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Saf ZnO ve katkılı ZnO:Alx:Mny ( x=1% at., y=1%, 2%, 3%, 5% at.) yarı iletken ince filmlerin yapısal ve optiksel özellikleri ile üretilen diyotların elektriksel özelliklerinin araştırılması

Year 2023, Volume: 38 Issue: 1, 163 - 174, 21.06.2022
https://doi.org/10.17341/gazimmfd.1001776

Abstract

Bu çalışmada, katkısız ZnO ve Al, Mn katkılı ZnO yarı iletken ince filmler ve p-tipi Si diyotlar sol-jel spin kaplama tekniği kullanılarak üretildi. Üretilen ince filmlerin yapısal ve optiksel özellikleri sırasıyla SEM, XRD ve UV-Spektrofotometre kullanılarak incelendi. İnce filmlerin kristal yapısının altıgen wurtzite yapıya sahip olduğu ve artan Mn katkısı ile numunelerin optik bant aralığı enerjilerinin azaldığı belirlendi. Termoiyonik emisyon modeli kullanılarak diyotların deneysel sıfır-besleme akım bariyer yüksekliği (Φb(I-V)), doğrultma oranı, idealite faktörü ve Ion/Ioff parametreleri hesaplandı. Üretilen Al/p-Si/ZnO:Al:Mn/Al diyotunun yüksek doğrultma oranının ve Ion/Ioff değerlerinin sırasıyla 1,56x105 ve 1,54x104 olduğu ve ışığa duyarlı davranışlar sergilediği belirlendi. Ayrıca, Al/p-Si/ZnO:Al:Mn/Al diyotunun kapasitans bariyer yüksekliği (Φb(C-V)), kurulma voltajı (Vbi), difüzyon potansiyeli (Vd), donör konsantrasyonu (Nd) ve tükenme tabakası genişliği (Wd) değerleri 1MHz frekans altında çizilen C-2-V grafiği kullanılarak hesaplandı. Elde edilen sonuçlar üretilen diyotların optoelektronik uygulamalarda fotodiyot veya fotosensör olarak kullanılabileceğini göstermektedir.

Supporting Institution

Fırat Üniversitesi

Project Number

FF16.24

Thanks

Bu çalışma Fırat Üniversitesi tarafından doktora tezi için desteklenmiştir (Proje No. FF16.24).

References

  • KAYNAKLAR (RFFERENCES) 1. Abd-Lefdil M., Belayachi A., Pramodini S., Poornesh P., Wojciechowski A., Fedorchuk A. O., Structural, photoinduced optical effects and third-order nonlinear optical studies on Mn doped and Mn–Al codoped ZnO thin films under continuous wave laser irradiation, Laser Phys, 24 (7), 35-42 , 2014.
  • 2. Suwanboon S., Ratana T., Ratana Th., Effects of Al and Mn dopant on structural and optical properties of ZnO thin film prepared by sol-gel route, Walailak J Sci & Tech., 4 (1), 111-121, 2007.
  • 3. Chebbah K., Baghdad R., Abdelkader B., Reggad A., Structural and optical properties of N and Mn co-doped ZnO thin films grown by ultrasonic spray pyrolysis method, Journal of Nanoelectronics and Optoelectronics, 14 (1), 47-57, 2019.
  • 4. Shinde VR., Gujar TP., Lokhande CD., Mane RS., Han SH., Mn doped and undoped ZnO films: A comparative structural, optical and electrical properties study, Mater. Chem. Phys., 95 (3), 326-330, 2006.
  • 5. Li X., Zhu X., Jin K., Yang D., Study on structural and optical properties of Mn-doped ZnO thin films by sol-gel method, Optical Materials, 100 (2), 1096-1103, 2020.
  • 6. López‑Suárez A., Acosta D., Magaña C., Hernández F., Optical, structural and electrical properties of ZnO thin films doped with Mn, Journal of Materials Science: Materials in Electronics, 31 (5), 7389–7397, 2020.
  • 7. Srikant V., Clarke D.R., On the optical band gap of zinc oxide, J. Appl. Phys., 83 (10), 47-54, 1998.
  • 8. Cao H.T.,_ Pei Z.L., Gong J., Sun C., Huang R.F., Wen L.S., Preparation and characterization of Al and Mn doped ZnO (ZnO:(Al, Mn)) transparent conducting oxide films, Journal of Solid State Chemistry, 177 (4), 1480–1487, 2004.
  • 9. Cao H.T., Pei Z.L., Gong J., Sun C., Huang R.F., Wen L.S., Transparent conductive Al and Mn doped ZnO thin films prepared by DC reactive magnetron sputtering, Surface and Coatings Technology, 184 (2), 84-92, 2004.
  • 10. Mote V.D., Purushotham Y., Dole B.N., Structural, morphological, physical and dielectric properties of Mn doped ZnO nanocrystals synthesized by sol-gel method, Materials and Design, 96 (2), 99-105, 2016.
  • 11. Hu D., Liu X., Deng S., Liu Y., Feng Z., Han B., Wang Y., Wang Y., Structural and optical properties of Mn-doped ZnO nanocrystalline thin films with the different dopant concentrations, Physica E, 61 (7), 14-22, 2014.
  • 12. Kim IY., Shin SW., Gang MG., Lee SH., Gurav KV., Patil PS., Comparative study of quaternary Mg and Group III element co-doped ZnO thin films with transparent conductive characteristics, Thin Solid Films, 57 (3), 321–326, 2014.
  • 13. Nirmala M., Anukaliani A., Structural and optical properties of an undoped and Mn doped ZnO nanocrysatlline thin film, Photonics Letters of Poland, 2 (4), 189-191, 2010.
  • 14. Kurtaran S., Akyüz İ., Atay F., Investigation of ZnO: Al thin films that can be used as transparent front contact in photovoltaic solar cells, Dokuz Eylul University-Faculty of Engineering, Journal of Science and Engineering, 19(56), 484-499, 2017.
  • 15. Benramache S., Arif A., Belahssen O., Guettaf A., Study on the correlation between crystallite size and optical gap energy of doped ZnO thin film, J. Nanostr. Chem., 3 (1), 80-86, 2013.
  • 16. Rusu G.G., Gorley P., Baban C., Rambu A.P., Rusu M., Preparation and characterization of Mn-doped ZnO thin films, J. Optoelectron. Adv. Mater., 12 (4), 895-899, 2010.
  • 17. Baghdad R., Kharroubi B., Abdiche A., Vousmaha M., Bezzerrouk M.A., Zeinert A., El Marssi M., Zellama K., Mn doped ZnO nanostructured thin films prepared by ultrasonic spray pyrolysis method, Superlattices and Microstructure, 52 (4), 711-721, 2012.
  • 18. Aoun Y., Benhaoua B., Benramache S., A study the aluminum doped zinc oxide thin films, J. Nano Electron. Phys., 7 (3), 3006-3013, 2015.
  • 19. Wen R., Wang L., Wang X., Yue G.-H., Chen Y., Peng D.-L., Influence of substrate temperature on mechanical, optical and electrical properties of ZnO: Al films, J. Alloys Compd., 508 (2), 370-374, 2010.
  • 20. El Hallani G., Nasih S., Fazouan N., Liba A., Khuili M., Sajieddine M., Comparative study for highly Al and Mg doped ZnO thin films elaborated by sol gel method for photovoltaic application, J Appl Phys., 121 (13), 5103-5110, 2017.
  • 21. Sandana VE., Rogers DJ., Teherani FH., McClintock R., Bayram C., Razeghi M., Comparison of ZnO nanostructures grown using pulsed laser deposition, metal organic chemical vapor deposition, and physical vapor transport, J. Vac. Sci. Technol., B. 27 (3), 1678-1683, 2009.
  • 22. Mani GK., Rayappan JBB., Facile synthesis of ZnO nanostructures by spray pyrolysis technique and its application as highly selective H2S sensor, Mater Lett., 158 (2), 373-376, 2015.
  • 23. Aydın C., Surface Morphology, Optical constants and dispersion energy parameters of nano-structured Mn/Ni doped ZnO semiconductor thin films, Science and Eng. J of Fırat Univ., 30 (1), 319-328, 2018.
  • 24. Ungula J., Dejene BF., Effect of solvent medium on the structural, morphological and optical properties of ZnO nanoparticles synthesized by the sol-gel method, Phys B: Condens Matter, 48 (5), 26-30, 2016.
  • 25. Ebrahimizadeh Abrishami M., Kompany A., Zhu Z., Effect of Mn doping on optical properties of nanostructured ZnO thin film, Advanced Materials Research, 462 (2), 201-205, 2012.
  • 26. Yan X., Hu D., Li H., Li L., Chong X., Wang Y., Nanostructure and optical properties of M doped ZnO (M=Ni, Mn) thin films prepared by sol–gel process, Physica B, 406 (20), 3956-3962, 2011.
  • 27. Demirbilek N., Zinc oxide interface semiconductor-semiconductor UV photodetectors, Ph.D, Science Institute, Fırat University, Elazig, Turkey, 2019.
  • 28. Xiao Z. H., Luo Y. P., Xu S. J., Zhong W., Ou H., Wu H. W., Investigation on the structural and optical properties of ZnO thin films prepared by sol-gel method, Advanced Materials Research, 971 (3), 89-92, 2014.
  • 29. Saleema M., Siddiqia S. A., Atiq S., Anwar M. S., Riaz S., Room temperature magnetic behavior of sol-gel synthesized Mn doped ZnO, Chinese Journal of Chemical Physics, 23 (4), 469-472, 2010.
  • 30. Gümüş C., Ulutaş C., Ufuktepe Y., Optical and structural properties of manganese sulfide thin films, Optical Materials, 29 (9), 1183-1187, 2007.
  • 31. Belkhaoui C., Mzabi N., Smaoui H., Daniel P., Enhancing the structural, optical and electrical properties of ZnO nanopowders through (Al+Mn) doping, Results in Physics, 12 (4), 1686–1696, 2019.
  • 32. Yakuphanoğlu F., Electrical characterization and device characterization of ZnO microring shaped films by sol–gel method, J. Alloys Compd., 507 (1), 184–189, 2010.
  • 33. Gozeh B. A., Karabulut A., Yildiz A., Yakuphanoglu F., Solar light responsive ZnO nanoparticles adjusted using Cd and La Co-dopant photodetector, J. Alloys Compd., 732 (3), 16-24, 2018.
  • 34. Karabulut A., Orak İ., Türüt A., The photovoltaic impact of atomic layer deposited TiO2 interfacial layer on Si-based photodiodes, Solid State Electronics, 144 (4), 39-48, 2018.
  • 35. Aydin H., Tataroglu A., Al-Ghamdi A. A., Yakuphanoglu F., El-Tantawy E., Farooq W.A., A novel type heterojunction photodiodes formed junctions of Au/LiZnSnO and LiZnSnO/p-Si in series, J. Alloys Compd., 625 (6), 18-25, 2015.
  • 36. Demirbilek N., Yakuphanoğlu F., Kaya M., The optical and structural properties of undoped ZnO and co-doped ZnO:Alx:Cdy x = 1 at %, y = 1, 2, 3, 5 at % thin films, and their electrical characteristics as photodiode, Protection of Metals and Physical Chemistry of Surfaces, 57 (3), 488-499, 2021.
  • 37. Aksoy S., Fabrication of n-ZnO:Mn/p-Si heterojunction diodes and its I-V, C-V characteristics, Eskişehir Technical University Journal of Science and technology A- Applied Sciences and Engineering, 20 (3), 296 - 306, 2019.
  • 38. Aksu Canbay C., Tataroglu A., Dere A., Al-Ghamdi A., Yakuphanoglu F., A new shape memory alloy film/p-Si solar light four quadrant detector for solar tracking applications, J. Alloys Compd., 688 (7), 762-768, 2016.
  • 39. Demirbilek N., Yakuphanoğlu F., Kaya M., Structural and optical properties of pure ZnO and Al/Cu co-doped ZnO semiconductor thin films and electrical characterization of photodiodes, Materials Testing, 63 (3), 279-285, 2021.
  • 40. Yakuphanoglu F., Aslam Farooq W., Photoresponse and electrical characterization of photodiode based nanofibers ZnO and Si, Materials Science in Semiconductor Processing, 14 (17), 207–211, 2011.
Year 2023, Volume: 38 Issue: 1, 163 - 174, 21.06.2022
https://doi.org/10.17341/gazimmfd.1001776

Abstract

Project Number

FF16.24

References

  • KAYNAKLAR (RFFERENCES) 1. Abd-Lefdil M., Belayachi A., Pramodini S., Poornesh P., Wojciechowski A., Fedorchuk A. O., Structural, photoinduced optical effects and third-order nonlinear optical studies on Mn doped and Mn–Al codoped ZnO thin films under continuous wave laser irradiation, Laser Phys, 24 (7), 35-42 , 2014.
  • 2. Suwanboon S., Ratana T., Ratana Th., Effects of Al and Mn dopant on structural and optical properties of ZnO thin film prepared by sol-gel route, Walailak J Sci & Tech., 4 (1), 111-121, 2007.
  • 3. Chebbah K., Baghdad R., Abdelkader B., Reggad A., Structural and optical properties of N and Mn co-doped ZnO thin films grown by ultrasonic spray pyrolysis method, Journal of Nanoelectronics and Optoelectronics, 14 (1), 47-57, 2019.
  • 4. Shinde VR., Gujar TP., Lokhande CD., Mane RS., Han SH., Mn doped and undoped ZnO films: A comparative structural, optical and electrical properties study, Mater. Chem. Phys., 95 (3), 326-330, 2006.
  • 5. Li X., Zhu X., Jin K., Yang D., Study on structural and optical properties of Mn-doped ZnO thin films by sol-gel method, Optical Materials, 100 (2), 1096-1103, 2020.
  • 6. López‑Suárez A., Acosta D., Magaña C., Hernández F., Optical, structural and electrical properties of ZnO thin films doped with Mn, Journal of Materials Science: Materials in Electronics, 31 (5), 7389–7397, 2020.
  • 7. Srikant V., Clarke D.R., On the optical band gap of zinc oxide, J. Appl. Phys., 83 (10), 47-54, 1998.
  • 8. Cao H.T.,_ Pei Z.L., Gong J., Sun C., Huang R.F., Wen L.S., Preparation and characterization of Al and Mn doped ZnO (ZnO:(Al, Mn)) transparent conducting oxide films, Journal of Solid State Chemistry, 177 (4), 1480–1487, 2004.
  • 9. Cao H.T., Pei Z.L., Gong J., Sun C., Huang R.F., Wen L.S., Transparent conductive Al and Mn doped ZnO thin films prepared by DC reactive magnetron sputtering, Surface and Coatings Technology, 184 (2), 84-92, 2004.
  • 10. Mote V.D., Purushotham Y., Dole B.N., Structural, morphological, physical and dielectric properties of Mn doped ZnO nanocrystals synthesized by sol-gel method, Materials and Design, 96 (2), 99-105, 2016.
  • 11. Hu D., Liu X., Deng S., Liu Y., Feng Z., Han B., Wang Y., Wang Y., Structural and optical properties of Mn-doped ZnO nanocrystalline thin films with the different dopant concentrations, Physica E, 61 (7), 14-22, 2014.
  • 12. Kim IY., Shin SW., Gang MG., Lee SH., Gurav KV., Patil PS., Comparative study of quaternary Mg and Group III element co-doped ZnO thin films with transparent conductive characteristics, Thin Solid Films, 57 (3), 321–326, 2014.
  • 13. Nirmala M., Anukaliani A., Structural and optical properties of an undoped and Mn doped ZnO nanocrysatlline thin film, Photonics Letters of Poland, 2 (4), 189-191, 2010.
  • 14. Kurtaran S., Akyüz İ., Atay F., Investigation of ZnO: Al thin films that can be used as transparent front contact in photovoltaic solar cells, Dokuz Eylul University-Faculty of Engineering, Journal of Science and Engineering, 19(56), 484-499, 2017.
  • 15. Benramache S., Arif A., Belahssen O., Guettaf A., Study on the correlation between crystallite size and optical gap energy of doped ZnO thin film, J. Nanostr. Chem., 3 (1), 80-86, 2013.
  • 16. Rusu G.G., Gorley P., Baban C., Rambu A.P., Rusu M., Preparation and characterization of Mn-doped ZnO thin films, J. Optoelectron. Adv. Mater., 12 (4), 895-899, 2010.
  • 17. Baghdad R., Kharroubi B., Abdiche A., Vousmaha M., Bezzerrouk M.A., Zeinert A., El Marssi M., Zellama K., Mn doped ZnO nanostructured thin films prepared by ultrasonic spray pyrolysis method, Superlattices and Microstructure, 52 (4), 711-721, 2012.
  • 18. Aoun Y., Benhaoua B., Benramache S., A study the aluminum doped zinc oxide thin films, J. Nano Electron. Phys., 7 (3), 3006-3013, 2015.
  • 19. Wen R., Wang L., Wang X., Yue G.-H., Chen Y., Peng D.-L., Influence of substrate temperature on mechanical, optical and electrical properties of ZnO: Al films, J. Alloys Compd., 508 (2), 370-374, 2010.
  • 20. El Hallani G., Nasih S., Fazouan N., Liba A., Khuili M., Sajieddine M., Comparative study for highly Al and Mg doped ZnO thin films elaborated by sol gel method for photovoltaic application, J Appl Phys., 121 (13), 5103-5110, 2017.
  • 21. Sandana VE., Rogers DJ., Teherani FH., McClintock R., Bayram C., Razeghi M., Comparison of ZnO nanostructures grown using pulsed laser deposition, metal organic chemical vapor deposition, and physical vapor transport, J. Vac. Sci. Technol., B. 27 (3), 1678-1683, 2009.
  • 22. Mani GK., Rayappan JBB., Facile synthesis of ZnO nanostructures by spray pyrolysis technique and its application as highly selective H2S sensor, Mater Lett., 158 (2), 373-376, 2015.
  • 23. Aydın C., Surface Morphology, Optical constants and dispersion energy parameters of nano-structured Mn/Ni doped ZnO semiconductor thin films, Science and Eng. J of Fırat Univ., 30 (1), 319-328, 2018.
  • 24. Ungula J., Dejene BF., Effect of solvent medium on the structural, morphological and optical properties of ZnO nanoparticles synthesized by the sol-gel method, Phys B: Condens Matter, 48 (5), 26-30, 2016.
  • 25. Ebrahimizadeh Abrishami M., Kompany A., Zhu Z., Effect of Mn doping on optical properties of nanostructured ZnO thin film, Advanced Materials Research, 462 (2), 201-205, 2012.
  • 26. Yan X., Hu D., Li H., Li L., Chong X., Wang Y., Nanostructure and optical properties of M doped ZnO (M=Ni, Mn) thin films prepared by sol–gel process, Physica B, 406 (20), 3956-3962, 2011.
  • 27. Demirbilek N., Zinc oxide interface semiconductor-semiconductor UV photodetectors, Ph.D, Science Institute, Fırat University, Elazig, Turkey, 2019.
  • 28. Xiao Z. H., Luo Y. P., Xu S. J., Zhong W., Ou H., Wu H. W., Investigation on the structural and optical properties of ZnO thin films prepared by sol-gel method, Advanced Materials Research, 971 (3), 89-92, 2014.
  • 29. Saleema M., Siddiqia S. A., Atiq S., Anwar M. S., Riaz S., Room temperature magnetic behavior of sol-gel synthesized Mn doped ZnO, Chinese Journal of Chemical Physics, 23 (4), 469-472, 2010.
  • 30. Gümüş C., Ulutaş C., Ufuktepe Y., Optical and structural properties of manganese sulfide thin films, Optical Materials, 29 (9), 1183-1187, 2007.
  • 31. Belkhaoui C., Mzabi N., Smaoui H., Daniel P., Enhancing the structural, optical and electrical properties of ZnO nanopowders through (Al+Mn) doping, Results in Physics, 12 (4), 1686–1696, 2019.
  • 32. Yakuphanoğlu F., Electrical characterization and device characterization of ZnO microring shaped films by sol–gel method, J. Alloys Compd., 507 (1), 184–189, 2010.
  • 33. Gozeh B. A., Karabulut A., Yildiz A., Yakuphanoglu F., Solar light responsive ZnO nanoparticles adjusted using Cd and La Co-dopant photodetector, J. Alloys Compd., 732 (3), 16-24, 2018.
  • 34. Karabulut A., Orak İ., Türüt A., The photovoltaic impact of atomic layer deposited TiO2 interfacial layer on Si-based photodiodes, Solid State Electronics, 144 (4), 39-48, 2018.
  • 35. Aydin H., Tataroglu A., Al-Ghamdi A. A., Yakuphanoglu F., El-Tantawy E., Farooq W.A., A novel type heterojunction photodiodes formed junctions of Au/LiZnSnO and LiZnSnO/p-Si in series, J. Alloys Compd., 625 (6), 18-25, 2015.
  • 36. Demirbilek N., Yakuphanoğlu F., Kaya M., The optical and structural properties of undoped ZnO and co-doped ZnO:Alx:Cdy x = 1 at %, y = 1, 2, 3, 5 at % thin films, and their electrical characteristics as photodiode, Protection of Metals and Physical Chemistry of Surfaces, 57 (3), 488-499, 2021.
  • 37. Aksoy S., Fabrication of n-ZnO:Mn/p-Si heterojunction diodes and its I-V, C-V characteristics, Eskişehir Technical University Journal of Science and technology A- Applied Sciences and Engineering, 20 (3), 296 - 306, 2019.
  • 38. Aksu Canbay C., Tataroglu A., Dere A., Al-Ghamdi A., Yakuphanoglu F., A new shape memory alloy film/p-Si solar light four quadrant detector for solar tracking applications, J. Alloys Compd., 688 (7), 762-768, 2016.
  • 39. Demirbilek N., Yakuphanoğlu F., Kaya M., Structural and optical properties of pure ZnO and Al/Cu co-doped ZnO semiconductor thin films and electrical characterization of photodiodes, Materials Testing, 63 (3), 279-285, 2021.
  • 40. Yakuphanoglu F., Aslam Farooq W., Photoresponse and electrical characterization of photodiode based nanofibers ZnO and Si, Materials Science in Semiconductor Processing, 14 (17), 207–211, 2011.
There are 40 citations in total.

Details

Primary Language Turkish
Subjects Engineering
Journal Section Makaleler
Authors

Nihat Demirbilek 0000-0002-9097-5033

Mehmet Kaya 0000-0001-9710-2254

Fahrettin Yakuphanoğlu 0000-0002-6500-7583

Project Number FF16.24
Publication Date June 21, 2022
Submission Date September 29, 2021
Acceptance Date January 26, 2022
Published in Issue Year 2023 Volume: 38 Issue: 1

Cite

APA Demirbilek, N., Kaya, M., & Yakuphanoğlu, F. (2022). Saf ZnO ve katkılı ZnO:Alx:Mny ( x=1% at., y=1%, 2%, 3%, 5% at.) yarı iletken ince filmlerin yapısal ve optiksel özellikleri ile üretilen diyotların elektriksel özelliklerinin araştırılması. Gazi Üniversitesi Mühendislik Mimarlık Fakültesi Dergisi, 38(1), 163-174. https://doi.org/10.17341/gazimmfd.1001776
AMA Demirbilek N, Kaya M, Yakuphanoğlu F. Saf ZnO ve katkılı ZnO:Alx:Mny ( x=1% at., y=1%, 2%, 3%, 5% at.) yarı iletken ince filmlerin yapısal ve optiksel özellikleri ile üretilen diyotların elektriksel özelliklerinin araştırılması. GUMMFD. June 2022;38(1):163-174. doi:10.17341/gazimmfd.1001776
Chicago Demirbilek, Nihat, Mehmet Kaya, and Fahrettin Yakuphanoğlu. “Saf ZnO Ve katkılı ZnO:Alx:Mny ( x=1% at., y=1%, 2%, 3%, 5% at.) Yarı Iletken Ince Filmlerin yapısal Ve Optiksel özellikleri Ile üretilen diyotların Elektriksel özelliklerinin araştırılması”. Gazi Üniversitesi Mühendislik Mimarlık Fakültesi Dergisi 38, no. 1 (June 2022): 163-74. https://doi.org/10.17341/gazimmfd.1001776.
EndNote Demirbilek N, Kaya M, Yakuphanoğlu F (June 1, 2022) Saf ZnO ve katkılı ZnO:Alx:Mny ( x=1% at., y=1%, 2%, 3%, 5% at.) yarı iletken ince filmlerin yapısal ve optiksel özellikleri ile üretilen diyotların elektriksel özelliklerinin araştırılması. Gazi Üniversitesi Mühendislik Mimarlık Fakültesi Dergisi 38 1 163–174.
IEEE N. Demirbilek, M. Kaya, and F. Yakuphanoğlu, “Saf ZnO ve katkılı ZnO:Alx:Mny ( x=1% at., y=1%, 2%, 3%, 5% at.) yarı iletken ince filmlerin yapısal ve optiksel özellikleri ile üretilen diyotların elektriksel özelliklerinin araştırılması”, GUMMFD, vol. 38, no. 1, pp. 163–174, 2022, doi: 10.17341/gazimmfd.1001776.
ISNAD Demirbilek, Nihat et al. “Saf ZnO Ve katkılı ZnO:Alx:Mny ( x=1% at., y=1%, 2%, 3%, 5% at.) Yarı Iletken Ince Filmlerin yapısal Ve Optiksel özellikleri Ile üretilen diyotların Elektriksel özelliklerinin araştırılması”. Gazi Üniversitesi Mühendislik Mimarlık Fakültesi Dergisi 38/1 (June 2022), 163-174. https://doi.org/10.17341/gazimmfd.1001776.
JAMA Demirbilek N, Kaya M, Yakuphanoğlu F. Saf ZnO ve katkılı ZnO:Alx:Mny ( x=1% at., y=1%, 2%, 3%, 5% at.) yarı iletken ince filmlerin yapısal ve optiksel özellikleri ile üretilen diyotların elektriksel özelliklerinin araştırılması. GUMMFD. 2022;38:163–174.
MLA Demirbilek, Nihat et al. “Saf ZnO Ve katkılı ZnO:Alx:Mny ( x=1% at., y=1%, 2%, 3%, 5% at.) Yarı Iletken Ince Filmlerin yapısal Ve Optiksel özellikleri Ile üretilen diyotların Elektriksel özelliklerinin araştırılması”. Gazi Üniversitesi Mühendislik Mimarlık Fakültesi Dergisi, vol. 38, no. 1, 2022, pp. 163-74, doi:10.17341/gazimmfd.1001776.
Vancouver Demirbilek N, Kaya M, Yakuphanoğlu F. Saf ZnO ve katkılı ZnO:Alx:Mny ( x=1% at., y=1%, 2%, 3%, 5% at.) yarı iletken ince filmlerin yapısal ve optiksel özellikleri ile üretilen diyotların elektriksel özelliklerinin araştırılması. GUMMFD. 2022;38(1):163-74.