Abstract
Electron energy distribution function (EEDF) in non-equilibrium plasmas often differs from Maxwellian distribution. Therefore, it is essential to determine the EEDF experimentally for accurately deducing the plasma parameters and rates of plasma-chemical processes. Langmuir Probe is a robust diagnostic tool allowing the estimation of EEDF by the differentiation of I-V curve. However, possible distortions in differentiation process should be handled cautiously. This paper focuses on Maxwellian optimization method for the determination of EEDF from Langmuir probe I-V curve where EEDF is modeled as perturbations around Maxwellian distribution. The proposed optimization method is implemented on the Argon glow discharge plasma experimental data. The results obtained by the proposed Maxwellian optimization are compared with the ones obtained by commonly used Savitzky-Golay filtering method and the polynomial optimization method. The comparison indicates that it is vital to choose the appropriate model function to begin with for the optimization procedure to be satisfactory.
Keywords
Thermodynamics of plasmas Plasma diagnostic techniques and instrumentation Discharge in vacuum
Supporting Institution
TUBİTAK UME
Project Number
G2ED-E1-02-I
Thanks
This research is funded by TÜBİTAK UME.
References
- Reference1 Langmuir, The collected works of Irving Langmuir, edited by C. Suits, Pergamon Press, Inc., New York, Vol. 4, 23-132 (1961).
- Reference2 M. J. Druyvesteyn, The voltage arc, Z. Phys. 64,781(1930).
- Reference3 V. A. Godyak, V. I. Demidov, Probe measurements of electron-energy distributions in plasmas: what can we measure and how can we achieve reliable results?, J. Phys. D: Appl. Phys. 44, 2695011 (2011).
- Reference4 M A. Lieberman, A. J. Lichtenberg, Principles of Plasma Discharges and Materials Processing, second ed., Wiley, New York (2005).
- reference5 V. A. Godyak, R. B. Piejak, B. M. Alexandrovich, Measurement of electron energy distribution in low-pressure RF discharges, Plasma Sources Sci. Technol. 1, 36-58 (1992).
- Reference6 T. Kimura, A. Yoneya, K. Ohe, Detection of Electron Energy Distribution Function by Finite Impulse Response Filter, Jpn. J. Appl. Phys. Part 1 30, 1877-1881 (1991).
- Reference7 J. I. Fernández Palop, J. Ballesteros, V. Colomer, M. A. Hernández, A new smoothing method for obtaining the electron energy distribution function in plasmas by the numerical differentiation of the I-V probe characteristic, Rev. Sci. Instrum. 66, 4625-4636 (1995). DOI: https://doi.org/10.1063/1.1145300
- Reference8 F. Magnus, J. T. Gudmundsson, Digital smoothing of the Langmuir probe I-V characteristic Rev. Sci. Instrum. 79, 073503 (2008). DOI: https://doi.org/10.1063/1.2956970
- Reference9 W. Seifert, D. Johanning, H.‐R. Lehmann, N. Bankov, Methods for the Numerical Calculation of the Plasma Potential from Measured Langmuir Probe Characteristics, Beiträge aus der Plasmaphysik 26 Isssue 4, 237-253 (1986).
- Reference10 S. Bose, M. Kaur, P. K. Chattopadhyay, I. J. Ghosh, Y. C. Saxena, R. Pal, Langmuir probe in collisionless and collisional plasma including dusty plasma, J. Plasma Phys. 83, 615830201 (2017). DOI: https://doi.org/10.1017/S0022377817000289
Abstract
Project Number
G2ED-E1-02-I
References
- Reference1 Langmuir, The collected works of Irving Langmuir, edited by C. Suits, Pergamon Press, Inc., New York, Vol. 4, 23-132 (1961).
- Reference2 M. J. Druyvesteyn, The voltage arc, Z. Phys. 64,781(1930).
- Reference3 V. A. Godyak, V. I. Demidov, Probe measurements of electron-energy distributions in plasmas: what can we measure and how can we achieve reliable results?, J. Phys. D: Appl. Phys. 44, 2695011 (2011).
- Reference4 M A. Lieberman, A. J. Lichtenberg, Principles of Plasma Discharges and Materials Processing, second ed., Wiley, New York (2005).
- reference5 V. A. Godyak, R. B. Piejak, B. M. Alexandrovich, Measurement of electron energy distribution in low-pressure RF discharges, Plasma Sources Sci. Technol. 1, 36-58 (1992).
- Reference6 T. Kimura, A. Yoneya, K. Ohe, Detection of Electron Energy Distribution Function by Finite Impulse Response Filter, Jpn. J. Appl. Phys. Part 1 30, 1877-1881 (1991).
- Reference7 J. I. Fernández Palop, J. Ballesteros, V. Colomer, M. A. Hernández, A new smoothing method for obtaining the electron energy distribution function in plasmas by the numerical differentiation of the I-V probe characteristic, Rev. Sci. Instrum. 66, 4625-4636 (1995). DOI: https://doi.org/10.1063/1.1145300
- Reference8 F. Magnus, J. T. Gudmundsson, Digital smoothing of the Langmuir probe I-V characteristic Rev. Sci. Instrum. 79, 073503 (2008). DOI: https://doi.org/10.1063/1.2956970
- Reference9 W. Seifert, D. Johanning, H.‐R. Lehmann, N. Bankov, Methods for the Numerical Calculation of the Plasma Potential from Measured Langmuir Probe Characteristics, Beiträge aus der Plasmaphysik 26 Isssue 4, 237-253 (1986).
- Reference10 S. Bose, M. Kaur, P. K. Chattopadhyay, I. J. Ghosh, Y. C. Saxena, R. Pal, Langmuir probe in collisionless and collisional plasma including dusty plasma, J. Plasma Phys. 83, 615830201 (2017). DOI: https://doi.org/10.1017/S0022377817000289
Details
| Primary Language | English |
|---|---|
| Subjects | Metrology, Applied and Industrial Physics |
| Journal Section | Research Articles |
| Authors | |
| Project Number | G2ED-E1-02-I |
| Publication Date | September 3, 2021 |
| Published in Issue | Year 2021 Volume: 5 Issue: 1 |