MEMS Malzeme Karakterizasyonu için Bütünleşik bir Elektrostatik Mikro Bükülme Test Yapısı Tasarımı ve Gerçekleştirilmesi

Year 2012, Volume: 9 Issue: 1, - , 01.02.2012

Ender Yıldırım Tayfun Akın M. A. Sahir Arıkan

Abstract

Because of the fabrication techniques, mechanical properties of the materials
used in micro electromechanical systems should be determined by utilizing micro-scale test
structures. In this study, a micro bending test structure, whose actuator, sample, and readout
scale are integrally fabricated on a single chip is presented. Integrated fabrication of all
components eliminates the alignment problem observed in similar systems. The structure
relies on the principle of bending a double-clamped beam from its center by using an
electrostatic comb drive. Deflection amount is determined by using image processing
techniques on the read-out scale. Designed structures are fabricated by using silicon-oninsulator
wafers. As a result of the tests, elastic modulus of silicon is determined as 136
GPa in accordance with the literature. 

Keywords

Micro electromechanical systems, material characterization, electrostatic actuator

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