TY - JOUR T1 - Optical Properties of AlInN/AlN HEMTs in Detail TT - AlInN/AlN HEMT’in Detaylı Optik Özellikleri AU - Akpınar, Ömer AU - Bilgili, Ahmet AU - Öztürk, Mustafa AU - Özçelik, Süleyman PY - 2022 DA - December DO - 10.31466/kfbd.954421 JF - Karadeniz Fen Bilimleri Dergisi JO - KFBD PB - Giresun Üniversitesi WT - DergiPark SN - 2564-7377 SP - 521 EP - 529 VL - 12 IS - 2 LA - en AB - In this study, the optical properties of AlInN/AlN high electron mobility transistor (HEMT) structure, grown on c-oriented sapphire with Metal-Organic Chemical Vapor Deposition (MOCVD) technique, being investigated. Optical characterization is made Kubelka- Munk method. Transmittance, absorbance, and reflectance are investigated in detail. Also, the Kubelka-Munk theory is employed to determine the forbidden energy band gap of InN by using special functions. The energy band gap obtained by this method was compared. KW - MOCVD KW - HEMT KW - AlInN/InN KW - Transmittance KW - Kubelka-Munk Method KW - Mobilite N2 - Bu çalışmada, Metal Organik Kimyasal Buhar Biriktirme (MOCVD) tekniği ile c-yönelimli safir üzerinde büyütülen AlInN/AlN yüksek elektron hareketli transistör (HEMT) yapısının optik özellikleri incelenmiştir. Optik karakterizasyon Kubelka-Munk yöntemiyle yapılmıştır. Geçirgenlik, absorbans, yansıma detaylı olarak incelenmiştir. Ayrıca özel fonksiyonlar kullanarak InN'nin yasak enerji bant aralığını belirlemek için Kubelka-Munk teorisinden yararlanılmıştır. Bu yöntemle elde edilen enerji bant aralığının karşılaştırılması yapılmıştır. CR - Vurgaftman, I., and Meyer, J. R. (2003). Band parameters for nitrogen-containing semiconductors. Journal of Applied Physics, 94(6), 3675-3696. CR - Aleksan, R., Bolognese, T., Equer, B., Karar, A., and, Reymond, J. M. (1990). Observation of Single Minimum Ionizing Particles with Amorphous-Silicon Diodes. Nuclear Instruments & Methods in Physics Research Section a-Accelerators Spectrometers Detectors and Associated Equipment, 305(3), 512-516. CR - Li, Y., Qian, F., Gredecak, S., Wu, Y., Yan, H., Blom, D. A., and, Lieber, C. M. (2006). Dopant-free GaN/AlN/AlGaN radial nanowire heterostructures as high electron mobility transistors. Nano Letters, 6(7), 1468-1473. CR - Nakamura, S. (1991). Gan Growth Using Gan Buffer Layer. Japanese Journal of Applied Physics Part 2-Letters, 30(10a), 1705-1707. CR - Xing, H., Keller, S., Wu, Y. F., Mccarty, L., Smorchkova, I. P., Buttari, D., Coffie, R., Green, D. S., Parish, G., Heikman, S., Shen, L., Zhang, N., Xu, J. J., Denbaars, S. P., and, Mishra, U. K. (2001). Gallium nitride-based transistors. Journal of Physics-Condensed Matter, 13(32), 7139-7157. CR - Hajlaoui, M., Sediri, H., Pierucci, D., Henck, H., Phuphachong, T., Silly M., Vaulchier, L., Sirotti, F., Guldner, Y., Belkhou, R., and Ouerghi, A. (2016). High Electron Mobility in Epitaxial Trilayer Graphene on Off-axis SiC(0001). Scientific Reports, 22(7), 1-7 CR - Akpinar, O., Bilgili, A. K., Baskose, U. C., Ozturk, M. K., Ozcelik, S., and, Ozbay, E. (2020). Swanepoel method for AlInN/AlN HEMTs. Journal of Materials Science: Materials in Electronics, 31, (9969-9973). CR - Groh, C. L., Brien, W. J., and, Boenke, K. M. (1992). Differences in color between fired porcelain and shade guides. Int J Prosthodont, 5(6), 510-4. CR - Osa, R. A., Iparragirre, I., Ortiz, D., and Saiz, J. M. (2020). The extended Kubelka-Munk theory and its application to spectroscopy. ChemTexts, 6(2), 1585. CR - Murphy, A. B. (2007). Band-gap determination from diffuse reflectance measurements of semiconductor films, and application to photoelectrochemical water-splitting. Solar Energy Materials& Solar Cells. 91, 1326–1337. CR - Inbaraj, P. F. H., Prince, J. J. (2018). Optical and structural properties of Mg-doped ZnO thin films by a chemical bath deposition method. Journal of Materials Science: Materials in Electronics, 29(2), 935–943. UR - https://doi.org/10.31466/kfbd.954421 L1 - https://dergipark.org.tr/tr/download/article-file/1831841 ER -