A Gas Sensor Design and Heat Transfer Simulation with ZnO and TiO2 Sensing Layers

Yıl 2021, Cilt: 9 Sayı: 1, 37 - 44, 30.06.2021

Gözde Konuk Ege , Hüseyin Yüce , Garip Genç

https://doi.org/10.51354/mjen.854265

Cited By: 2

Öz

Micro Electro-Mechanical System (MEMS) based devices offer innovative approaches in sensor technologies with the advantages of high efficiency and miniaturization. The most important stage in the development of new generation MEMS-based devices is the design and optimization stage. However, device design and optimization processes are developed in a laboratory by empirical approaches. This causes time loss and creates an unnecessary waste of resources. In this study, it is aimed to design and analyze two gas sensors based on ZnO and TiO2 sensing layers. Electro-thermal analysis of the sensor structure was carried out at room temperature and high temperature (294,15K-573,15K) and heat transfer parameters were compared. According to the simulation results, it is obtained that, as the applied temperature increases to the sensor, the temperature over the sensing layer increases linearly. It is compatible with the literature. The temperature on the ZnO surface increases to three times the TiO2 surface temperature. The heat transfer results obtained will be used as a guide for device design and optimization in future works. In this way, as a result of numerical analysis, a MEMS-based device will be produced with high accuracy. Thus, time and resources will be saved.

Anahtar Kelimeler

gas sensor, sensing layer, finite element method (FEM, heat transfer)

Proje Numarası

GDK201905-14

Kaynakça

• [1] V. S. Bhati, M. Hojamberdiev, and M. Kumar, “Enhanced sensing performance of ZnO nanostructures-based gas sensors: A review,” Energy Reports, no. xxxx, 2019.
• [2] K. H. Rahman and A. K. Kar, “Titanium-di-oxide (TiO2) concentration-dependent optical and morphological properties of PAni-TiO2 nanocomposite,” Mater. Sci. Semicond. Process., vol. 105, no. April 2019, p. 104745, 2020.
• [3] R. Kumar and R. Ghosh, “Selective determination of ammonia, ethanol and acetone by reduced graphene oxide based gas sensors at room temperature,” Sens. Bio-Sensing Res., vol. 28, no. January, p. 100336, 2020.
• [4] L. Kumar, I. Rawal, A. Kaur, and S. Annapoorni, “Flexible room temperature ammonia sensor based on polyaniline,” Sensors Actuators, B Chem., vol. 240, pp. 408–416, 2017.
• [5] B. Mondal, M. S. Meetei, J. Das, C. Roy Chaudhuri, and H. Saha, “Quantitative recognition of flammable and toxic gases with artificial neural network using metal oxide gas sensors in embedded platform,” Eng. Sci. Technol. an Int. J., vol. 18, no. 2, pp. 229–234, 2015.
• [6] W. H. Brattain and J. Bardeen, “Surface properties of germanium,” Bell Syst. Tech. J., vol. 32, no. 1, pp. 1–41, 1953.
• [7] T. Seiyama, A. Kato, K. Fujiishi, and M. Nagatani, “A new detector for gaseous components using semiconductive thin films.,” Anal. Chem., vol. 34, no. 11, pp. 1502–1503, 1962.
• [8] C. Wartelle, N. Pereira Rodrigues, M. Koudelka-Hep, and F. Bedioui, “Amperometric fluidic microchip array sensing device for nitric oxide determination in solution,” Mater. Sci. Eng. C, vol. 26, no. 2–3, pp. 534–537, 2006.
• [9] S.-M. Park, S.-L. Zhang, and J.-S. Huh, “NO Sensing Characteristics of ZnO Nanorod Prepared by Ultrasound Radiation Method,” Korean J. Mater. Res., vol. 18, no. 7, pp. 367–372, 2008.
• [10] Z. Zhang, C. Yin, L. Yang, J. Jiang, and Y. Guo, “Optimizing the gas sensing characteristics of Co-doped SnO 2 thin film based hydrogen sensor,” J. Alloys Compd., vol. 785, pp. 819–825, 2019.
• [11] F. Rathgeb and G. Gauglitz, “Optical gas sensors in analytical chemistry: Applications, trends and general comments,” Encycl. Anal. Chem. Appl. Theory Instrum., 2006.
• [12] G. Korotcenkov and B. K. Cho, “Metal oxide composites in conductometric gas sensors: Achievements and challenges,” Sensors Actuators, B Chem., vol. 244, pp. 182–210, 2017.
• [13] C. Liu et al., “A high-performance flexible gas sensor based on self-assembled PANI-CeO2 nanocomposite thin film for trace-level NH3 detection at room temperature,” Sensors Actuators, B Chem., vol. 261, pp. 587–597, 2018.
• [14] S. Mahajan and S. Jagtap, “Metal-oxide semiconductors for carbon monoxide (CO) gas sensing: A review,” Appl. Mater. Today, vol. 18, p. 100483, 2020.
• [15] Y. De Wang, X. H. Wu, Q. Su, Y. F. Li, and Z. L. Zhou, “Ammonia-sensing characteristics of Pt and SiO2 doped SnO2 materials,” Solid. State. Electron., vol. 45, no. 2, pp. 347–350, 2001.
• [16] S. Ummartyotin and H. Manuspiya, “A critical review on cellulose: From fundamental to an approach on sensor technology,” Renew. Sustain. Energy Rev., vol. 41, pp. 402–412, 2015.
• [17] M. R. Vilar et al., “Development of nitric oxide sensor for asthma attack prevention,” Mater. Sci. Eng. C, vol. 26, no. 2–3, pp. 253–259, 2006.
• [18] H. BISGAARD, L. LOLAND, and J. A. N. H. ØJ, “NO in exhaled air of asthmatic children is reduced by the leukotriene receptor antagonist montelukast,” Am. J. Respir. Crit. Care Med., vol. 160, no. 4, pp. 1227–1231, 1999.
• [19] A. D. Smith and D. R. Taylor, “Is exhaled nitric oxide measurement a useful clinical test in asthma?,” Curr. Opin. Allergy Clin. Immunol., vol. 5, no. 1, pp. 49–56, 2005.
• [20]D. R. Taylor, M. W. Pijnenburg, A. D. Smith, and J. C. de Jongste, “Exhaled nitric oxide measurements: clinical application and interpretation,” Thorax, vol. 61, no. 9, pp. 817–827, 2006.
• [21] C. Grimes et al., “A sentinel sensor network for hydrogen sensing,” Sensors, vol. 3, no. 3, pp. 69–82, 2003.
• [22] M. Z. Jacobson, W. G. Colella, and D. M. Golden, “Cleaning the air and improving health with hydrogen fuel-cell vehicles,” Science (80-. )., vol. 308, no. 5730, pp. 1901–1905, 2005.
• [23]A. M. Bassam, A. B. Phillips, S. R. Turnock, and P. A. Wilson, “Development of a multi-scheme energy management strategy for a hybrid fuel cell driven passenger ship,” Int. J. Hydrogen Energy, vol. 42, no. 1, pp. 623–635, 2017.
• [24]L. Boon-Brett et al., “Identifying performance gaps in hydrogen safety sensor technology for automotive and stationary applications,” Int. J. Hydrogen Energy, vol. 35, no. 1, pp. 373–384, 2010.
• [25]W. J. Buttner, M. B. Post, R. Burgess, and C. Rivkin, “An overview of hydrogen safety sensors and requirements,” Int. J. Hydrogen Energy, vol. 36, no. 3, pp. 2462–2470, 2011.
• [26]K. H. Kim, E. C. Jeon, Y. J. Choi, and Y. S. Koo, “The emission characteristics and the related malodor intensities of gaseous reduced sulfur compounds (RSC) in a large industrial complex,” Atmos. Environ., vol. 40, no. 24, pp. 4478–4490, 2006.
• [27] H. Kimura, “Hydrogen sulfide: Its production and functions,” Exp. Physiol., vol. 96, no. 9, pp. 833–835, 2011.
• [28]K. H. Kim, Y. Choi, E. Jeon, and Y. Sunwoo, “Characterization of malodorous sulfur compounds in landfill gas,” Atmos. Environ., vol. 39, no. 6, pp. 1103–1112, 2005.
• [29]M. N. Hughes, M. N. Centelles, and K. P. Moore, “Making and working with hydrogen sulfide. The chemistry and generation of hydrogen sulfide in vitro and its measurement in vivo: A review,” Free Radic. Biol. Med., vol. 47, no. 10, pp. 1346–1353, 2009.
• [30]S. C. K. Misra, P. Mathur, M. Yadav, M. K. Tiwari, S. C. Garg, and P. Tripathi, “Preparation and characterization of vacuum deposited semiconducting nanocrystalline polymeric thin film sensors for detection of HCl,” Polymer (Guildf)., vol. 45, no. 25, pp. 8623–8628, 2004.
• [31] C. Yao et al., “Sub-ppm CO detection in a sub-meter-long hollow-core negative curvature fiber using absorption spectroscopy at 2.3 μm,” Sensors Actuators, B Chem., vol. 303, no. October 2019, p. 127238, 2020.
• [32]S. H. Nimkar, S. P. Agrawal, and S. B. Kondawar, “Fabrication of Electrospun Nanofibers of Titanium Dioxide Intercalated Polyaniline Nanocomposites for CO2 Gas Sensor,” Procedia Mater. Sci., vol. 10, no. Cnt 2014, pp. 572–579, 2015.
• [33]S. Pandey, “Highly sensitive and selective chemiresistor gas/vapor sensors based on polyaniline nanocomposite: A comprehensive review,” J. Sci. Adv. Mater. Devices, vol. 1, no. 4, pp. 431–453, 2016.
• [34]M. Imran, N. Motta, and M. Shafiei, “Electrospun one-dimensional nanostructures : a new horizon for gas sensing materials,” no. 2, 2018.
• [35]A. Altindal, “ORGANlK YARI iLETKEN FiLMLERiN KARAKTERiZASYONU VE GAZ SENSORU OLARAK UYGULANMASI,” 1999.
• [36]Z. Li et al., “Resistive-type hydrogen gas sensor based on TiO2: A review,” Int. J. Hydrogen Energy, vol. 43, no. 45, pp. 21114–21132, 2018.
• [37] “Wafer LiNbO3 Properties,” 2020. [Online]. Available: https://unitedcrystals.com/LiNbO3Prop.html. [Accessed: 10-Jan-2020].
• [38]K. J. lesker Company, “Gold Properties.” Kurt J. Lesker Company.
• [39]K. J. L. Company, “Titanium Dioxide (TiO2) Sputtering Targets.” Kurt J.Lesker Company, pp. 2–5, 2020.
• [40]K. J. L. Company, “Zinc Oxide (ZnO) Sputtering Targets.” Kurt J. Lesker Company, pp. 2–5, 2020.
• [41] Comsol Multiphysics, “Heat Transfer, Comsol Multiphysics.” 2020.
• [42]T. K. Roy, D. Sanyal, D. Bhowmick, and A. Chakrabarti, “Temperature dependent resistivity study on zinc oxide and the role of defects,” Mater. Sci. Semicond. Process., vol. 16, no. 2, pp. 332–336, 2013.
• [43]Y. Zhang and J. Han, “Microstructure and temperature coefficient of resistivity for ZnO ceramics doped with Al2O3,” Mater. Lett., vol. 60, no. 20, pp. 2522–2525, 2006.