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Year 2015, Volume: 36 Issue: 3, 1567 - 1571, 13.05.2015

Nasimeh Moradi , Zahra Khadem Ahmad Afifi

Abstract

References

  • Gordley. Lany,” A Space Instrument Application Of An Uncooled Infrared Microbolometer Array”, IEEE,GATS Inc., Newport News, VA 23606,8, 2 000. Niklaus. Frank
  • ،٬" MEMS-Based Uncooled Infrared Bolometer Arrays – A Review", MEMS/MOEMS Technologies and Applications III, SPIE VOL 6836, 68360D,15,2007.
  • Song. Woo-Bin,” Design and characterization of adaptive Microbolometers” Micromech. Microeng. 16 IOP Publishing Ltd Printed in the UK 1073- 1079,7,2006.
  • Tezcan. Deniz Sabuncuoglu ،٬" An Uncooled Microbolometer Infrader Detector in any standard Cmos technology ", The 10th Int. Conf. on Solid-State Sensors&Actuators (TRANSDUCERS’99), pp. 610-613, 4 ،٬ Sendai, Japan, June 7-10, 1999.
  • Tezcan. Deniz Sabuncuoglu ،٬" A Low-Cost Uncooled Infrared Microbolometer Detector in Standard CMOS Technology”،٬ IEEE Transactions on electron devices, VOL. 50, NO. 2,9, FEBRUARY 2003.
  • Wang. Li-Xia،٬”Preparation of VO2 Microbolometer for CO2 gas Detection”, IEEE,College of Science, Nanjing University of Posts and Telecommunications, Nanjing, China, 210046,4, 2010.

Optimization of a new microbolometer IR detector in standard CMOS technology

Year 2015, Volume: 36 Issue: 3, 1567 - 1571, 13.05.2015

Nasimeh Moradi , Zahra Khadem Ahmad Afifi

Abstract

Abstract. This paper reports a new microbolometer structure with the CMOS n-well layer as the active element and the metal layer as intermediate layer on supporting arms. Due to thermal flux into the microbolometer, thermal variation occurs within it that leads to the variation of resistivity. The more thermal variation, the more microbolometer performance. Various materials have been used for fabrication of bolometers that one could outperforms the performance of bolometers by selecting an appropriate materials for active and intermediate layers on supporting arm. Detailed thermal simulations in ANSYS were performed to obtain an optimized structure. Maximum specific detectivity has been calculated 1334×109 cmHz1/2/W with a responsivity of 32721 V/W.

Keywords

infrared beam microbolometer specific detectivity responsivity

References

  • Gordley. Lany,” A Space Instrument Application Of An Uncooled Infrared Microbolometer Array”, IEEE,GATS Inc., Newport News, VA 23606,8, 2 000. Niklaus. Frank
  • ،٬" MEMS-Based Uncooled Infrared Bolometer Arrays – A Review", MEMS/MOEMS Technologies and Applications III, SPIE VOL 6836, 68360D,15,2007.
  • Song. Woo-Bin,” Design and characterization of adaptive Microbolometers” Micromech. Microeng. 16 IOP Publishing Ltd Printed in the UK 1073- 1079,7,2006.
  • Tezcan. Deniz Sabuncuoglu ،٬" An Uncooled Microbolometer Infrader Detector in any standard Cmos technology ", The 10th Int. Conf. on Solid-State Sensors&Actuators (TRANSDUCERS’99), pp. 610-613, 4 ،٬ Sendai, Japan, June 7-10, 1999.
  • Tezcan. Deniz Sabuncuoglu ،٬" A Low-Cost Uncooled Infrared Microbolometer Detector in Standard CMOS Technology”،٬ IEEE Transactions on electron devices, VOL. 50, NO. 2,9, FEBRUARY 2003.
  • Wang. Li-Xia،٬”Preparation of VO2 Microbolometer for CO2 gas Detection”, IEEE,College of Science, Nanjing University of Posts and Telecommunications, Nanjing, China, 210046,4, 2010.
There are 6 citations in total.

Details

Journal Section Special
Authors

Nasimeh Moradi

Zahra Khadem This is me

Ahmad Afifi This is me

Publication Date May 13, 2015
Published in Issue Year 2015 Volume: 36 Issue: 3

Cite

APA Moradi, N., Khadem, Z., & Afifi, A. (2015). Optimization of a new microbolometer IR detector in standard CMOS technology. Cumhuriyet Üniversitesi Fen Edebiyat Fakültesi Fen Bilimleri Dergisi, 36(3), 1567-1571.
AMA Moradi N, Khadem Z, Afifi A. Optimization of a new microbolometer IR detector in standard CMOS technology. Cumhuriyet Üniversitesi Fen Edebiyat Fakültesi Fen Bilimleri Dergisi. May 2015;36(3):1567-1571.
Chicago Moradi, Nasimeh, Zahra Khadem, and Ahmad Afifi. “Optimization of a New Microbolometer IR Detector in Standard CMOS Technology”. Cumhuriyet Üniversitesi Fen Edebiyat Fakültesi Fen Bilimleri Dergisi 36, no. 3 (May 2015): 1567-71.
EndNote Moradi N, Khadem Z, Afifi A (May 1, 2015) Optimization of a new microbolometer IR detector in standard CMOS technology. Cumhuriyet Üniversitesi Fen Edebiyat Fakültesi Fen Bilimleri Dergisi 36 3 1567–1571.
IEEE N. Moradi, Z. Khadem, and A. Afifi, “Optimization of a new microbolometer IR detector in standard CMOS technology”, Cumhuriyet Üniversitesi Fen Edebiyat Fakültesi Fen Bilimleri Dergisi, vol. 36, no. 3, pp. 1567–1571, 2015.
ISNAD Moradi, Nasimeh et al. “Optimization of a New Microbolometer IR Detector in Standard CMOS Technology”. Cumhuriyet Üniversitesi Fen Edebiyat Fakültesi Fen Bilimleri Dergisi 36/3 (May 2015), 1567-1571.
JAMA Moradi N, Khadem Z, Afifi A. Optimization of a new microbolometer IR detector in standard CMOS technology. Cumhuriyet Üniversitesi Fen Edebiyat Fakültesi Fen Bilimleri Dergisi. 2015;36:1567–1571.
MLA Moradi, Nasimeh et al. “Optimization of a New Microbolometer IR Detector in Standard CMOS Technology”. Cumhuriyet Üniversitesi Fen Edebiyat Fakültesi Fen Bilimleri Dergisi, vol. 36, no. 3, 2015, pp. 1567-71.
Vancouver Moradi N, Khadem Z, Afifi A. Optimization of a new microbolometer IR detector in standard CMOS technology. Cumhuriyet Üniversitesi Fen Edebiyat Fakültesi Fen Bilimleri Dergisi. 2015;36(3):1567-71.