TY - JOUR T1 - DC Saçtırma Metoduyla Üretilmiş Çift Katmanlı Mo İnce Filmlerin Yarı Kantitatif Doku Analizinin Yapılması ve Kutup Figürlerinin Araştırılması TT - Semi-Quantitative Texture Analysis and Investigation of Pole Figures of Bi-Layer Mo Thin Films Produced by DC Sputtering Method AU - Yavru, Celal Alp AU - Kaleli, Murat PY - 2023 DA - August DO - 10.19113/sdufenbed.1117506 JF - Süleyman Demirel Üniversitesi Fen Bilimleri Enstitüsü Dergisi JO - J. Nat. Appl. Sci. PB - Süleyman Demirel Üniversitesi WT - DergiPark SN - 1308-6529 SP - 191 EP - 196 VL - 27 IS - 2 LA - tr AB - Molibden (Mo) malzemesi benzersiz özellikleri sayesinde birçok farklı alanda kullanılmaktadır. İnce filmlerin doku analizleri sayesinde katmanlar arası arayüz durumlarının uyumluluğu araştırılmaktadır. Üretim parametrelerine ve sonrasında yapılan işlemlere göre filmlerin dokuları değişebilmektedir. Bu sebeple kullanım alanına bağlı olarak en uygun dokuya sahip Mo ince filmlerin üretilmesi için ideal üretim parametrelerinin belirlenmesi gerekmektedir. Bu çalışmada, CIGS güneş gözesi uygulamalarında sıklıkla istenen BCC yapısında ve (110) düzlemindeki Mo ince filmler üretilebilmiştir. Üretim, Mo filmin alttaş yüzeyine tutunumunu ve elektriksel iletkenliğini iyileştirmek için çift katmanlı üretim stratejisi kullanılarak gerçekleştirilmiştir. Üretilen filmlerin SEM, AFM ve XRD sistemleri ile yüzey, topoğrafya ve yapı analizleri gerçekleştirilmiş ayrıca yarı kantitatif doku analizleri yapılarak kutup figürleri elde edilmiştir. Topoğrafik ve detaylı yapısal analiz sonuçları birbirleri ile ve literatürde var olan diğer çalışmalar ile kıyaslandığında bu çalışmada ortaya koyulan üretim parametrelerinin kullanılabilirliği gösterilmiştir. KW - İnce film KW - molibden KW - doku analizi KW - kutup figürleri KW - xrd N2 - Molybdenum (Mo) material is used in many different fields thanks to its unique properties. The compatibility of interface states between layers is investigated using texture analysis of thin films. The textures of the films may change according to the production parameters and subsequent processes. For this reason, it is necessary to determine the ideal production parameters in order to produce Mo thin films with the most suitable texture depending on the usage area. In this study, Mo thin films in BCC structure and (110) plane, which are often desired in CIGS solar cell applications, could be produced. The fabrication was carried out using a bi-layer fabrication strategy to improve the adhesion and electrical conductivity of the Mo film to the substrate surface. Surface, topography and structure analyzes of the produced films were performed with SEM, AFM and XRD systems, and polar figures were obtained by semi-quantitative texture analysis. When the topographic and detailed structural analysis results are compared with each other and with other studies in the literature, the usability of the production parameters revealed in this study has been demonstrated. CR - [1] Hünsche, I., Oertel, C., Tamm, R., Skrotzki, W., Knabl, W. 2004. Microstructure and Texture Development During Recrystallization of Rolled Molybdenum Sheets. Materials Science Forum. 470(1), 495–500. CR - [2] Salomé, P. M. P., Malaquias, J., Fernandes, P. A., da Cunha, A. F. 2010. Mo Bilayer for Thin film Photovoltaics Revisited. Journal of Physics D: Applied Physics 43(34), 1-7. CR - [3] Ashraf, M. A., Alam I. 2020. Numerical Simulation of CIGS, CISSe and CZTS-Based Solar Cells with In2S3 as Buffer Layer and Au as Back Contact Using SCAPS 1D. Engineering Research Express 2(3), 1-17. CR - [4] Orgassa, K., Schock, H. W., Werner, J. H. 2003. Alternative Back Contact Materials for Thin Film Cu(In,Ga)Se2 Solar Cells. Thin Solid Films 431(432), 387–391. CR - [5] Ashour, S., Alkuhaimi, S., Moutinho, H., Matson, R., Abou-Elfotouh, F. 1993. Junction Formation and Characteristics of CdS/CulnSe2/Metal Interfaces. Thin Solid Films 226(1), 129-134. CR - [6] Ong K. H., Agileswari, R., Maniscalco, B., Arnou, P., Kumar, C. C., Bowers, J. B., Marsadek, M. M. 2018. Review On Substrate And Molybdenum Back Contact in CIGS Thin Film Solar Cell. International Journal of Photoenergy, 2018(1), 1-14. CR - [7] Gordillo, G., Grizález, M., Hernandez, L. C. 1998. Structural and Electrical Properties of DC Sputtered Molybdenum Films. Solar Energy Materials and Solar Cells 51(3), 327–337. CR - [8] Nakamura, M., Yamaguchi, K., Kimoto, Y., Yasaki, Y., Kato, T., Sugimoto, H. 2019. Cd-Free Cu(In,Ga)(Se,S)2 Thin-Film Solar Cell with Record Efficiency of 23.35%. IEEE Journal of Photovoltaics 9(6), 1863–1867. CR - [9] Yadav, B. S., Badgujar, A. C., Dhage, S. R. 2017. Effect of Various Surface Treatments on Adhesion Strength of Magnetron Sputtered Bi-Layer Molybdenum Thin Films on Soda Lime Glass Substrate. Solar Energy 157(1), 507–513. CR - [10] Bansal, N., Pandey, K., Singh, K., Mohanty, B. C. 2019. Growth Control of Molybdenum Thin Films with Simultaneously Improved Adhesion and Conductivity via Sputtering For Thin Film Solar Cell Application. Vacuum 161(1), 347–352. CR - [11] Scofield, J. H., Duda, A., Albin, D., Ballard, B. L., Predecki, P. K. 1995. Sputtered Molybdenum Bilayer Back Contact For Copper İndium Diselenide-Based Polycrystalline Thin-Film Solar Cells. Thin Solid Films 260(1), 26–31. CR - [12] Khatri H., Marsillac, S. 2008. The Effect of Deposition Parameters on Radiofrequency Sputtered Molybdenum Thin Films. Journal of Physics Condensed Matter 20(5), 1-5. CR - [13] Li, Z. H., Cho, E. S., Kwon, S. J. 2011. Molybdenum Thin Film Deposited by In-Line DC Magnetron Sputtering as a Back Contact for Cu(In,Ga)Se2 Solar Cells. Applied Surface Science 25(22), 9682–9688. CR - [14] Ricote, J., Chateigner, D. 1999. Quantitative Texture Analysis Applied to the Study of Preferential Orientations in Ferroelectric Thin Films. Cerámica y Vidrio 38(6), 587-591. CR - [15] Krishnan, R., Riley, M., Lee, S., Lu, T. M. 2011. Formation of Biaxially Textured Molybdenum Thin Films Under The Influence of Recrystallization Conditions. Thin Solid Films 519(16) 5429–5432. CR - [16] Lobanov, M. L., Danilov, S. V., Pastukhov, V. I., Averin, S. A., Khrunyk, Y. Y., Popov, A. A. 2016. The Crystallographic Relationship of Molybdenum Textures After Hot Rolling and Recrystallization. Materials and Design. 109(1), 251–255. CR - [17] Yoon, J. H., Yoon, K. H., Kim, J. K., Kim W. M., Park, J. K., Lee, T. S., Baik, Y. J., Seong, T.Y., Jeong, J.H 2010. Effect of The Mo Back Contact Microstructure on The Preferred Orientation of CIGS Thin Films. Record of the IEEE Photovoltaic Specialists Conference 978(1), 2443–2447. CR - [18] Contreras, M. A., Romero, M. J., Noufi, R. 2006. Characterization of Cu(In,Ga)Se2 Materials Used in Record Performance Solar Cells. Thin Solid Films 512(1), 51–54. UR - https://doi.org/10.19113/sdufenbed.1117506 L1 - https://dergipark.org.tr/tr/download/article-file/2431356 ER -