TY - JOUR T1 - Fabrication and analysis of ZnO and Al-doped ZnO films using the SILAR technique TT - ZnO ve Al-katkılı ZnO filmlerin SILAR tekniğiyle üretimi ve analizleri AU - Kara, İlker AU - Hafedh, Abjar Ibrahim Rashid AU - Waelı, Ihsan Sadeq Raheem PY - 2024 DA - October Y2 - 2024 DO - 10.28948/ngumuh.1439098 JF - Niğde Ömer Halisdemir Üniversitesi Mühendislik Bilimleri Dergisi JO - NÖHÜ Müh. Bilim. Derg. PB - Niğde Ömer Halisdemir Üniversitesi WT - DergiPark SN - 2564-6605 SP - 1074 EP - 1079 VL - 13 IS - 4 LA - en AB - In this study, pure ZnO and Al-doped ZnO thin films at different concentrations were successfully grown on an ITO substrate using the SILAR method. The produced thin films were characterized by SEM/EDS, XRD, and UV-Vis spectroscopy. According to the XRD analysis results, it was observed that the produced thin films crystallized on a nanometer scale, and the crystallization quality varied depending on the concentration of Al doping. SEM/EDS analysis results indicated that Al-doped ZnO thin films affected the morphology, forming nano-root structures. UV-Vis analysis results showed that the band gap values of the thin films produced varied depending on the Al dopant, with decreased values, sharper absorption edges, and increased absorption intensities. KW - SILAR method KW - Zinc oxide KW - Al doped ZnO N2 - Bu çalışmada, farklı konsantrasyonlarda saf ZnO (Çinko Oksit) ve Al-katkılı ZnO ince filmler, ITO tabanı üzerine SILAR yöntemi ile başarıyla büyütüldü. Üretilen ince filmler SEM/EDS, XRD ve UV-Vis spektroskopisi ile karakterize edilmiştir. XRD analizi sonuçlarına göre, üretilen ince filmlerin nanometre ölçeğinde kristalleştiği ve kristalleşme kalitesinin Al-katkı konsantrasyonuna bağlı olarak değiştiği gözlendi. SEM/EDS analizi sonuçları, Al-katkılı ZnO ince filmlerin morfolojisi üzerinde etkilemiş olup nano-kök yapılar oluşturulmuştur. 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