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## THE CHANGE OF LINE RATIO OF OPTICAL EMISSION SPECTRA WITH TIME FOR INDUCTIVE RADIO FREQUENCY ARGON DISCHARGE AT LOW PRESSURE

#### Murat TANIŞLI [1]

In this study, inductive radio-frequency (RF) argon (Ar) discharge and afterglow downstream discharge at low pressure were investigated with optical emission spectroscopy (OES). Spectral lines recorded with OES measurements were detected in the wavelength range of 650-900 nm. For all measurements, a spectrum line that remained at approximately the same value was taken as the value of the reference wavelength throughout the study. The changes in the optical emission spectrum ratios of the inductive RF Ar discharge and the afterglow downstream discharge with respect to time were compared. As a result, it was reported that some transitions for both regions were to be increased in time. The transitions in time for some wavelengths (738.39, 751.47, 772.42, 801.48, 810.37 and 842.46 nm) have been approximately improved between 20% and 34% for discharge zone. Also, it can be increased for wavelength of 801.48 nm in afterglow downstream discharge region (32.55%).

Discharge in vacuum, Ionization of plasma, Plasma properties, High frequency and RF discharge
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Birincil Dil en Temel Bilimler Makaleler Orcid: 0000-0001-7578-7344Yazar: Murat TANIŞLI (Sorumlu Yazar)Kurum: FEN FAKÜLTESİÜlke: Turkey Eskişehir Technical University 19ADP154 We are grateful to Eskişehir Technical University via Research Project No: 19ADP154. Yayımlanma Tarihi : 16 Aralık 2019
 Bibtex @araştırma makalesi { estubtda636565, journal = {Eskişehir Technical University Journal of Science and Technology A - Applied Sciences and Engineering}, issn = {2667-4211}, address = {btda@anadolu.edu.tr}, publisher = {Eskişehir Teknik Üniversitesi}, year = {2019}, volume = {20}, pages = {55 - 60}, doi = {10.18038/estubtda.636565}, title = {THE CHANGE OF LINE RATIO OF OPTICAL EMISSION SPECTRA WITH TIME FOR INDUCTIVE RADIO FREQUENCY ARGON DISCHARGE AT LOW PRESSURE}, key = {cite}, author = {Tanışlı, Murat} } APA Tanışlı, M . (2019). THE CHANGE OF LINE RATIO OF OPTICAL EMISSION SPECTRA WITH TIME FOR INDUCTIVE RADIO FREQUENCY ARGON DISCHARGE AT LOW PRESSURE . Eskişehir Technical University Journal of Science and Technology A - Applied Sciences and Engineering , 20 () , 55-60 . DOI: 10.18038/estubtda.636565 MLA Tanışlı, M . "THE CHANGE OF LINE RATIO OF OPTICAL EMISSION SPECTRA WITH TIME FOR INDUCTIVE RADIO FREQUENCY ARGON DISCHARGE AT LOW PRESSURE" . Eskişehir Technical University Journal of Science and Technology A - Applied Sciences and Engineering 20 (2019 ): 55-60 Chicago Tanışlı, M . "THE CHANGE OF LINE RATIO OF OPTICAL EMISSION SPECTRA WITH TIME FOR INDUCTIVE RADIO FREQUENCY ARGON DISCHARGE AT LOW PRESSURE". Eskişehir Technical University Journal of Science and Technology A - Applied Sciences and Engineering 20 (2019 ): 55-60 RIS TY - JOUR T1 - THE CHANGE OF LINE RATIO OF OPTICAL EMISSION SPECTRA WITH TIME FOR INDUCTIVE RADIO FREQUENCY ARGON DISCHARGE AT LOW PRESSURE AU - Murat Tanışlı Y1 - 2019 PY - 2019 N1 - doi: 10.18038/estubtda.636565 DO - 10.18038/estubtda.636565 T2 - Eskişehir Technical University Journal of Science and Technology A - Applied Sciences and Engineering JF - Journal JO - JOR SP - 55 EP - 60 VL - 20 IS - SN - 2667-4211- M3 - doi: 10.18038/estubtda.636565 UR - https://doi.org/10.18038/estubtda.636565 Y2 - 2019 ER - EndNote %0 Eskişehir Technical University Journal of Science and Technology A - Applied Sciences and Engineering THE CHANGE OF LINE RATIO OF OPTICAL EMISSION SPECTRA WITH TIME FOR INDUCTIVE RADIO FREQUENCY ARGON DISCHARGE AT LOW PRESSURE %A Murat Tanışlı %T THE CHANGE OF LINE RATIO OF OPTICAL EMISSION SPECTRA WITH TIME FOR INDUCTIVE RADIO FREQUENCY ARGON DISCHARGE AT LOW PRESSURE %D 2019 %J Eskişehir Technical University Journal of Science and Technology A - Applied Sciences and Engineering %P 2667-4211- %V 20 %N %R doi: 10.18038/estubtda.636565 %U 10.18038/estubtda.636565 ISNAD Tanışlı, Murat . "THE CHANGE OF LINE RATIO OF OPTICAL EMISSION SPECTRA WITH TIME FOR INDUCTIVE RADIO FREQUENCY ARGON DISCHARGE AT LOW PRESSURE". Eskişehir Technical University Journal of Science and Technology A - Applied Sciences and Engineering 20 / (Aralık 2019): 55-60 . https://doi.org/10.18038/estubtda.636565 AMA Tanışlı M . THE CHANGE OF LINE RATIO OF OPTICAL EMISSION SPECTRA WITH TIME FOR INDUCTIVE RADIO FREQUENCY ARGON DISCHARGE AT LOW PRESSURE. Eskişehir Technical University Journal of Science and Technology A - Applied Sciences and Engineering. 2019; 20: 55-60. Vancouver Tanışlı M . THE CHANGE OF LINE RATIO OF OPTICAL EMISSION SPECTRA WITH TIME FOR INDUCTIVE RADIO FREQUENCY ARGON DISCHARGE AT LOW PRESSURE. Eskişehir Technical University Journal of Science and Technology A - Applied Sciences and Engineering. 2019; 20: 55-60.

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