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Nitrogen effect on the surface and optical properties of cubic and hexagonal BN nano layered thin films deposited by RF sputtering method

Year 2016, Volume: 17 Issue: 1, 191 - 198, 25.04.2016

Suat Pat

https://doi.org/10.18038/btda.52472

Abstract

In this study, influence of N2 gas concentration on the surface and optical properties of BN thin films were investigated.  A cubic BN phase, from the hexagonal structure, was produced by nitrogen concentration during the deposition process. All BN thin films were deposited on glass substrates by reactive radio frequency magnetron sputtering method at argon / nitrogen (ratios of 3:7, 1:1 and 4:1) gas mixtures.  For the determination of these two phases’ surface and optical properties, field emission scanning electron microscopy, wavelength dispersive x-ray spectroscopy, atomic force microscopy, UV-Vis spectrophotometry, tensiometry, and interferometry tools were used. According to the results, the deposited films are homogenous, compact and nano-structured, and hydrophobic. Perfect stoichiometric ratios were obtained for deposited samples. Phase transitions to cubic phase from hexagonal BN crystal system were only obtained by N2 gas concentration.  

Keywords

Nano-thick BN layer cubic BN; hexagonal BN; surface properties; optical properties

NITROGEN EFFECT ON THE SURFACE AND OPTICAL PROPERTIES OF CUBIC AND HEXAGONAL BN NANO LAYERED THIN FILMS DEPOSITED BY RF SPUTTERING METHOD

Year 2016, Volume: 17 Issue: 1, 191 - 198, 25.04.2016

Suat Pat

https://doi.org/10.18038/btda.52472

Abstract

Bu çalışmada, BN ince filmlerin yüzey ve optiksel özelliklerine N2 gaz konsantrasyonunun etkisi araştırılmıştır. Hegzagonal yapıdan kubik BN fazı, depolama esnasında azot gazı konsantrasyonu değişimi ile üretilmiştir. Tüm BN ince filmler reaktif radyo frekans manyetik sıçratma metodu kullanarak argon/azot (3:7, 1:1 ve 4:1 oranlarında) gaz karışımlarıyla cam alt taşlar üzerine üretilmişlerdir. Bu iki fazın yüzey ve optiksel özelliklerinin belirlenmesi için, dalgaboyu dağılım X-ışın spektroskopisi, atomik kuvvet mikroskobu, UV-Vis spektrofotometre, tensiyometre ve interferometre ölçüm cihazları kullanılmıştır. Sonuçlara göre, depolanmış ince filmler homojen, sıkı yapılı, nano yapılı ve hidrofobiktir. Mükemmel sitokiyometrik oranlar depolanmış örneklerde elde edilmiştir. Hegzagonal BN kristal sistemden kubik faza geçiş N2 gaz konsantrasyonunun değişimi ile elde edilmiştir

Keywords

Nano kalınlıklı BN tabakası Kübik BN Hegzagonal BN Yüzey özellikleri Optiksel özellikler

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Journal Section Articles
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Suat Pat

Publication Date April 25, 2016
Published in Issue Year 2016 Volume: 17 Issue: 1

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APA Pat, S. (2016). Nitrogen effect on the surface and optical properties of cubic and hexagonal BN nano layered thin films deposited by RF sputtering method. Anadolu University Journal of Science and Technology A - Applied Sciences and Engineering, 17(1), 191-198. https://doi.org/10.18038/btda.52472
AMA Pat S. Nitrogen effect on the surface and optical properties of cubic and hexagonal BN nano layered thin films deposited by RF sputtering method. AUJST-A. June 2016;17(1):191-198. doi:10.18038/btda.52472
Chicago Pat, Suat. “Nitrogen Effect on the Surface and Optical Properties of Cubic and Hexagonal BN Nano Layered Thin Films Deposited by RF Sputtering Method”. Anadolu University Journal of Science and Technology A - Applied Sciences and Engineering 17, no. 1 (June 2016): 191-98. https://doi.org/10.18038/btda.52472.
EndNote Pat S (June 1, 2016) Nitrogen effect on the surface and optical properties of cubic and hexagonal BN nano layered thin films deposited by RF sputtering method. Anadolu University Journal of Science and Technology A - Applied Sciences and Engineering 17 1 191–198.
IEEE S. Pat, “Nitrogen effect on the surface and optical properties of cubic and hexagonal BN nano layered thin films deposited by RF sputtering method”, AUJST-A, vol. 17, no. 1, pp. 191–198, 2016, doi: 10.18038/btda.52472.
ISNAD Pat, Suat. “Nitrogen Effect on the Surface and Optical Properties of Cubic and Hexagonal BN Nano Layered Thin Films Deposited by RF Sputtering Method”. Anadolu University Journal of Science and Technology A - Applied Sciences and Engineering 17/1 (June 2016), 191-198. https://doi.org/10.18038/btda.52472.
JAMA Pat S. Nitrogen effect on the surface and optical properties of cubic and hexagonal BN nano layered thin films deposited by RF sputtering method. AUJST-A. 2016;17:191–198.
MLA Pat, Suat. “Nitrogen Effect on the Surface and Optical Properties of Cubic and Hexagonal BN Nano Layered Thin Films Deposited by RF Sputtering Method”. Anadolu University Journal of Science and Technology A - Applied Sciences and Engineering, vol. 17, no. 1, 2016, pp. 191-8, doi:10.18038/btda.52472.
Vancouver Pat S. Nitrogen effect on the surface and optical properties of cubic and hexagonal BN nano layered thin films deposited by RF sputtering method. AUJST-A. 2016;17(1):191-8.
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