THE CHANGE OF LINE RATIO OF OPTICAL EMISSION SPECTRA WITH TIME FOR INDUCTIVE RADIO FREQUENCY ARGON DISCHARGE AT LOW PRESSURE

Yıl 2019, , 55 - 60, 16.12.2019

Murat Tanışlı

https://doi.org/10.18038/estubtda.636565

Öz

In this study, inductive radio-frequency (RF) argon
(Ar) discharge and afterglow downstream discharge at low pressure were
investigated with optical emission spectroscopy (OES). Spectral lines recorded
with OES measurements were detected in the wavelength range of 650-900 nm. For
all measurements, a spectrum line that remained at approximately the same value
was taken as the value of the reference wavelength throughout the study. The
changes in the optical emission spectrum ratios of the inductive RF Ar
discharge and the afterglow downstream discharge with respect to time were
compared. As a result, it was reported that some transitions for both regions
were to be increased in time. The transitions in time for some wavelengths (738.39,
751.47, 772.42, 801.48, 810.37 and 842.46 nm) have been approximately improved
between 20% and 34% for discharge zone. Also, it can be increased for
wavelength of 801.48 nm in afterglow downstream discharge region (32.55%).

Anahtar Kelimeler

Discharge in vacuum, Ionization of plasma, Plasma properties, High frequency and RF discharge

Destekleyen Kurum

Eskişehir Technical University

Proje Numarası

19ADP154

Teşekkür

We are grateful to Eskişehir Technical University via Research Project No: 19ADP154.

Kaynakça

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