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Microstructure and Mechanical Properties of TiN/TiCN/TiC Multilayer Thin Films Deposited by Magnetron Sputtering

Yıl 2021, Cilt: 5 Sayı: 1, 15 - 20, 15.07.2021

Öz

Enhancement of scratch and hardness mechanical properties of TiN/TiCN/TiC multilayer thin films deposited on commercially pure Titanium (Cp-Ti) and silicon (Si) substrates via magnetron sputtering technique were investigated in this study. The structural, chemical and mechanical properties of the coatings were characterized by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM), nanoindentation and scratch tests. Results of the XRD analysis showed reflections corresponded to cubic and polycrystalline structure for TiN/TiCN/TiC films. XPS analysis of the uppermost layer of TiN/TiCN/TiC film revealed that titanium nitride and titanium carbide were formed in the coatings. According to SEM cross-sectional images, the coatings demonstrated dense structure as well as good adhesion to the substrate with a thickness of 3.035 μm. Nanoindentation hardness and critical load valueof scratch test results of TiN/TiCN/TiCmultilayer filmcoated on Cp-Ti substrate materials obtained 19.75 GPa and 21 N, respectively.

Kaynakça

  • [1]Kolli M, Kumar A. Effect of dielectric fluid with surfactant and graphite powder on Electrical Discharge Machining of titanium alloy using Taguchi method. Engineering Science and Technology, an International Journal(2015) 18(4):524–535.
  • [2]Sivaprakasam P, Hariharan P, Gowri S. Modeling and analysis of micro-WEDM process of titanium alloy (Ti–6Al–4V) using response surface approach. Engineering Science and Technology, an International Journal(2014) 17(4):227–235.
  • [3]Ataibis V, Taktak S. Characteristics and growth kinetics of plasma paste borided Cp–Ti and Ti6Al4V alloy. Surface and Coatings Technology(2015) 279:65–71.
  • [4]Lautenschlager EP, Monaghan P. Titanium and titanium alloys as dental materials. Int Dent J(1993) 43(3):245–253.
  • [5]Bao M, Xu X, Zhang H, Liu X, Tian L, Zeng Z, et al. Tribological behavior at elevated temperature of multilayer TiCN/TiC/TiN hard coatings produced by chemical vapor deposition. Thin Solid Films(2011) 520(2):833–836.
  • [6]Wang HL, He JL, Hon MH. Sliding wear resistance of TiCN coatings on tool steel made by plasma-enhanced chemical vapour deposition. Wear(1993) 169(2):195–200.
  • [7]Saoula N, Madaoui N, Tadjine R, Erasmus RM, Shrivastava S, Comins JD. Influence of substrate bias on the structure and properties of TiCN films deposited by radio-frequency magnetron sputtering. Thin Solid Films(2016) 616:521–529.
  • [8]Zhu L, He J, Yan D, Xiao L, Dong Y, Zhang J, et al. Synthesis and microstructure observation of titanium carbonitride nanostructured coatings using reactive plasma spraying in atmosphere. Applied Surface Science(2011) 257(20):8722–8727.
  • [9]Mi P, He J, Qin Y, Chen K. Nanostructure reactive plasma sprayed TiCN coating. Surface and Coatings Technology(2017) 309:1–5.[10]Devia DM, Restrepo-Parra E, Arango PJ. Comparative study of titanium carbide and nitridecoatings grown by cathodic vacuum arc technique. Applied Surface Science(2011) 258(3):1164–1174.
  • [11]Zheng J, Hao J, Liu X, Gong Q, Liu W. A thick TiN/TiCN multilayer film by DC magnetron sputtering. Surface and Coatings Technology(2012) 209:110–116.
  • [12]Wang S-S, Xia Y, Zhang L-B, Guang H-B, Shen M, Zhang F-M. Effect of NbN and ZrN films formed by magnetron sputtering on Ti and porcelain bonding. Surface and Coatings Technology(2010) 205(7):1886–1891.
  • [13]Zambrano G, Prieto P, Perez F, Rincon C, Galindo H, Cota-Araiza L, et al. Hardness and morphological characterization of tungsten carbide thin films. Surface and Coatings Technology(1998) 108-109:323–327.
  • [14]Yao SH, Su YL, Kao WH, Cheng KW. Wear behavior of DC unbalanced magnetron sputter deposited ZrCN films. Materials Letters(2005) 59(26):3230–3233.[15]Rie KT, Wöhle J. Plasma-CVD of TiCN and ZrCN films on light metals. Surface and Coatings Technology(1999) 112(1):226–229.
  • [16]Latella BA, Gan BK, Davies KE, McKenzie DR, McCulloch DG. Titanium nitride/vanadium nitride alloy coatings: mechanical properties and adhesion characteristics. Surface and Coatings Technology(2006) 200(11):3605–3611.
  • [17]Radhakrishnan G, Adams PM. Pulsed-laser deposition of particulate-free TiC coatings for tribological applications. Applied Physics A(1999) 69(1):S33-S38. doi:10.1007/s003399900163.
  • [18]Antunes RA, Rodas ACD, Lima NB, Higa OZ, Costa I. Study of the corrosion resistance and in vitro biocompatibility of PVD TiCN-coated AISI 316L austenitic stainless steel for orthopedic applications. Surface and Coatings Technology(2010) 205(7):2074–2081.
  • [19]Su YL, Kao WH. Tribological Behavior and Wear Mechanisms of TiN/TiCN/TiN Multilayer Coatings. Journal of Materials Engineering and Performance(1998) 7(5):601–612.
  • [20]Behrens BA, Huskic A. Wear reduction on dies for precision forging of gear wheels by means of multi-layer coating (TiN-TiCN-TiC). Materialwissenschaft und Werkstofftechnik(2005) 36(5):218–225.
  • [21]Zhang G, Li B, Jiang B, Yan F, Chen D. Microstructure and tribological properties of TiN, TiC and Ti(C, N) thin films prepared by closed-field unbalanced magnetron sputtering ion plating. Applied Surface Science(2009) 255(21):8788–8793.
  • [22]Natarajan G, Kumar N, Pandian R, Amirthapandian S. Grain boundary modification of TiC ultrananocrystalline thin films: Improvement in tribo-physical properties. Materials Chemistry and Physics(2018) 217:468–476.
  • [23]Levi G, Kaplan WD, Bamberger M. Structure refinement of titanium carbonitride (TiCN). Materials Letters(1998) 35(5):344–350.
  • [24]Meng J, Lu J, Wang J, Yang S. Tribological behavior of TiCN-based cermets at elevated temperatures. Materials Science and Engineering: A(2006) 418(1):68–76.
  • [25]Siow PC, A. Ghani J, Ghazali MJ, Jaafar TR, Selamat MA, Che Haron CH. Characterization of TiCN and TiCN/ZrN coatings for cutting tool application. Ceramics International(2013) 39(2):1293–1298. 20International Journal of Innovative Research and Reviews5(1) 15-20
  • [26]Restrepo Parra E, Arango PJ, Benavides V. XPS structure analysis of TiN/TiC bilayers produced by pulsed vacuumarc discharge(2010).
  • [27]Bhushan B, Ko PL. Introduction to tribology. Appl. Mech. Rev.(2003) 56(1):B6-B7.
  • [28]Bull SJ. Failure mode maps in the thin film scratch adhesion test. Tribology International(1997) 30(7):491–498.
  • [29]Zeng XT, Liu Y, Wei J, Holiday P. Influence of Substrate Hardness on the Properties of PVD Hard Coatings(2008). 156-161.
  • [30]Wirasate S, Boerio FJ. Effect of Adhesion, Film Thickness, and Substrate Hardness on the Scratch Behavior of Poly(carbonate) Films. The Journal of Adhesion(2005) 81(5):509–528. doi:10.1080/00218460590944954.
  • [31]Guruvenket S, Li D, Klemberg-Sapieha JE, Martinu L, Szpunar J. Mechanical and tribological properties of duplex treated TiN, nc-TiN/a-SiNx and nc-TiCN/a-SiCN coatings deposited on 410 low alloy stainless steel. Surface and Coatings Technology(2009) 203(19):2905–2911.
  • [32]Bemporad E, Pecchio C, Rossi S de, Carassiti F. Characterization and hardness modelling of alternate TIN/TICN multilayer cathodic arc PVD coating on tool steel. Surface and Coatings Technology(2001) 146-147:363–370.
  • [33]Kim G-H, Rand AG, Letcher SV. Impedance characterization of a piezoelectric immunosensor: Part I: Antibody coating and buffer solution. Biosensors and Bioelectronics(2003) 18(1):83–89.
  • [34]Peters AM, Nastasi M. Effect of carrier gas on the deposition of titanium carbo-nitride coatings by a novel organo-metallic plasma immersion ion processing technique. Vacuum(2002) 67(2):169–175.
  • [35]Caicedo JC, Amaya C, Yate L, Gómez ME, Zambrano G, Alvarado-Rivera J, et al. TiCN/TiNbCN multilayer coatings with enhanced mechanical properties. Applied Surface Science(2010) 256(20):5898–5904.
Yıl 2021, Cilt: 5 Sayı: 1, 15 - 20, 15.07.2021

Öz

Kaynakça

  • [1]Kolli M, Kumar A. Effect of dielectric fluid with surfactant and graphite powder on Electrical Discharge Machining of titanium alloy using Taguchi method. Engineering Science and Technology, an International Journal(2015) 18(4):524–535.
  • [2]Sivaprakasam P, Hariharan P, Gowri S. Modeling and analysis of micro-WEDM process of titanium alloy (Ti–6Al–4V) using response surface approach. Engineering Science and Technology, an International Journal(2014) 17(4):227–235.
  • [3]Ataibis V, Taktak S. Characteristics and growth kinetics of plasma paste borided Cp–Ti and Ti6Al4V alloy. Surface and Coatings Technology(2015) 279:65–71.
  • [4]Lautenschlager EP, Monaghan P. Titanium and titanium alloys as dental materials. Int Dent J(1993) 43(3):245–253.
  • [5]Bao M, Xu X, Zhang H, Liu X, Tian L, Zeng Z, et al. Tribological behavior at elevated temperature of multilayer TiCN/TiC/TiN hard coatings produced by chemical vapor deposition. Thin Solid Films(2011) 520(2):833–836.
  • [6]Wang HL, He JL, Hon MH. Sliding wear resistance of TiCN coatings on tool steel made by plasma-enhanced chemical vapour deposition. Wear(1993) 169(2):195–200.
  • [7]Saoula N, Madaoui N, Tadjine R, Erasmus RM, Shrivastava S, Comins JD. Influence of substrate bias on the structure and properties of TiCN films deposited by radio-frequency magnetron sputtering. Thin Solid Films(2016) 616:521–529.
  • [8]Zhu L, He J, Yan D, Xiao L, Dong Y, Zhang J, et al. Synthesis and microstructure observation of titanium carbonitride nanostructured coatings using reactive plasma spraying in atmosphere. Applied Surface Science(2011) 257(20):8722–8727.
  • [9]Mi P, He J, Qin Y, Chen K. Nanostructure reactive plasma sprayed TiCN coating. Surface and Coatings Technology(2017) 309:1–5.[10]Devia DM, Restrepo-Parra E, Arango PJ. Comparative study of titanium carbide and nitridecoatings grown by cathodic vacuum arc technique. Applied Surface Science(2011) 258(3):1164–1174.
  • [11]Zheng J, Hao J, Liu X, Gong Q, Liu W. A thick TiN/TiCN multilayer film by DC magnetron sputtering. Surface and Coatings Technology(2012) 209:110–116.
  • [12]Wang S-S, Xia Y, Zhang L-B, Guang H-B, Shen M, Zhang F-M. Effect of NbN and ZrN films formed by magnetron sputtering on Ti and porcelain bonding. Surface and Coatings Technology(2010) 205(7):1886–1891.
  • [13]Zambrano G, Prieto P, Perez F, Rincon C, Galindo H, Cota-Araiza L, et al. Hardness and morphological characterization of tungsten carbide thin films. Surface and Coatings Technology(1998) 108-109:323–327.
  • [14]Yao SH, Su YL, Kao WH, Cheng KW. Wear behavior of DC unbalanced magnetron sputter deposited ZrCN films. Materials Letters(2005) 59(26):3230–3233.[15]Rie KT, Wöhle J. Plasma-CVD of TiCN and ZrCN films on light metals. Surface and Coatings Technology(1999) 112(1):226–229.
  • [16]Latella BA, Gan BK, Davies KE, McKenzie DR, McCulloch DG. Titanium nitride/vanadium nitride alloy coatings: mechanical properties and adhesion characteristics. Surface and Coatings Technology(2006) 200(11):3605–3611.
  • [17]Radhakrishnan G, Adams PM. Pulsed-laser deposition of particulate-free TiC coatings for tribological applications. Applied Physics A(1999) 69(1):S33-S38. doi:10.1007/s003399900163.
  • [18]Antunes RA, Rodas ACD, Lima NB, Higa OZ, Costa I. Study of the corrosion resistance and in vitro biocompatibility of PVD TiCN-coated AISI 316L austenitic stainless steel for orthopedic applications. Surface and Coatings Technology(2010) 205(7):2074–2081.
  • [19]Su YL, Kao WH. Tribological Behavior and Wear Mechanisms of TiN/TiCN/TiN Multilayer Coatings. Journal of Materials Engineering and Performance(1998) 7(5):601–612.
  • [20]Behrens BA, Huskic A. Wear reduction on dies for precision forging of gear wheels by means of multi-layer coating (TiN-TiCN-TiC). Materialwissenschaft und Werkstofftechnik(2005) 36(5):218–225.
  • [21]Zhang G, Li B, Jiang B, Yan F, Chen D. Microstructure and tribological properties of TiN, TiC and Ti(C, N) thin films prepared by closed-field unbalanced magnetron sputtering ion plating. Applied Surface Science(2009) 255(21):8788–8793.
  • [22]Natarajan G, Kumar N, Pandian R, Amirthapandian S. Grain boundary modification of TiC ultrananocrystalline thin films: Improvement in tribo-physical properties. Materials Chemistry and Physics(2018) 217:468–476.
  • [23]Levi G, Kaplan WD, Bamberger M. Structure refinement of titanium carbonitride (TiCN). Materials Letters(1998) 35(5):344–350.
  • [24]Meng J, Lu J, Wang J, Yang S. Tribological behavior of TiCN-based cermets at elevated temperatures. Materials Science and Engineering: A(2006) 418(1):68–76.
  • [25]Siow PC, A. Ghani J, Ghazali MJ, Jaafar TR, Selamat MA, Che Haron CH. Characterization of TiCN and TiCN/ZrN coatings for cutting tool application. Ceramics International(2013) 39(2):1293–1298. 20International Journal of Innovative Research and Reviews5(1) 15-20
  • [26]Restrepo Parra E, Arango PJ, Benavides V. XPS structure analysis of TiN/TiC bilayers produced by pulsed vacuumarc discharge(2010).
  • [27]Bhushan B, Ko PL. Introduction to tribology. Appl. Mech. Rev.(2003) 56(1):B6-B7.
  • [28]Bull SJ. Failure mode maps in the thin film scratch adhesion test. Tribology International(1997) 30(7):491–498.
  • [29]Zeng XT, Liu Y, Wei J, Holiday P. Influence of Substrate Hardness on the Properties of PVD Hard Coatings(2008). 156-161.
  • [30]Wirasate S, Boerio FJ. Effect of Adhesion, Film Thickness, and Substrate Hardness on the Scratch Behavior of Poly(carbonate) Films. The Journal of Adhesion(2005) 81(5):509–528. doi:10.1080/00218460590944954.
  • [31]Guruvenket S, Li D, Klemberg-Sapieha JE, Martinu L, Szpunar J. Mechanical and tribological properties of duplex treated TiN, nc-TiN/a-SiNx and nc-TiCN/a-SiCN coatings deposited on 410 low alloy stainless steel. Surface and Coatings Technology(2009) 203(19):2905–2911.
  • [32]Bemporad E, Pecchio C, Rossi S de, Carassiti F. Characterization and hardness modelling of alternate TIN/TICN multilayer cathodic arc PVD coating on tool steel. Surface and Coatings Technology(2001) 146-147:363–370.
  • [33]Kim G-H, Rand AG, Letcher SV. Impedance characterization of a piezoelectric immunosensor: Part I: Antibody coating and buffer solution. Biosensors and Bioelectronics(2003) 18(1):83–89.
  • [34]Peters AM, Nastasi M. Effect of carrier gas on the deposition of titanium carbo-nitride coatings by a novel organo-metallic plasma immersion ion processing technique. Vacuum(2002) 67(2):169–175.
  • [35]Caicedo JC, Amaya C, Yate L, Gómez ME, Zambrano G, Alvarado-Rivera J, et al. TiCN/TiNbCN multilayer coatings with enhanced mechanical properties. Applied Surface Science(2010) 256(20):5898–5904.
Toplam 33 adet kaynakça vardır.

Ayrıntılar

Birincil Dil İngilizce
Konular Mühendislik
Bölüm Research Articles
Yazarlar

Abbas Razmı Bu kişi benim 0000-0002-5012-6694

Ruhi Yesıldag Bu kişi benim

Yayımlanma Tarihi 15 Temmuz 2021
Gönderilme Tarihi 1 Aralık 2021
Yayımlandığı Sayı Yıl 2021 Cilt: 5 Sayı: 1

Kaynak Göster

APA Razmı, A., & Yesıldag, R. (2021). Microstructure and Mechanical Properties of TiN/TiCN/TiC Multilayer Thin Films Deposited by Magnetron Sputtering. International Journal of Innovative Research and Reviews, 5(1), 15-20.