Year 2020, Volume 4 , Issue 1, Pages 38 - 43 2020-04-30

ABSTRACT This study aims to fabricate Electro-Thermal Micro Actuator based on Micro Electro Mechanical System (MEMS) with a 3D printer using Projection Micro Stereo Lithography (PµSL) technique. The production of the actuator produced by traditional MEMS fabrication methods with a 3D printer has been carried out in this study. The cost of traditional MEMS fabrication methods is high and there are many techniques to achieve the process. On the other hand, some methods have been developed to obtain better quality and low-cost production as a parallel to the development of technology. One of these methods is to use 3D printers employing the PµSL technique. By means of these printers, it is possible to reduce both the cost and workload of the production process the MEMS systems. In this study, it is investigated and stated that Nano level fabrication would be possible with 3D printers in the following years. It can also be predicted that traditional MEMS production methods will be replaced by 3D printers soon.
3D Printing, MEMS, Fabrication, PµSL.
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Primary Language en
Subjects Engineering, Mechanical
Journal Section Research Article
Authors

Orcid: 0000-0001-5070-5533
Author: İshak ERTUGRUL
Institution: MUS ALPARSLAN UNIVERSITY
Country: Turkey


Orcid: 0000-0001-5070-5533
Author: Nihat AKKUŞ
Institution: MARMARA ÜNİVERSİTESİ
Country: Turkey


Orcid: 0000-0001-5070-5533
Author: Ebuzer AYGÜL
Institution: MARMARA ÜNİVERSİTESİ
Country: Turkey


Orcid: 0000-0001-7076-7766
Author: Senai YALCİNKAYA (Primary Author)
Institution: Marmara University
Country: Turkey


Orcid: 0000-0003-1874-3104
Author: Hüseyin Metin ERTUNÇ
Institution: KOCAELİ ÜNİVERSİTESİ, MÜHENDİSLİK FAKÜLTESİ
Country: Turkey


Dates

Publication Date : April 30, 2020

Bibtex @conference paper { ij3dptdi669493, journal = {International Journal of 3D Printing Technologies and Digital Industry}, issn = {2602-3350}, address = {info@3dprintturkey.org}, publisher = {Kerim ÇETİNKAYA}, year = {2020}, volume = {4}, pages = {38 - 43}, doi = {}, title = {MEMS FABRICATION USING PµSL TECHNIQUE BASED 3D PRINTER}, key = {cite}, author = {Ertugrul, İshak and Akkuş, Nihat and Aygül, Ebuzer and Yalci̇nkaya, Senai and Ertunç, Hüseyin Metin} }
APA Ertugrul, İ , Akkuş, N , Aygül, E , Yalci̇nkaya, S , Ertunç, H . (2020). MEMS FABRICATION USING PµSL TECHNIQUE BASED 3D PRINTER . International Journal of 3D Printing Technologies and Digital Industry , 4 (1) , 38-43 . Retrieved from https://dergipark.org.tr/en/pub/ij3dptdi/issue/54120/669493
MLA Ertugrul, İ , Akkuş, N , Aygül, E , Yalci̇nkaya, S , Ertunç, H . "MEMS FABRICATION USING PµSL TECHNIQUE BASED 3D PRINTER" . International Journal of 3D Printing Technologies and Digital Industry 4 (2020 ): 38-43 <https://dergipark.org.tr/en/pub/ij3dptdi/issue/54120/669493>
Chicago Ertugrul, İ , Akkuş, N , Aygül, E , Yalci̇nkaya, S , Ertunç, H . "MEMS FABRICATION USING PµSL TECHNIQUE BASED 3D PRINTER". International Journal of 3D Printing Technologies and Digital Industry 4 (2020 ): 38-43
RIS TY - JOUR T1 - MEMS FABRICATION USING PµSL TECHNIQUE BASED 3D PRINTER AU - İshak Ertugrul , Nihat Akkuş , Ebuzer Aygül , Senai Yalci̇nkaya , Hüseyin Metin Ertunç Y1 - 2020 PY - 2020 N1 - DO - T2 - International Journal of 3D Printing Technologies and Digital Industry JF - Journal JO - JOR SP - 38 EP - 43 VL - 4 IS - 1 SN - 2602-3350- M3 - UR - Y2 - 2020 ER -
EndNote %0 International Journal of 3D Printing Technologies and Digital Industry MEMS FABRICATION USING PµSL TECHNIQUE BASED 3D PRINTER %A İshak Ertugrul , Nihat Akkuş , Ebuzer Aygül , Senai Yalci̇nkaya , Hüseyin Metin Ertunç %T MEMS FABRICATION USING PµSL TECHNIQUE BASED 3D PRINTER %D 2020 %J International Journal of 3D Printing Technologies and Digital Industry %P 2602-3350- %V 4 %N 1 %R %U
ISNAD Ertugrul, İshak , Akkuş, Nihat , Aygül, Ebuzer , Yalci̇nkaya, Senai , Ertunç, Hüseyin Metin . "MEMS FABRICATION USING PµSL TECHNIQUE BASED 3D PRINTER". International Journal of 3D Printing Technologies and Digital Industry 4 / 1 (April 2020): 38-43 .
AMA Ertugrul İ , Akkuş N , Aygül E , Yalci̇nkaya S , Ertunç H . MEMS FABRICATION USING PµSL TECHNIQUE BASED 3D PRINTER. IJ3DPTDI. 2020; 4(1): 38-43.
Vancouver Ertugrul İ , Akkuş N , Aygül E , Yalci̇nkaya S , Ertunç H . MEMS FABRICATION USING PµSL TECHNIQUE BASED 3D PRINTER. International Journal of 3D Printing Technologies and Digital Industry. 2020; 4(1): 38-43.