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INFLUENCE OF SULFURIZATION ON THE PROPERTIES OF Cu2ZnSnS4 (CZTS) THIN FILMS PREPARED BY A TWO-STAGE PROCESS

Yıl 2019, Cilt: 8 Sayı: 2, 1064 - 1072, 31.07.2019

Mehmet Ali Olğar

https://doi.org/10.28948/ngumuh.598096

Öz

   In this
study, CZTS thin films were grown by a two-stage method involved sputter
deposition of metallic Cu, Zn, and Sn layers to form Cu/Sn/Zn/Cu metallic
stacks on glass and sulfurization of the metallic stacks at 540 and 580 °C for
1 and 5 min in sulfur vapor atmosphere. The reacted samples at two different
sulfurization temperatures and sulfurization times were characterized employing
XRD, SEM, EDX, Raman spectroscopy, optical spectroscopy, and Van der Pauw
methods. The metallic stacks and CZTS thin films showed Cu-rich and Zn-poor
composition. XRD patterns of the reacted films showed almost pure kesterite
CZTS phase except for presence of very small amount of Cu2-xS phase.
Raman spectra of the films verified formation of kesterite phase in the films.
SEM images showed that the CZTS540-1 sample had more compact, denser and
uniform structure. Optical band gap values were found to be in good agreement
with the literature. The CZTS540-1 thin film showed the highest carrier
concentration and lowest resistivity values amongst the other samples.

Anahtar Kelimeler

CZTS Sputtering Sulfurization Time Temperature Two-stage Method

Teşekkür

I am gratefully acknowledge the help of B.M. Basol and E. Bacaksiz for discussion, M. Tomakin for EDX, XRD, and SEM measurements.

Kaynakça

  • [1]. JACKSON, P., WUERZ, D., HARISKOS, D., LOTTER, E., WITTE, W., POWALLA, M., “ Effects of Heavy Alkali Elements in Cu(In, Ga)Se2 Solar Cells with Efficiencies up to 22.6%”, Physica Status Solidi (RRL)-Rapid Research Letters, 10, 583-586 2016.
  • [2]. LATAGIRI, H., SASAGUCHI, N., HANDO, S., HOSHINO, S., OHASHI, J., YOKOTA, T., “Preparation and Evaluation of Cu2ZnSnS4 Thin Films by Sulfurization of E-B Evaporated Precursors”, Solar Energy Materials and Solar Cells, 49, 407-414, 1997.
  • [3]. SHOCKLEY, W., QUEISSER, H.J., “Detailed Balance Limit of Efficiency of P-N Junction Solar Cells”, Journal of Applied Physics, 32, 510-519, 1961.
  • [4]. WANG, W., WINKLER, M.T., GUNAWAN, O., GOKMEN, T., TODOROV, T.K., ZHU,Y., MITZI, D.B., “Device Characteristics of CZTSSe Thin-Film Solar Cells with 12.6% Efficiency”, Advanced Energy Materials, 4, 1301465, 2014.
  • [5]. OLGAR, M.A., BAŞOL, B.M., TOMAKIN, M., SEYHAN, A., BACAKSIZ, E., “Influence of Pre-Annealing Cu-Sn on the Structural Properties of CZTSe Thin Films Grown by a Two-Stage Process”, Materials Science in Semiconductor Processing, 88, 234-238, 2018.
  • [6]. WANG, J., LI, S., CAI, J., SHEN, B., REN, Y., QIN, G., “Cu2ZnSnS4 Thin Films: Facile and Cost-Effective Preparation by RF-Magnetron Sputtering and Texture Control”, Journal of Alloys Compounds, 552 418-422, 2013.
  • [7]. SHI, C.W., SHI, G.Y., CHEN, Z. CHEN, YANG, P.F., YAO, M., “Deposition of Cu2ZnSnS4 Thin Films by Vacuum Thermal Evaporation From Single Quaternary Compound Source”, Material Letters, 73, 89-91, 2012.
  • [8]. VANALAKAR, S.A, AGAWANE, G.L., SHIN, S.W., SURYAWANSHI, M.P., GURAV, K.V., JEON, K.S., PATIL, P.S., JEONG, C.W., KIM, J.Y., KIM, J.H., “A Review on Pulsed Laser Deposited CZTS Thin Films For Solar Cell Applications”, Journal of Alloys and Compounds, 619, 109-121, 2015.
  • [9]. COLLORD, A., XIN, H., HILLHOUSE, H., “Combinatorial Exploration of the Effects of Intrinsic and Extrinsic Defects in CuZnSn (S, Se), Photovoltaics”, IEEE Journal of Photovoltaics, 5, 288-298, 2015.
  • [10]. MIYAMOTO, Y., TANAKA K., OONUKI, M., MORITAKE, N., UCHIKI H., “Optical Properties of Cu2ZnSnS4 Thin Films Prepared by Sol-Gel and Sulfurization Method”, Japanese Journal of Applied Physics, 47, 596-597, 2008.
  • [11]. SCRAGG, J.J., DALE, P.J., PETER, L.M., “Towards Sustainable Materials for Solar Energy Conversion: Preparation and Photoelectrochemical Characterization of Cu2ZnSnS4”, Electrochemistry Communications, 10, 639-642, 2008.
  • [12]. OLGAR, M.A., KLAER J.,MAINZ, R., LEVCENCO, S., JUST, J., BACAKSIZ, E., UNOLD, T., “Effect of Precursor Stacking Order and Sulfurization Temperature on Compositional Homogeneity of CZTS Thin Films”, Thin Solid Films, 615, 402-408, 2016.
  • [13]. SHIN, S.W., PAWAR, S.M., PARK, C.Y., YUN, J.H., MOON, J.H., KIM, J.H., LEE, J.Y., “Studies on Cu2ZnSnS4 (CZTS) Absorber Layer Using Different Stacking Orders in Precursor Thin Films”, Solar Energy Materials and Solar Cells, 95 3202-3206, 2011.
  • [14]. EMRANI, A., VASEKAR, P., WESTGATE, C.R., “Effects of Sulfurization Temperature on CZTS Thin Film Solar Cell Performances”, Solar Energy, 98, 335-340, 2013.
  • [15]. OLGAR ,M.A., “Optimization of Sulfurization Time and Temperature for Fabrication of Cu2ZnSnS4 (CZTS) Thin Films”, Superlattices and Microstructures, 126, 32-41, 2019.
  • [16]. GURAV, S.V., PAWAR, S.M., SHIN, S.W., SURYAWANSHI, M.P., AGAWANE, G.L., . PATIL, P.S, MOON, J.H., YUN, J.H., KIM J.H., “Electrosynthesis of CZTS Films by Sulfurization of CZT Precursor: Effect of Soft Annealing Treatment”, Applied Surface Science, 283, 74-80, 2013.
  • [17]. OLGAR, M.A., BAŞOL, B., ATASOY, Y., TOMAKIN, M., AYGUN, G., OZYUZER, L., BACAKSIZ, E., “Effect of Heat Treating Metallic Constituents on the Properties of Cu2ZnSnSe4 Thin Films Formed by a Two-Stage Process”, Thin Solid Films, 624, 167-174, 2017.
  • [18]. OLGAR, M.A., BACAKSIZ, E., TOMAKIN, M., KUCUKOMEROGLU, T., BASOL, B.M., “CZTS layers formed under sulfur-limited conditions at above atmospheric pressure”, Materials Science in Semiconductor Processing, 90, 101-106, 2019.
  • [19]. HE, J., SUN, L., CHEN, S., CHEN, Y., YANG, P., CHU, J., “Composition Dependence of Structure and Optical Properties of Cu2ZnSn(S, Se)4 Solid Solutions: An Experimental Study”, Journal of Alloys and Compounds, 511, 129-132, 2012.
  • [20]. TANAKA, K., FUKUI, Y., MORITAKE, N., UCHIKI, H., “Chemical Composition Dependence of Morphological and Optical Properties of Cu2ZnSnS4 Thin Films Deposited by Sol–Gel Sulfurization and Cu2ZnSnS4 Thin Film Solar Cell Efficiency”, Solar Energy Materials and Solar Cells, 95, 838-842, 2011.
  • [21]. JUNG, H.R., SHIN, S.W., GURAV, K., GANG, M.G., LEE, J.Y., MOON, J.H., KIM, J.H., “Evolution of Detrimental Secondary Phases in Unstable Cu2ZnSnS4 Films During Annealing”, Electronic Materials Letters, 12, 139-146, 2016.
  • [22]. FAN, D., ZHANG, R., ZHU, Y., PENG, H., ZHANG, J., “Structural Development and Dynamic Process in Sulfurizing Precursors to Prepare Cu2ZnSnS4 Absorber Layer”, Journal of Alloys and Compounds, 583, 566-573, 2014.
  • [23]. KIM, C., HONG, S., “Properties of Cu2ZnSnS4 Films with Respect to Sulfurization Time Investigated Using Cu-Zn-Sn Films Deposited by Co-sputtering”, Molecular Crystals and Liquid Crystals, 617, 179-185, 2015.
  • [24]. LIDE, D.R., 2005 CRC Handbook of Chemistry and Physics, CRC Press, New York, 2004.
  • [25]. PIACENTE, V., FOGLIA, S., SCARDALA P., “Sublimation Study of the Tin Sulphides SnS2, Sn2S3 and SnS”, Journal of Alloys and Compounds, 177, 17-30, 1991.
  • [26]. CULLITY, B.D., Elements of X-ray Diffraction, Addison-Wesley Pub. Co., Boston, 1978.
  • [27]. GÜREL, T.,SEVIK, C., ÇAĞIN, T., “Characterization of Vibrational and Mechanical Properties of Quaternary Compounds Cu2ZnSnS4 and Cu2ZnSnSe4 in Kesterite and Stannite Structures”, Physical Review B, 84, 205201, 2011.
  • [28]. PANKOVE, J.I., Optical Processes in Semiconductors, Courier Corporation, North Chelmsford, 1975.
  • [29]. NAIR, M., GUERRERO, L., NAIR P., “Conversion of Chemically Deposited CuS Thin Films Cu1.8S and Cu1.96S by annealing”, Semiconductor Science and Technology, 13, 1164, 1998.
  • [30]. MUHUNTHAN, N., SINGH, O.P., SINGH, S., SINGH, V., “Growth of CZTS Thin Films by Cosputtering of Metal Targets and Sulfurization in H2S”, International Journal of Photoenergy, 752012, 1-7, 2013.

İKİ AŞAMALI YÖNTEM İLE HAZIRLANAN Cu2ZnSnS4 (CZTS) İNCE FİLMLERİN ÖZELLİKLERİNDE SÜLFÜRLEMENİN ETKİSİ

Yıl 2019, Cilt: 8 Sayı: 2, 1064 - 1072, 31.07.2019

Mehmet Ali Olğar

https://doi.org/10.28948/ngumuh.598096

Öz

   Bu çalışmada CZTS ince filmler; Cu, Zn ve Sn
metalik katmanların saçtırma yöntemi ile Cu/Sn/Zn/Cu yapılarının  cam üzerine kaplanması ve bu yapıların 540 ve
580 °C sıcaklıkta 1 ve 5 dakika sürelerince sulfur atmosferinde sülfürlenmesi
şeklinde iki-aşamalı metot kullanılarak büyütülmüştür. Değişik sıcaklık ve
sürelerde sülfürlenen örnekler XRD, SEM, EDX, Raman spektroskopisi, Optik spektroskopi
ve Van der Pauw yöntemleri kullanılarak karakterize edilmiştir. Tabakalı
metalik yapı (Cu/Sn/Zn/Cu) ve CZTS örneklerinin Cu-zengini ve Zn-fakiri
kompozisyona sahip olduğu gözlemlendi. Üretilen CZTS ince filmlerin XRD
verileri incelediğinde, çok az Cu2-xS fazı dışında neredeyse saf
CZTS yapısına sahip kırınım deseni gösterdiği görülmüştür. Raman spektroskopisi
kullanılarak CZTS fazının oluştuğu teyit edilmiştir. SEM görüntüleri
incelendiğinde, CZTS540-1 örneğinin daha kompakt, yoğun ve homojen bir yapıya
sahip olduğu gözlemlenmiştir. Elde edilen optik yasak enerji aralıklarının
literatür ile uyum içinde olduğu görülmüştür. Elektriksel ölçümler, CZTS540-1
ince filminin en yüksek taşıyıcı yoğunluğuna ve en düşük özdirenç değerlerine
sahip olduğunu göstermiştir.



 

Anahtar Kelimeler

CZTS Saçtırma Sülfürleme Süresi Sülfürleme Sıcaklığı Iki-aşamalı Metot

Kaynakça

  • [1]. JACKSON, P., WUERZ, D., HARISKOS, D., LOTTER, E., WITTE, W., POWALLA, M., “ Effects of Heavy Alkali Elements in Cu(In, Ga)Se2 Solar Cells with Efficiencies up to 22.6%”, Physica Status Solidi (RRL)-Rapid Research Letters, 10, 583-586 2016.
  • [2]. LATAGIRI, H., SASAGUCHI, N., HANDO, S., HOSHINO, S., OHASHI, J., YOKOTA, T., “Preparation and Evaluation of Cu2ZnSnS4 Thin Films by Sulfurization of E-B Evaporated Precursors”, Solar Energy Materials and Solar Cells, 49, 407-414, 1997.
  • [3]. SHOCKLEY, W., QUEISSER, H.J., “Detailed Balance Limit of Efficiency of P-N Junction Solar Cells”, Journal of Applied Physics, 32, 510-519, 1961.
  • [4]. WANG, W., WINKLER, M.T., GUNAWAN, O., GOKMEN, T., TODOROV, T.K., ZHU,Y., MITZI, D.B., “Device Characteristics of CZTSSe Thin-Film Solar Cells with 12.6% Efficiency”, Advanced Energy Materials, 4, 1301465, 2014.
  • [5]. OLGAR, M.A., BAŞOL, B.M., TOMAKIN, M., SEYHAN, A., BACAKSIZ, E., “Influence of Pre-Annealing Cu-Sn on the Structural Properties of CZTSe Thin Films Grown by a Two-Stage Process”, Materials Science in Semiconductor Processing, 88, 234-238, 2018.
  • [6]. WANG, J., LI, S., CAI, J., SHEN, B., REN, Y., QIN, G., “Cu2ZnSnS4 Thin Films: Facile and Cost-Effective Preparation by RF-Magnetron Sputtering and Texture Control”, Journal of Alloys Compounds, 552 418-422, 2013.
  • [7]. SHI, C.W., SHI, G.Y., CHEN, Z. CHEN, YANG, P.F., YAO, M., “Deposition of Cu2ZnSnS4 Thin Films by Vacuum Thermal Evaporation From Single Quaternary Compound Source”, Material Letters, 73, 89-91, 2012.
  • [8]. VANALAKAR, S.A, AGAWANE, G.L., SHIN, S.W., SURYAWANSHI, M.P., GURAV, K.V., JEON, K.S., PATIL, P.S., JEONG, C.W., KIM, J.Y., KIM, J.H., “A Review on Pulsed Laser Deposited CZTS Thin Films For Solar Cell Applications”, Journal of Alloys and Compounds, 619, 109-121, 2015.
  • [9]. COLLORD, A., XIN, H., HILLHOUSE, H., “Combinatorial Exploration of the Effects of Intrinsic and Extrinsic Defects in CuZnSn (S, Se), Photovoltaics”, IEEE Journal of Photovoltaics, 5, 288-298, 2015.
  • [10]. MIYAMOTO, Y., TANAKA K., OONUKI, M., MORITAKE, N., UCHIKI H., “Optical Properties of Cu2ZnSnS4 Thin Films Prepared by Sol-Gel and Sulfurization Method”, Japanese Journal of Applied Physics, 47, 596-597, 2008.
  • [11]. SCRAGG, J.J., DALE, P.J., PETER, L.M., “Towards Sustainable Materials for Solar Energy Conversion: Preparation and Photoelectrochemical Characterization of Cu2ZnSnS4”, Electrochemistry Communications, 10, 639-642, 2008.
  • [12]. OLGAR, M.A., KLAER J.,MAINZ, R., LEVCENCO, S., JUST, J., BACAKSIZ, E., UNOLD, T., “Effect of Precursor Stacking Order and Sulfurization Temperature on Compositional Homogeneity of CZTS Thin Films”, Thin Solid Films, 615, 402-408, 2016.
  • [13]. SHIN, S.W., PAWAR, S.M., PARK, C.Y., YUN, J.H., MOON, J.H., KIM, J.H., LEE, J.Y., “Studies on Cu2ZnSnS4 (CZTS) Absorber Layer Using Different Stacking Orders in Precursor Thin Films”, Solar Energy Materials and Solar Cells, 95 3202-3206, 2011.
  • [14]. EMRANI, A., VASEKAR, P., WESTGATE, C.R., “Effects of Sulfurization Temperature on CZTS Thin Film Solar Cell Performances”, Solar Energy, 98, 335-340, 2013.
  • [15]. OLGAR ,M.A., “Optimization of Sulfurization Time and Temperature for Fabrication of Cu2ZnSnS4 (CZTS) Thin Films”, Superlattices and Microstructures, 126, 32-41, 2019.
  • [16]. GURAV, S.V., PAWAR, S.M., SHIN, S.W., SURYAWANSHI, M.P., AGAWANE, G.L., . PATIL, P.S, MOON, J.H., YUN, J.H., KIM J.H., “Electrosynthesis of CZTS Films by Sulfurization of CZT Precursor: Effect of Soft Annealing Treatment”, Applied Surface Science, 283, 74-80, 2013.
  • [17]. OLGAR, M.A., BAŞOL, B., ATASOY, Y., TOMAKIN, M., AYGUN, G., OZYUZER, L., BACAKSIZ, E., “Effect of Heat Treating Metallic Constituents on the Properties of Cu2ZnSnSe4 Thin Films Formed by a Two-Stage Process”, Thin Solid Films, 624, 167-174, 2017.
  • [18]. OLGAR, M.A., BACAKSIZ, E., TOMAKIN, M., KUCUKOMEROGLU, T., BASOL, B.M., “CZTS layers formed under sulfur-limited conditions at above atmospheric pressure”, Materials Science in Semiconductor Processing, 90, 101-106, 2019.
  • [19]. HE, J., SUN, L., CHEN, S., CHEN, Y., YANG, P., CHU, J., “Composition Dependence of Structure and Optical Properties of Cu2ZnSn(S, Se)4 Solid Solutions: An Experimental Study”, Journal of Alloys and Compounds, 511, 129-132, 2012.
  • [20]. TANAKA, K., FUKUI, Y., MORITAKE, N., UCHIKI, H., “Chemical Composition Dependence of Morphological and Optical Properties of Cu2ZnSnS4 Thin Films Deposited by Sol–Gel Sulfurization and Cu2ZnSnS4 Thin Film Solar Cell Efficiency”, Solar Energy Materials and Solar Cells, 95, 838-842, 2011.
  • [21]. JUNG, H.R., SHIN, S.W., GURAV, K., GANG, M.G., LEE, J.Y., MOON, J.H., KIM, J.H., “Evolution of Detrimental Secondary Phases in Unstable Cu2ZnSnS4 Films During Annealing”, Electronic Materials Letters, 12, 139-146, 2016.
  • [22]. FAN, D., ZHANG, R., ZHU, Y., PENG, H., ZHANG, J., “Structural Development and Dynamic Process in Sulfurizing Precursors to Prepare Cu2ZnSnS4 Absorber Layer”, Journal of Alloys and Compounds, 583, 566-573, 2014.
  • [23]. KIM, C., HONG, S., “Properties of Cu2ZnSnS4 Films with Respect to Sulfurization Time Investigated Using Cu-Zn-Sn Films Deposited by Co-sputtering”, Molecular Crystals and Liquid Crystals, 617, 179-185, 2015.
  • [24]. LIDE, D.R., 2005 CRC Handbook of Chemistry and Physics, CRC Press, New York, 2004.
  • [25]. PIACENTE, V., FOGLIA, S., SCARDALA P., “Sublimation Study of the Tin Sulphides SnS2, Sn2S3 and SnS”, Journal of Alloys and Compounds, 177, 17-30, 1991.
  • [26]. CULLITY, B.D., Elements of X-ray Diffraction, Addison-Wesley Pub. Co., Boston, 1978.
  • [27]. GÜREL, T.,SEVIK, C., ÇAĞIN, T., “Characterization of Vibrational and Mechanical Properties of Quaternary Compounds Cu2ZnSnS4 and Cu2ZnSnSe4 in Kesterite and Stannite Structures”, Physical Review B, 84, 205201, 2011.
  • [28]. PANKOVE, J.I., Optical Processes in Semiconductors, Courier Corporation, North Chelmsford, 1975.
  • [29]. NAIR, M., GUERRERO, L., NAIR P., “Conversion of Chemically Deposited CuS Thin Films Cu1.8S and Cu1.96S by annealing”, Semiconductor Science and Technology, 13, 1164, 1998.
  • [30]. MUHUNTHAN, N., SINGH, O.P., SINGH, S., SINGH, V., “Growth of CZTS Thin Films by Cosputtering of Metal Targets and Sulfurization in H2S”, International Journal of Photoenergy, 752012, 1-7, 2013.
Toplam 30 adet kaynakça vardır.

Ayrıntılar

Birincil Dil İngilizce
Konular Makine Mühendisliği
Bölüm Makine Mühendisliği
Yazarlar

Mehmet Ali Olğar 0000-0002-6359-8316

Yayımlanma Tarihi 31 Temmuz 2019
Gönderilme Tarihi 25 Kasım 2018
Kabul Tarihi 2 Nisan 2019
Yayımlandığı Sayı Yıl 2019 Cilt: 8 Sayı: 2

Kaynak Göster

APA Olğar, M. A. (2019). INFLUENCE OF SULFURIZATION ON THE PROPERTIES OF Cu2ZnSnS4 (CZTS) THIN FILMS PREPARED BY A TWO-STAGE PROCESS. Niğde Ömer Halisdemir Üniversitesi Mühendislik Bilimleri Dergisi, 8(2), 1064-1072. https://doi.org/10.28948/ngumuh.598096
AMA Olğar MA. INFLUENCE OF SULFURIZATION ON THE PROPERTIES OF Cu2ZnSnS4 (CZTS) THIN FILMS PREPARED BY A TWO-STAGE PROCESS. NÖHÜ Müh. Bilim. Derg. Temmuz 2019;8(2):1064-1072. doi:10.28948/ngumuh.598096
Chicago Olğar, Mehmet Ali. “INFLUENCE OF SULFURIZATION ON THE PROPERTIES OF Cu2ZnSnS4 (CZTS) THIN FILMS PREPARED BY A TWO-STAGE PROCESS”. Niğde Ömer Halisdemir Üniversitesi Mühendislik Bilimleri Dergisi 8, sy. 2 (Temmuz 2019): 1064-72. https://doi.org/10.28948/ngumuh.598096.
EndNote Olğar MA (01 Temmuz 2019) INFLUENCE OF SULFURIZATION ON THE PROPERTIES OF Cu2ZnSnS4 (CZTS) THIN FILMS PREPARED BY A TWO-STAGE PROCESS. Niğde Ömer Halisdemir Üniversitesi Mühendislik Bilimleri Dergisi 8 2 1064–1072.
IEEE M. A. Olğar, “INFLUENCE OF SULFURIZATION ON THE PROPERTIES OF Cu2ZnSnS4 (CZTS) THIN FILMS PREPARED BY A TWO-STAGE PROCESS”, NÖHÜ Müh. Bilim. Derg., c. 8, sy. 2, ss. 1064–1072, 2019, doi: 10.28948/ngumuh.598096.
ISNAD Olğar, Mehmet Ali. “INFLUENCE OF SULFURIZATION ON THE PROPERTIES OF Cu2ZnSnS4 (CZTS) THIN FILMS PREPARED BY A TWO-STAGE PROCESS”. Niğde Ömer Halisdemir Üniversitesi Mühendislik Bilimleri Dergisi 8/2 (Temmuz 2019), 1064-1072. https://doi.org/10.28948/ngumuh.598096.
JAMA Olğar MA. INFLUENCE OF SULFURIZATION ON THE PROPERTIES OF Cu2ZnSnS4 (CZTS) THIN FILMS PREPARED BY A TWO-STAGE PROCESS. NÖHÜ Müh. Bilim. Derg. 2019;8:1064–1072.
MLA Olğar, Mehmet Ali. “INFLUENCE OF SULFURIZATION ON THE PROPERTIES OF Cu2ZnSnS4 (CZTS) THIN FILMS PREPARED BY A TWO-STAGE PROCESS”. Niğde Ömer Halisdemir Üniversitesi Mühendislik Bilimleri Dergisi, c. 8, sy. 2, 2019, ss. 1064-72, doi:10.28948/ngumuh.598096.
Vancouver Olğar MA. INFLUENCE OF SULFURIZATION ON THE PROPERTIES OF Cu2ZnSnS4 (CZTS) THIN FILMS PREPARED BY A TWO-STAGE PROCESS. NÖHÜ Müh. Bilim. Derg. 2019;8(2):1064-72.
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