Design, Modeling and Optimization of a Multilayer Thin-Film Pzt Diaphragm Used in Pressure Sensor

Abstract

Multilayer thin-film PZT diaphragm has been designed and modeled. Commercial Finite element software, ANSYS was implemented to model the diaphragm. This multi-layer diaphragm can be used as both sensor and actuator. A simplified model is introduced to reduce the CPU time. Dynamic characteristics of the multilayer diaphragm have been investigated. The important parameters of the multilayer PZT diaphragm have been optimized to improve the performance of a pressure sensor using APDL macro. Some simple relation was found which can be used to predict the PZT layer characteristics in larger model with more elements

Keywords

• Finite Element, ANSYS®, MEMS Pressure Sensors, Multilayer Thin Film PZT Diaphragm, Piezoelectric

References

1. [1] Liu, M., Cui, T., Dong, W., Cuil, Y., Wang, J., Du, L., and Wang, L., Piezoelectric microcantilevers with two PZT thin-film elements for microsensors and microactuators, Proceedings of the 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2006, Zhuhai, China, 2006.
2. [2] Liwei Lin, L., and Yun, W., MEMS Pressure Sensors for Aerospace Applications, IEEE, 1998.
3. [3] Ravariu, F., Ravariu, C., Nedelcu, O., The modeling of a sensor for the human blood pressure, IEEE, 2002.
4. [4] Zinck, C., Pinceau, D., Defaÿ, E., Delevoye, E., Barbier, D. Development and characterization of membranes actuated by a PZT thin film for MEMS applications, Sensors and Actuators, A 115 483–489, 2004.
5. [5] ANSYS guide, release 10.0, ANSYS, Inc. http://www.ansys.com.
6. [6] Lin-Quan Yao, Li Lu, Simplified Model and Numerical Analysis of Multi-layered Piezoelectric Diaphragm, Advanced Materials for Micro- and Nano- Systems (AMMNS), 2003
7. [7] Shuo Hung Chang, Yi Chung Tung, Electro-Elastic Characteristics of Asymmetric Rectangular Piezoelectric Laminae, IEEE transactions on ultrasonics, ferroelectrics, and frequency control, vol. 46, no. 4, july 1999