TY - JOUR TT - Ohmıc Conta Ct Characterıza Tıon Wıth Transmıssıon Lıne Model AU - Erkaya, Hasan Hüseyin PY - 1999 DA - December Y2 - 1999 JF - Eskişehir Osmangazi Üniversitesi Mühendislik ve Mimarlık Fakültesi Dergisi JO - ESOGÜ Müh Mim Fak Derg PB - Eskişehir Osmangazi Üniversitesi WT - DergiPark SN - 2630-5712 SP - 92 EP - 105 VL - 12 IS - 2 KW - Omik Kuııiaklcır KW - Transnüsyon Hatlı Modeli KW - Yanilelken Dii:en ()/{. ///// lü! 7. N2 - The iraıısmissioı: line nıodelfor thc ohmic coıılacl characleri:a!ion is desen hedSiıorlmıniıys çiftin' ınelhod aıv pointed oııl, wıd nmdı/îcations for Ihe measuremenl lechnujiıe(iıv ıııv. wnlvı. l. 'l'hv linıilalions of Ihe lechnigııe are discııssed. For large geomeırymıitivdilılııclcı. '-tievices. llıe Iraıısnıissioıı liııe melhoci may be ıısed in the characterizaüon of thedhnıic ciHilacls: houvver. çare mıısl be lcıken for small geomelry devices vıhere Ihe contaclıv. -ii.'. ttiıiiv is XHKI// cııitt easily o/ıscıııvci hy ths other effecls. CR - î""T""and D- widman". "Messung des Ubergangswiderstandes 2wischen Metal] "L Djffusionsschich! in Sı-Planarelementen, " Sotid-Sıale Elachvıı/cs, vol. 12. Do. 879- 886. 1969. -., -.. -.....-"-.. ". "..",. ",.,,,,,,,. < CR - R,M.ur.man" and D-widr"ann, "Current Crowding on Meta! Contacts to Planar Devices." IKEK Traııs. Eleclron Devices, vol. ED-16, pp. 1022-1024, Dec. 1969. CR - H;.Be.rger'-rModels for co"tacts to Pianar Devices, " Solid-Slale Eleclronics. yol. 15. pp. 145-158, 1972. ' ^ ""' . "-.. -. CR - G. ^K. Reeves, "Specific Contact Resistance Using a circular Transmission Line Model." 1-Slalv Elcclroııics, vol. 23, pp. 487-490, 1980" ^" -"'~ "'"""' CR - G.^ K. Reeves^ and ^H. B.Harrison, "Obtaining the Spec.ific Contact Resistance from Line Model Measurements, " 1EEE Electroıı Device Letl.^ vol'EDL^" Pp. lll-lI3. May 1983. -^--. ---....., ^..... ^,,, vu.. cu^, CR - M: He'blu'"', M; '. Nat['a" .l"d C. A. Cha"S, "Characteristics ofAuGeNİ Ohmic Contacts to ı?. As, " Soliıi-Slalf Eleclronics, vol. 25, pp. 185-195, March 1982. CR - , cohen- "COMaü Resistance and Metlıods for Its Determination, " Thiı, Solid Films. vol. 104, pp . 361-379, 1983. ^-...... -.., ...... ^,,.. . , "".,, CR - D. K ^ Schroderand D. L. Meier, "Solar Celi Contact Resistance - A Review, " 1EEE rcıııs. L/ad/vi! Dcvices, voI. ED-3 l, pp. 637-647, May 1984. ^ . --. -. -.., CR - D.. L_Meier and D K-schroder. "C°"tact Resistance: Its Measurement and Relative ^a^, ^^4LOSS' "a SOIarc e"'"I EEET ra"s-E l^^^^t [10] J,',M^P"r'b]ey. ;Duai-LevelJransn.. ission Line Model for Currenl FIow in Metal- ^tp^ Comacts, " /£££ 7/u/u. ffecftT Dcvices, vol. ED-33,^po'. 1795'-İ November 1986. ' -.---. fi--"---. """, CR - 105[II] J. K. Reeves and H. B. Harrison, "An Anal>-tical Model for Alloyed Ohmic Contacıs Using a Trililyer Transmission Line Model, " IEEE Trans. Electroıı Devices, vol. ED-42. pp. 1536-1547. August 1995. CR - [12] D. Sawdai, D. Pavlidis, and D. Cui, "Enhanced Transmission Line Model Stnıctures for Accurate Resistance Evaluation of Small-size Contacts and for More Reiiable Fabrication, " JEEE Traııs. Electro/t Devices, vol. ED-46, pp. 1302-131], July 1999. CR - [13] D. K. Schroder, Semicoııdvctor Materiat aııd Device Characlerizalion, New York: Wilev- Interscience, 1990, pp. 99-}46 UR - https://dergipark.org.tr/tr/pub/ogummf/issue//330027 L1 - https://dergipark.org.tr/tr/download/article-file/327181 ER -