LORENTZ KUVVETİ TABANLI, TINLAYAN ve TİTREŞİM GENLİĞİ ÖLÇÜMÜ İLE ÇALIŞAN BİR MEMS MANYETOMETRE

Yıl 2017, Cilt: 22 Sayı: 3, 61 - 80, 08.12.2017

Kıvanç Azgın

https://doi.org/10.17482/uumfd.325923

Öz

Bu çalışmada titreşim genliği ölçümü ile çalışan
Lorentz kuvveti tabanlı ve algılayıcısı tınlaşan MEMS yük hücresi olan bir
manyetometre sunulmaktadır. Manyetometre, tarak elektrotlara sahip Çift Bağlı
Diyapazon (ÇBD) bir tınlatıcı ile, uçlarından ve ortalarından birbirlerine
bağlanmış kirişlerden oluşan bir ızgara yapısından oluşmaktadır. Izgara yapısı,
üzerinden geçen akımla Lorentz kuvvetini oluştururken, elektriksel direncin ve
yapının sıcaklığının yükselmesini engellemektedir. Maksimum hassasiyet için
yapının genlik frekans tepkisinin eğiminin en büyük olduğu tahrik frekansı seçilmiştir.
Manyetometre standart SOI (Yalıtkan-Üzeri-Silisyum) mikro-işleme teknikleri
kullanılarak 35µm yapısal kalınlıkla üretilmiştir. Yapılan frekans tepkisi
testinde ÇBD yapısının tınlaşım frekansının 63812,1 Hz ve 0,2 mTorr'daki kalite
faktörünün de 5950 olduğu belirlenmiştir. Testler yapıya dik olarak oluşturulan
30mT manyetik alan altında, 100mA ızgara akımı ve 70mV tahrik genliği ile
yapılmıştır. Manyetometrenin orantı katsayısı 113.7 mV/T ve duyarlılığı  965 µT/Hz^½ olarak ölçülmüştür.

Anahtar Kelimeler

Manyetometre, ÇBD (Çift Bağlı Diyapazon), MEMS, Lorentz Kuvveti, Genlik Ölçüm

A Resonant MEMS Lorentz Force Based Magnetometer with Amplitude Detection

Öz

This study presents a Lorentz force magnetometer based
on vibration amplitude detection with a resonant MEMS load cell structure as a
sensor. Magnetometer is composed of a DETF (Double-Ended Tuning Fork) resonator
with comb type electrode and a grill structure formed by beams connected from
their centers end ends. The grill structure reduces electrical resistance and prevents
overheating while generating the Lorentz force. For maximum sensitivity, the
maxima of the slope of the magnitude response is chosen for excitation
frequency. The proposed sensor is fabricated using a standard SOI
micromachining processes with a device layer thickness of 35 μm. The resonance
frequency of the DETF is measured to be 63812,1 Hz, Q-factor of 5950 at around
0.2 mTorr ambient pressure. Tests are done for 30 mT magnetic field normal to
the resonator plane, with the grill current of 100 mA and excitation amplitude
of 70mV. The scale factor of the magnetometer is measured to be 113.7 mV/T with
a resolution of  965 µT/Hz^½.

Anahtar Kelimeler

Magnetometer, DETF, MEMS, Lorentz Force, Amplitude Detection

Kaynakça

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