Nitrogen effect on the surface and optical properties of cubic and hexagonal BN nano layered thin films deposited by RF sputtering method

Volume: 17 Number: 1 April 25, 2016
Suat Pat
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Anadolu University Journal of Science and Technology A - Applied Sciences and Engineering Cover Anadolu University Journal of Science and Technology A - Applied Sciences and Engineering
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Nitrogen effect on the surface and optical properties of cubic and hexagonal BN nano layered thin films deposited by RF sputtering method

Abstract

In this study, influence of N2 gas concentration on the surface and optical properties of BN thin films were investigated.  A cubic BN phase, from the hexagonal structure, was produced by nitrogen concentration during the deposition process. All BN thin films were deposited on glass substrates by reactive radio frequency magnetron sputtering method at argon / nitrogen (ratios of 3:7, 1:1 and 4:1) gas mixtures.  For the determination of these two phases’ surface and optical properties, field emission scanning electron microscopy, wavelength dispersive x-ray spectroscopy, atomic force microscopy, UV-Vis spectrophotometry, tensiometry, and interferometry tools were used. According to the results, the deposited films are homogenous, compact and nano-structured, and hydrophobic. Perfect stoichiometric ratios were obtained for deposited samples. Phase transitions to cubic phase from hexagonal BN crystal system were only obtained by N2 gas concentration.  

Keywords

Nano-thick BN layer,cubic BN; hexagonal BN; surface properties; optical properties

References

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Details

Primary Language

English

Subjects

-

Journal Section

-

Authors

Publication Date

April 25, 2016

Submission Date

January 6, 2016

Acceptance Date

-

Published in Issue

Year 2016 Volume: 17 Number: 1

DOI

https://doi.org/10.18038/btda.52472

IZ

https://izlik.org/JA45LY29NC

Cite

RIS / Bibtex
APA
Pat, S. (2016). Nitrogen effect on the surface and optical properties of cubic and hexagonal BN nano layered thin films deposited by RF sputtering method. Anadolu University Journal of Science and Technology A - Applied Sciences and Engineering, 17(1), 191-198. https://doi.org/10.18038/btda.52472
AMA
1.Pat S. Nitrogen effect on the surface and optical properties of cubic and hexagonal BN nano layered thin films deposited by RF sputtering method. AUJST-A. 2016;17(1):191-198. doi:10.18038/btda.52472
Chicago
Pat, Suat. 2016. “Nitrogen Effect on the Surface and Optical Properties of Cubic and Hexagonal BN Nano Layered Thin Films Deposited by RF Sputtering Method”. Anadolu University Journal of Science and Technology A - Applied Sciences and Engineering 17 (1): 191-98. https://doi.org/10.18038/btda.52472.
EndNote
Pat S (June 1, 2016) Nitrogen effect on the surface and optical properties of cubic and hexagonal BN nano layered thin films deposited by RF sputtering method. Anadolu University Journal of Science and Technology A - Applied Sciences and Engineering 17 1 191–198.
IEEE
[1]S. Pat, “Nitrogen effect on the surface and optical properties of cubic and hexagonal BN nano layered thin films deposited by RF sputtering method”, AUJST-A, vol. 17, no. 1, pp. 191–198, June 2016, doi: 10.18038/btda.52472.
ISNAD
Pat, Suat. “Nitrogen Effect on the Surface and Optical Properties of Cubic and Hexagonal BN Nano Layered Thin Films Deposited by RF Sputtering Method”. Anadolu University Journal of Science and Technology A - Applied Sciences and Engineering 17/1 (June 1, 2016): 191-198. https://doi.org/10.18038/btda.52472.
JAMA
1.Pat S. Nitrogen effect on the surface and optical properties of cubic and hexagonal BN nano layered thin films deposited by RF sputtering method. AUJST-A. 2016;17:191–198.
MLA
Pat, Suat. “Nitrogen Effect on the Surface and Optical Properties of Cubic and Hexagonal BN Nano Layered Thin Films Deposited by RF Sputtering Method”. Anadolu University Journal of Science and Technology A - Applied Sciences and Engineering, vol. 17, no. 1, June 2016, pp. 191-8, doi:10.18038/btda.52472.
Vancouver
1.Suat Pat. Nitrogen effect on the surface and optical properties of cubic and hexagonal BN nano layered thin films deposited by RF sputtering method. AUJST-A. 2016 Jun. 1;17(1):191-8. doi:10.18038/btda.52472