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Bor Nitrür Kaplamaların Çelik Alt Malzemeler Üzerinde RF Magnetron Saçtırma Yöntemiyle Büyütülmesi

Yıl 2009, Cilt: 11 Sayı: 1, 15 - 21, 01.05.2009

Öz

Bor nitrür kaplamalar Silikon ve
çelik alt malzemeler üzerinde radyo frekanslı (rf) magnetron saçtırma
yöntemiyle hekzagonal bor nitrür hedef plaka kullanılarak büyütülmüştür.
Büyütme işlemi gaz oranı 5 e 1 olacak şekilde Argon ve Azot gaz karışımında ve
3x10-3 Torr basınç altında gerçekleştirilmiştir. Büyütme işleminde ana
parametreler olan alt malzeme (bias) voltajı ve ortam sıcaklığının etkileri
araştırılmıştır. Çalışmanın amacı bor nitrür kaplamaların alt malzeme
yüzeylerinde oluşturularak metal kesme işleminde kullanılabilmesi için gerekli
sertlik ve yapışkanlığı elde etmektir. Deneyler sonucu elde edilen kaplamaların
nitelendirilmesi için Fourier transform kızılötesi spektroskopisi (FTIR), X-Ray
fotoelektron spektroskopisi (XPS) ve Taramalı Elektron Mikroskobu (SERI)
teknikleri kullanılmıştır. Çelik örnekler üzerindeki kaplamaların mekanik
özellikleri ise kalınlık, sürtünme katsayısı, aşınma ve yapışkanlık ölçümleriyle
belirlenmiştir. 

Kaynakça

  • 1. Prouch J.-J., Alterovitz S.-A., Synthesis and Properties of Boron Nitride, Materials Science Forum, Vol 54&55 (1990), Trans Tech Publications.
  • 2. Willa G., Perkins P.-G., Is there a new form of boron nitride with extreme hardness?, Diamond and Related Materials 10 (2001) 2010_2017.
  • 3. Audronis M., Valiulis A.-V., Silickas P., Recent Developments in the Deposition of c-BN Coatings, ISSN 1392-1320 Materials Science (MED2IAGOTYRA), Vol. 10, No. 2. (2004)
  • 4. Kimura Y., Wakabayashi T., Okada K., Wada T., Nishikawa H., Boron nitride as a lubricant additive, Wear 232_1999.199-206.
  • 5. Klages C.-P., Fryda M., Matthke T., Schsfer L., Dimigen H., Diamond and c-BN Coatings for Tools, International Journal of Refractory Metals & Hard Materials 16 (1998) 171-176.
  • 6. Neo K.-S., Rahman M., Li X.-P., Khoo H.-H., Sawa M., Maeda Y., Performance evaluation of pure c-BN tools for machining of steel, Journal of Materials Processing Technology 140 (2003) 326-331.
  • 7. Jin M., Watanabe S., Miyake S., Murakawa M., Trial fabrication and cutting performance of c-BN-coated taps, Surface and Coatings Technology 133-134 (2000) 443-447.
  • 8. Zhou Z.-F., Bello I., Kremnican V., Fung M.-K., Lai K.-H. , Li K.-Y., Lee C.-S., Lee S.-T., Formation of cubic boron nitride films on nickel substrates, Thin Solid Films 368 (2000) 292-296.
  • 9. Deng J., Wang B., Tan L., Yan H., Chen G., The growth of cubic boron nitride films by RF reactive sputter, Thin Solid Films 368 (2000) 312-31.
  • 10. Zhu P. -W., Zhao Y. -N., Wang B., He Z., Li D. -M., Zou G. —T., Prepared Low Stress Cubic Boron Nitride Film by Physical Vapor Deposition, Journal of Solid State Chemistry 2002 167, 420-424.
  • 11. Ye J., Rothaar U., Oechsner H., Conditions for the formation of cubic boron nitride films by r.f magnetron sputtering, Surface and Coatings Technology 105 (1998) 159-164.
  • 12. Tzeng Y., Zhu H., Electron-assisted deposition of cubic boron nitride by r.f. magnetron sputtering, Diamond and Related Materials 8 (1999) 1402-1405.
  • 13. Hu C., Kotake S., Suzuki Y., Senoo M., Boron nitride thin filim synthesized by reactive sputtering, Vacuum 59 (2000) 748-754.
  • 14. Zhao Y.-N., Wang B., Yu S., Tao Y.C., He Z., Li D.M., Zou G.T., Preparation of c-BN films by RF sputtering and the relation of BN phase formation to the substrate bias and temperature, Thin Solid Films 320 (1998) 220-222.
  • 15. Jiang L., Fitzgerald A.-G., Rose M.J., Lousa A., Gimeno S., Formation of cubic boron nitride by r.f. magnetron sputtering, Surface Interface Analysis 2002 , 34, 732-734.
  • 16. Yang T.-S., Tsai T.-H., Lee C.-H., Cheng C.-L., Wong M.-S., Deposition of carbon-containing cubic boron nitride films by pulsed-DC magnetron sputtering, Thin Solid Films 398- 399 (2001) 285-290.
  • 17. Bewilogua K., Keunecke M., Weigel K., Wiemann E., Growth and characterization of thick cBN coatings on silicon and tool substrates, Thin Solid Films 469-470 (2004) 86-91.
  • 18. Bello I., Chan C.-Y., Zhang W.-J., Chong Y.-M., Leung K.-M., Lee S.-T., Lifshitz Y., Deposition of thick cubic boron nitride films:The route to practical applications", Diamond & Related Materials 14 , (2005) 1154— 1162.
  • 19. Bello I., Chong Y.-M., Leung K.-M., Chan C.-Y., Ma K.-L., Zhang Lee S.-T., Layyous A., Cubic boron nitride films for industrial applications, Diamond & Related Materials 14 (2005) 1784 — 1790.
  • 20. Yamamoto K., Keunecke M., Bewilogua K., Deposition of well adhering cBN films up to 2 mm thickness by B-C-N gradient layer system, Thin Solid Films 377-378 (2000)331-339.
  • 21. Keunecke M., Bewilogua K., Wiemann E., Weigel K., Wittorf R., Thomsen H., Boron containing combination tool coatings-characterization and application tests, Thin Solid Fils 494 (2006) 58-62.
Yıl 2009, Cilt: 11 Sayı: 1, 15 - 21, 01.05.2009

Öz

Kaynakça

  • 1. Prouch J.-J., Alterovitz S.-A., Synthesis and Properties of Boron Nitride, Materials Science Forum, Vol 54&55 (1990), Trans Tech Publications.
  • 2. Willa G., Perkins P.-G., Is there a new form of boron nitride with extreme hardness?, Diamond and Related Materials 10 (2001) 2010_2017.
  • 3. Audronis M., Valiulis A.-V., Silickas P., Recent Developments in the Deposition of c-BN Coatings, ISSN 1392-1320 Materials Science (MED2IAGOTYRA), Vol. 10, No. 2. (2004)
  • 4. Kimura Y., Wakabayashi T., Okada K., Wada T., Nishikawa H., Boron nitride as a lubricant additive, Wear 232_1999.199-206.
  • 5. Klages C.-P., Fryda M., Matthke T., Schsfer L., Dimigen H., Diamond and c-BN Coatings for Tools, International Journal of Refractory Metals & Hard Materials 16 (1998) 171-176.
  • 6. Neo K.-S., Rahman M., Li X.-P., Khoo H.-H., Sawa M., Maeda Y., Performance evaluation of pure c-BN tools for machining of steel, Journal of Materials Processing Technology 140 (2003) 326-331.
  • 7. Jin M., Watanabe S., Miyake S., Murakawa M., Trial fabrication and cutting performance of c-BN-coated taps, Surface and Coatings Technology 133-134 (2000) 443-447.
  • 8. Zhou Z.-F., Bello I., Kremnican V., Fung M.-K., Lai K.-H. , Li K.-Y., Lee C.-S., Lee S.-T., Formation of cubic boron nitride films on nickel substrates, Thin Solid Films 368 (2000) 292-296.
  • 9. Deng J., Wang B., Tan L., Yan H., Chen G., The growth of cubic boron nitride films by RF reactive sputter, Thin Solid Films 368 (2000) 312-31.
  • 10. Zhu P. -W., Zhao Y. -N., Wang B., He Z., Li D. -M., Zou G. —T., Prepared Low Stress Cubic Boron Nitride Film by Physical Vapor Deposition, Journal of Solid State Chemistry 2002 167, 420-424.
  • 11. Ye J., Rothaar U., Oechsner H., Conditions for the formation of cubic boron nitride films by r.f magnetron sputtering, Surface and Coatings Technology 105 (1998) 159-164.
  • 12. Tzeng Y., Zhu H., Electron-assisted deposition of cubic boron nitride by r.f. magnetron sputtering, Diamond and Related Materials 8 (1999) 1402-1405.
  • 13. Hu C., Kotake S., Suzuki Y., Senoo M., Boron nitride thin filim synthesized by reactive sputtering, Vacuum 59 (2000) 748-754.
  • 14. Zhao Y.-N., Wang B., Yu S., Tao Y.C., He Z., Li D.M., Zou G.T., Preparation of c-BN films by RF sputtering and the relation of BN phase formation to the substrate bias and temperature, Thin Solid Films 320 (1998) 220-222.
  • 15. Jiang L., Fitzgerald A.-G., Rose M.J., Lousa A., Gimeno S., Formation of cubic boron nitride by r.f. magnetron sputtering, Surface Interface Analysis 2002 , 34, 732-734.
  • 16. Yang T.-S., Tsai T.-H., Lee C.-H., Cheng C.-L., Wong M.-S., Deposition of carbon-containing cubic boron nitride films by pulsed-DC magnetron sputtering, Thin Solid Films 398- 399 (2001) 285-290.
  • 17. Bewilogua K., Keunecke M., Weigel K., Wiemann E., Growth and characterization of thick cBN coatings on silicon and tool substrates, Thin Solid Films 469-470 (2004) 86-91.
  • 18. Bello I., Chan C.-Y., Zhang W.-J., Chong Y.-M., Leung K.-M., Lee S.-T., Lifshitz Y., Deposition of thick cubic boron nitride films:The route to practical applications", Diamond & Related Materials 14 , (2005) 1154— 1162.
  • 19. Bello I., Chong Y.-M., Leung K.-M., Chan C.-Y., Ma K.-L., Zhang Lee S.-T., Layyous A., Cubic boron nitride films for industrial applications, Diamond & Related Materials 14 (2005) 1784 — 1790.
  • 20. Yamamoto K., Keunecke M., Bewilogua K., Deposition of well adhering cBN films up to 2 mm thickness by B-C-N gradient layer system, Thin Solid Films 377-378 (2000)331-339.
  • 21. Keunecke M., Bewilogua K., Wiemann E., Weigel K., Wittorf R., Thomsen H., Boron containing combination tool coatings-characterization and application tests, Thin Solid Fils 494 (2006) 58-62.
Toplam 21 adet kaynakça vardır.

Ayrıntılar

Birincil Dil Türkçe
Bölüm Araştırma, Geliştirme ve Uygulama Makaleleri
Yazarlar

Halil Cesur Bu kişi benim

Bilgin Kaftanoğlu

Ali Kalkanlı

Baybars Oral Bu kişi benim

Yayımlanma Tarihi 1 Mayıs 2009
Gönderilme Tarihi 2 Şubat 2009
Yayımlandığı Sayı Yıl 2009 Cilt: 11 Sayı: 1

Kaynak Göster

Vancouver Cesur H, Kaftanoğlu B, Kalkanlı A, Oral B. Bor Nitrür Kaplamaların Çelik Alt Malzemeler Üzerinde RF Magnetron Saçtırma Yöntemiyle Büyütülmesi. MATİM. 2009;11(1):15-21.