosnjakovic, D., Simonovic, I., Petrovic. Z. L. and Dujko, S., “Electron swarm properties under the influence of a very strong attachment in SF6 and CF3I obtained by Monte Carlo rescaling procedures”, Plasma Sources Sci. Technol., 25(6): 065010, (2016).
• Urquijo, J., Mitrani, A., Ruiz-Vargas, G. and Basurto, E., “Limiting field strength and electron swarm coefficients of the CF3I–SF6 gas mixture”, J. Phys. D: Appl. Phys., 44(34): 342001, (2011).
• Yun-Kun, D. and Deng-Ming, X., “The effective ionization coefficients and electron drift velocities in gas mixtures of CF3I with N2 and CO2 obtained from Boltzmann equation analysis”, Chin. Phys. B, 22(3): 035101, (2013).
• Chen, L., Widger, P., Kamarudin, M. S., Griffiths, H. and Haddad, A., “CF3I gas mixtures: Breakdown characteristics and potential for electrical insulation”, IEEE Trans. Power Del., 32(2): 1089-1097, (2017).
• Tezcan, S. S., Dincer, M. S., Bektas, S. and Hiziroglu, H. R., “Boltzmann analysis of electron swarm parameters in binary CF4+Ar mixtures”, IEEE Trans. Dielectr. Electr. Insul., 20(1): 98-103, (2013).
• Tezcan, S. S., Duzkaya, H., Dincer, M. S. and Hiziroglu, H. R., “Assessment of electron swarm parameters and limiting electric fields in SF6+CF4+Ar gas mixtures”, IEEE Trans. Dielectr. Electr. Insul., 23(4): 1996-2005, (2016).
• Pinheiro, M. J. and Loureiro, J., “Effective ionization coefficients and electron drift velocities in gas mixtures of SF6 with He, Xe, CO2 and N2 from Boltzmann analysis”, J. Phys. D: Appl. Phys., 35(23): 3077-3084, (2002).
• Tezcan, S. S., Akcayol, M. A., Ozerdem, O. C. and Dincer, M. S., “Calculation of electron energy distribution functions from electron swarm parameters using artificial neural network in SF6 and Argon”, IEEE Trans. Plasma Sci., 38(9): 2332-2339, (2010).
• Hayashi, M., “Bibliography of electron and photon cross sections with atoms and molecules published in the 20th century – Argon”, National Institute for Fusion Science, Report No. NIFS-DATA-72, Sokendai, (2003).
• Yanguas-Gil, A., Cotrino, J. and Alves, L. L., “An update of argon inelastic cross sections for plasma discharges”, J. Phys. D: Appl. Phys., 38(10): 1588-1598, (2005).
• Kurihara, M., Petrovic, Z. L. and Makabe, T., “Transport coefficients and scattering cross-sections for plasma modelling in CF4-Ar mixtures: a swarm analysis”, J. Phys. D: Appl. Phys., 33(17): 2146-2153, (2000).
• Xingwen, L., Zhao, H., Wu, J. and Jia, S., “Analysis of the insulation characteristics of CF3I mixtures with CF4, CO2, N2, O2 and air”, J. Phys. D: Appl. Phys., 46(34): 345203, (2013).
• Kimura, M. and Nakamura, Y., “Electron swarm parameters in CF3I and a set of electron collision cross sections for the CF3I molecule,” J. Phys. D: Appl. Phys., 43(14): 145202, (2010).
• Kawaguchi, S., Satoh, K. and Itoh, H., “Electron transport in CF3I and CF3I-N2 mixtures”, Eur. Phys. J. D, 68:100, (2014).
• Urquijo, J., Juarez, A. M., Basurto, E. and Hernandez-Avila, J. L., “Electron impact ionization and attachment, drift velocities and longitudinal diffusion in CF3I and CF3I–N2 mixtures”, J. Phys. D: Appl. Phys., 40(7): 2205-2209, (2007).