SAW Cihazları için Bir LTspice Benzetim Modeli

Abstract

Bu çalışma ile, düz interdijital dönüştürücülere sahip Yüzey Akustik Dalgası (SAW) cihazlarının eksiksiz bir devre modeli sunulmaktadır. Bu eşdeğer devre LTspice kullanılarak uygulanabilir ve nihai SAW cihazı tasarımının elektriksel tepkisi ve devre üzerindeki etkilerini görmek için kullanılabilr. Önerilen model, SAW cihazı tasarım özelliklerinin kolaylıkla değiştirilmesine olanak sağlar. ÇAlışmada 13-parmak-IDT elektrodu içeren, iki portlu bir Yüzey Akustik Dalgası cihazı imal edilmiş ve bir vektör ağ analizörü kullanılarak elektriksel karakterizasyonu incelenmiştir. Test sonuçları daha sonra doğrulama için eşdeğer devrelerin simülasyon çıktı sonuçlarıyla karşılaştırılmıştır. Sonuçlar, geniş bir frekans aralığı için deneysel ve simülasyon sonuçları arasında kabul edilebilir bir uyum göstermektedir. Bu makale, üretimden önce bir SAW cihazının elektriksel tepkisini belirlemek için eşdeğer bir LTSpice modeli oluşturmak için kolay bir yöntem sunmaktadır. Ayrıca, modelin LTSPICE aracı kullanılarak SAW cihazları içeren devrelerin davranışını simüle etmek için de kullanım potansiyeli ortaya konulmuştur.

Keywords

• SAW cihazı
• LTSPICE modeli
• SAW Filtresi
• Eşdeğer Devre

A Complete LTspice Simulation Model for SAW Devices

Abstract

A complete circuit model of Surface Acoustic Wave (SAW) devices with straight interdigital transducers is presented. This equivalent circuit can be implemented in LTspice and contains variable design characteristics that can be easily changed to see their effect on the electrical response of the final SAW device design. Later a two port Surface Acoustic Wave device with 13-finger-IDT electrodes is fabricated and its electrical characterization is examined using a vector network analyzer. The test results are then compared with the equivalent circuits’ simulation output results for the verification. The results show an acceptable agreement between the experimental and simulation results for a wide frequency range. This paper offers an easy method to create an equivalent LTSpice model to determine the electrical response of a SAW device before fabrication. The model can also be used to simulate the behaviour of the circuits containing SAW devices using LTSPICE tool.

Keywords

• SAW Device
• LTSpice model
• SAW Filter
• Equivalent circuit

References

1. [1] Rayleigh, L. (1885). On Waves Propagated along the Plane Surface of an Elastic Solid. Proceedings of the London Mathematical Society, s1-17(1), 4–11. https://doi.org/10.1112/plms/s1-17.1.4
2. [2] Stoneley, R. (1924). Elastic waves at the surface of separation of two solids. Proceedings of the Royal Society of London, 106(738), 416–428. https://doi.org/10.1098/rspa.1924.0079
3. [3] Ingebrigsten K.A.,(1967). Elastic surface waves in piezoelectrics and their coupling to carriers in an adjoining semiconductor. Elab Rept TE-94 Norwegian Institute of technology, Trondheim, Norway., 1(1).
4. [4] Strauss, W. A. (1965). Magnetoelastic waves in yttrium iron garnet. Journal of Applied Physics, 36(1), 118–123. https://doi.org/10.1063/1.1713856
5. [5] Fall, D., Duquennoy, M., Ouaftouh, M., Piwakowski, B., & Jenot, F. (2018). Effective and rapid technique for temporal response modeling of surface acoustic wave interdigital transducers. Ultrasonics, 82, 371–378. https://doi.org/10.1016/j.ultras.2017.09.018
6. [6] Kamal, A., Ali, M. a. A., Faris, M., Monzer, O., & Mostafa, H. (2020). Design and analysis of Multi-Port SAW MEMS resonators. 2020 9th International Conference on Modern Circuits and Systems Technologies (MOCAST),1-4. https://doi.org/10.1109/mocast49295.2020.9200258
7. [7] Pennuri, D., et al. (2003). A Circuit Simulation Component Model For RF Surface Acoustic Wave Devices. In S3 2003 Symposium (Motorola).
8. [8] Hagmann, M. J. (2019). Analysis and equivalent circuit for accurate wideband calculations of the impedance for a piezoelectric transducer having loss. AIP Advances, 9(8), 085313.

9. [9] Yazdani, M. A., & Sısman, A. (2020). A novel numerical model to simulate acoustofluidic particle manipulation. Phys. Scr., 95, 095002.
10. [10] Elsherbini, et al. (2016). Finite Element Method Simulation for SAW Resonator-Based Sensors. International Electrical Engineering Journal (IEEJ), 7(2), 2167-2172.
11. [11] Mason, W. P. (1942). Electromechanical Transducers and Wave Filters. New York.
12. [12] Smith, W. R., Gerard, H. M., Collins, J. H., Reeder, T. M., & Shaw, H. J. (1969). Analysis of Interdigital Surface Wave Transducers by Use of an Equivalent Circuit Model. IEEE Transactions on Microwave Theory and Techniques, MTT-17(11).
13. [13] Berlincourt, D. A., Curran, D. R., & Jaffe, H. (1964). In W. P. Mason (Ed.), Physical Acoustics (Vol. 1A, pp. 233-242). New York: Academic Press.
14. [14] Hoang, T. (2011). SAW Parameters Analysis and equivalent circuit of SAW device. In InTech eBooks. https://doi.org/10.5772/19910
15. [15] Mishra, D., Hussain, D. M. A., Dhankar, M., Singh, A., & Dabas, S. (2016). Interdigital Transducer Modeling through Mason Equivalent Circuit Model Design and Simulation.
16. [16] Ryder, J. D. (1964). Networks, Lines, and Fields. Asia Publishing House, pp. 80-88.
17. [17] Parker, T. E., Montress, G. K. (1988, May). Precision Surface Acoustic Wave (SAW) Oscillator.
18. [18] Huang, H., Paramo, D. (2011, December). Broadband Electrical Impedance Matching for Piezoelectric Ultrasound Transducer.
19. [19] Fall, D., Duquennoy, M., Ouaftouh, M., Piwakowski, B., & Jenot, F. (2015). Modelling based on Spatial Impulse Response Model for Optimization of Inter Digital Transducers (SAW Sensors) for Non Destructive Testing. Physics Procedia, 70, 927–931. https://doi.org/10.1016/j.phpro.2015.08.192
20. [20] Hartmann, C. S., Bell, D. T., & Rosenfeld, R. C. (1973). Impulse Model Design of Acoustic Surface-Wave Filters. IEEE Transactions on Microwave Theory and Techniques, 21(4), 162-175. doi:10.1109/TMTT.1973.112
21. [21] Lakin, K. M., Joseph, T., & Penunuri, D. (1974, November). Planar Surface Acoustic Wave Resonator. Ultrasonic Symposium Proceedings, IEEE, 1, 263-267.
22. [22] Wilson, W. C., & Atkinson, G. M. (2006, October). Mixed modeling of a SAW delay line using VHDL.
23. [23] Fu, Q., Fischer, W., & Stab, H. (2003, May). Simulate Surface Acoustic Wave Devices Using VHDL-ALM.
24. [24] Krairojananan, T., & Redwood, M. (1971, February). Equivalent electrical circuits of interdigital transducers for piezoelectric generation and detection of Rayleigh waves. Proceedings of the Institution of Electrical Engineers, 118(2), 305-310.
25. [25] Engen, H. (1969, April). Excitation of Elastic Surface Wave by Spatial Harmonics of Interdigital Transducers. Norwegian Institute of Technology, Trondheim, Norway.
26. [26] Weis, R. S., & Gaylord, T. K. (1985, March). Lithium Niobate: Summary of Physical Properties and Crystal Structure. School of Electrical Engineering, Georgia Institute of Technology, Atlanta, GA.
27. [27] Hage-Ali, C. S., et al. (2020). FEM Modeling of the Temperature Influence on the Performance of SAW Sensors Operating at GigaHertz Frequency Range and at High Temperature Up to 500°C. Sensors, 20(15), 4166. doi:10.3390/s20154166.
28. [28] Hickemell, F. S., et al. (1995). The surface acoustic wave propagation characteristics of 64° Y-X LiNbO₃ and 36° Y-X LiTaO₃ substrates with thin-film SiO₂. In 1995 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Vol. 1, pp. 345-348).