Nadir Toprak Elementleri Katkılı ZnO İnce Filmler ve Uygulamaları

Abstract

Bu derleme çalışmasında ince film kaplama teknikleri, çinko oksit ince filmler ve nadir toprak elementleri (NTE) katkılandırılmış çinko oksit (ZnO) filmler konusunda son yıllarda yapılan çalışmalar hakkında genel bilgilendirme yapılmıştır. İnce film kaplama metodu olarak, sol‒jel metodu ekonomik olması nedeniyle yaygın olarak kullanılmaktadır. Bununla birlikte magnteron sputter tekniğinin de uygulama kolaylığı nedeniyle oldukça popüler olduğu görülmüştür. Çinko oksit geniş bant aralığına sahip bir yarıiletkendir ve hem üretimi hem de temin edilmesi kolay bir malzemedir. Bunun yanında çevre ve insan sağlığı üzerinde olumsuz etkileri bulunmamaktadır. Bütün bu özellikleri çinko oksit üzerinde yoğun çalışmalar yapılmasına yol açmıştır. Optik ve elektriksel özellikleri nedeniyle, güneş pilleri, ışık yayan diyotlar, gaz sensörleri ve düz panel ekranlar gibi çok farklı kullanım alanları bulmuştur. Son zamanlarda, nadir toprak elementleri katkılandırma yapılarak çinko oksitin özelliklerini daha da üstün bir konuma getirme ve yeni kullanım alanları oluşturmak için çeşitli çalışmalar yapılmaktadır.

Keywords

• Nadir toprak elementi
• NTE‒katkılı
• ince film
• kaplama
• ZnO

Rare Earth Element Doped ZnO Thin Films and Applications

Abstract

In this review, general information has been given about the recent studies on thin film coating techniques, zinc oxide (ZnO) thin films and zinc oxide films doped with rare earth elements (REE). As a thin film coating method, the sol‒gel method is widely used due to its economical nature. However, it has been seen that the magnteron sputter technique is also very popular due to its ease of application. Zinc oxide is a semiconductor with a wide band gap and is easy to produce and to supply. In addition, it does not have negative effects on the environment and human health. All these properties have led to intensive studies on zinc oxide. Due to its optical and electrical properties, it has found many different uses such as solar cells, light emitting diodes, gas sensors and flat panel displays. Recently, various studies have been carried out to improve the properties of zinc oxide and to create new areas of use by doping with rare earth elements.

Keywords

• Rare earth element
• REE‒doped
• thin film
• coating
• ZnO

References

1. Anand, V., Sakthivelu, A., Kumar, K.D.A, Valanarasu, S., Kathalingam, A., Ganesh, V. Shkir, M., AlFaify, S., Yahia, I.S. (2018a), Rare earth Sm3+ co‒doped AZO thin films for opto‒electronic application prepared by spray pyrolysis, Ceramics International, 44(6), 6730‒6738.
2. Anand, V., Sakthivelu, A., Kumar, K.D.A., Valanarasu, S., Ganesh, V., Shkir, M., Kathalingam, A., AlFaify, S. (2018b), Novel rare earth Gd and Al co‒doped ZnO thin films prepared by nebulizer spray method for optoelectronic applications, Superlattices and Microstructures, 123, 311‒322.
3. Asikuzun, E., Ozturk, O., Arda, L., Terzioglu, C. (2017), Microstructural and electrical characterizations of transparent Er‒doped ZnO nano thin films prepared by sol‒gel process, Journal of Materials Science‒Materials in Electronics, 28(19), 14314‒14322.
4. Aslan, N., Başman, N., Uzun, O. (2016), Investigation of Optical, Morphological and Mechanical Properties of Diamond-Like Carbon Films Synthesized by Electrodeposition Technique Using Formic Acid, International Journal of Pure and Applied Sciences, 2(2), 57‒63.
5. Brinker, C.J., Sherer, G.W. (1990), Sol‒Gel Science, San Diego: Academic Press.
6. Bunshah, R.F. (1980), High Rate PVD Processes. Agard Lecture Series No: 106, Materials Coating Techniques, pp. 21‒26, London: Harford House.
7. Canci, U. (2009), Determination of Electrical and Optical Properties of Doped and Undoped CdS Thin Films Prepared by CBD Method, Master Thesis, Gebze Institute of Technology, Institute of Engineering and Science, Gebze, Kocaeli.
8. Creighton, J.R., Ho, P. (2001), Chemical Vapor Deposition, Introduction to Chemical Vapor Deposition, Editor: Jong‒Hee Park, USA: ASM International.

9. Dopkin, D.M., Zuraw, M.K. (2003), Principles of Chemical Vapor Deposition, Dordrecht, Boston, London: Kluwer Academic Publishers.
10. Fenwick, W.E., Kane, M.H, Varatharajan, R., Zaidi, T., Fang, Z., Nemeth, B., Keeble, D.J., El‒Mkami, H., Smith, G.M., Nause, J., Summers C.J., Ferguson I.T. (2007), Transition metal and rare earth‒doped ZnO: a comparison of optical, magnetic, and structural behavior of bulk and thin films, Zinc Oxide Materials and Devices II, Proceedings of SPIE, Article number: 64741Q.
11. Frieiro, J.L., Guillaume, C., Lopez‒Vidrier, J., Blazquez, O., Gonzalez‒Torres, S., Labbe, C., Hernandez, S., Portier, X., Garrido, B. (2020), Toward RGB LEDs based on rare earth‒doped ZnO, Nanotechnology, 31(46), Article number: 465207.
12. Gezgin, B. (2021), Production of N‒ZnO/P‒Si Heterojunction Diode Structures and Determination of Electrical Characteristics Depending on the Thickness of the ZnO Thin Film under the Illumination and Dark Environments, Master thesis, The Graduate School of Natural and Applied Science of Selçuk University, Konya.
13. Gottardi, G., Pandiyan, R., Micheli, V., Pepponi, G., Gennaro, S., Bartali, R., Laidani, N. (2013), Effect of Nd3+ incorporation on the microstructure and chemical structure of RF sputtered ZnO thin films, Materials Science and Engineering B‒Advanced Functional Solid‒State Materials, 178(9), 609‒616.
14. İpek, Y. (2015), Development of Electrochemical Sensors for Pesticide Detection, PhD Thesis, Institute for Graduate Studies in Pure and Applied Sciences, Marmara Univ., İstanbul.
15. Kayani, Z.N., Chaudhry, T., Riaz, S., Naseem S. (2020), Dielectric and magnetic properties of rare‒earth metal Ce‒doped ZnO thin films, Journal of Electronic Materials, 49(5), 3114‒3123.
16. Kung, S., Sreenivas, K. (2016), Defect free C-axis oriented zinc oxide (ZnO) films grown at room temperature using RF magnetron sputtering, AIP Conference Proceedings, 1731.
17. Llusca, M., Lopez‒Vidrier, J., Antony, A., Hernandez, S., Garrido, B., Bertomeu, J. (2014), Up‒conversion effect of Er‒ and Yb‒doped ZnO thin films, Thin Solid Films, 562, 456‒461.
18. Luo, Q., Wang, L.S., Guo, H.Z., Lin, K.Q., Chen, Y., Yue, G.H., Peng D.L. (2012), Blue luminescence from Ce‒doped ZnO thin films prepared by magnetron sputtering, Applied Physics A‒Materials Science & Processing, 108(1), 239‒245.
19. Manikandan, A., Manikandan, E., Meenatchi, B., Vadivel, S., Jaganathan, S.K., Ladchumananandasivam, R., Henini, M., Maaza, M., Aanand, J.S. (2017), Rare earth element (REE) lanthanum doped zinc oxide (La:ZnO) nanomaterials: Synthesis structural optical and antibacterial studies, Journal of Alloys and Compounds, 723, 1155‒1161.
20. Minami, T., Yamamoto, T., Miyata, T. (2000), Highly transparent and conductive rare earth-doped ZnO thin films prepared by magnetron sputtering, Thin Solid Films, 366(1–2), 63–68.
21. Mundra, S.S., Pardeshi, S.S., Bhavikatti, S.S., Nagras, A. (2021), Development of an integrated physical vapour deposition and chemical vapour deposition system, Materials Today: Proceedings, ISSN 2214‒7853.
22. Özer, F.B. (2007), Surface Modification of Titanium and Its Alloys by Sol-‒Gel Dip Method, Master Thesis, I.T.U., Institute of Science and Technology, Istanbul.
23. Petersen, J., Brimont, C., Gallart, M., Schmerber, G., Gilliot, P., Ulhaq‒Bouillet, C., Rehspringer, J.L., Colis, S., Becker, C., Sloui, A., Dinia A. (2010), Correlation of structural properties with energy transfer of Eu‒doped ZnO thin films prepared by sol‒gel process and magnetron reactive sputtering, Journal of Applied Physics, 107(12), Article Number:123522.
24. Pierre, A.C. (1998), Introduction to Sol‒Gel Processing, Boston, Dordrecht, London: Kluwer Academic Publishers.
25. Siraj, K., Hashmi, J.Z., Naseem, S., Rafique, M.S., Shaukat, S. (2015), Microstructure and optical properties of rare‒earth doped ZnO thin films, Materials Today‒Proceedings, 2(10), 5365‒5372. Smallman, R.E., Ngan, A.H.W. (2007), Physical Metallurgy and Advanced Materials, Seventh Edition, pp. 672, UK: Butterworth‒Heinemann.
26. Soumahoro, I., Schmerber, G., Douayar, A., Colis, S., Abd‒Lefdil, M., Hassanain, N., Berrada, A., Muller, D., Slaoui, A., Rinnert H., Dinia A. (2011), Structural, optical, and electrical properties of Yb‒doped ZnO thin films prepared by spray pyrolysis method, Journal of Applied Physics, 109(3), Article Number: 033708.
27. Sönmezoğlu, S., Koç, M., Akın, S. (2012), Thin film production techniques, Erciyes University Journal of the Institute of Science, 28(5), 389‒401.
28. Şener, E. (2019), The Investigation of the Effect of the Annealing Temperature and the Nickel Doping on the Structural and Optical Properties of ZnO Thin Films, Master thesis, Atatürk University Graduate School of Natural and Applied Science Department of Nanoscience and Nanoengineering Department of Nanomaterials, Erzurum.
29. Toygun, Ş., Köneçoğlu, G., Kalpaklı, Y. (2013), General Principles of Sol–Gel, Sigma, 31, 456‒476. Türhan, İ. (2000), Preparation and Characterization of TiO2 and Doped TiO2 Thin Films, Master Thesis, I.T.U. Institute of Science and Technology, Istanbul.
30. Türküz, M.C. (2006), Investigation and Optimization of Coating Parameters of Zirconium Nitride Thin Film Coating Made by Physical Vapor Deposition Method, Ph.D., Istanbul Technical University, Institute of Science and Technology.
31. Üzar N. (2018), Investigation of detailed physical properties and solar cell performances of various type rare earth elements doped ZnO thin films, Journal of Materials Science‒Materials in Electronics, 29(12), 10471‒10479.
32. Vettumperumal, R., Kalyanaraman, S., Thangavel R. (2015), Optical constants and near infrared emission of Er doped ZnO sol‒gel thin films, Journal of Luminescence, 158, 493‒500.