H2 Gas Sensing of α-Fe2O3/MgO

Year 2024, Volume: 8 Issue: 2, 61 - 65, 15.12.2024

Hilal Kübra Sağlam , Sevda Sarıtaş

Abstract

In this study, MgO (F1) thin films were grown using pneumatic spray pyrolysis and MgOα-Fe2O3 (F2) thin films were grown using magnetron sputter. (Mg(NO3)2.6H2O)+(CH2)6N4) was used as a precursor. The crystal structure and surface morphology of the prepared films were analyzed. XRD spectra show a tendency to grow towards (220) in both films. The intensity of the main peak decreases in the second film due to Fe2O3. Additionally, growth was also observed in the (312) plane in the second film. As can be seen from the SEM images, when α-Fe2O3 is coated, it was observed that the surface morphology did not change significantly and nanocubes are formed. In the sensor tests performed, while no response was obtained in the F1 film, the sensor response of the F2 film was obtained. It revealed that α-Fe2O3 film could improve the sensor performance of MgO films.

Keywords

Gas sensor, Thin film, MgO, Spray pyrolysis, Magnetron sputter

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