Research Article
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Investigation of the effect of oxygen flow modulation on ITO film properties to improve the performance of SHJ solar cells

Year 2024, Volume: 13 Issue: 3, 1027 - 1033, 15.07.2024

Emre Kartal , Furkan Güçlüer , Elif Damgacı , Ali Ogün Sarp , Ayşe Seyhan , Yüksel Kaplan

https://doi.org/10.28948/ngumuh.1461409

Abstract

Photovoltaic technology offers a sustainable solution for the growing energy needs of the world, while reducing environmental impact. Transparent Conductive Oxides (TCOs), which are essential in photovoltaic technology, offer high light transmittance and effective charge carrier extraction. This research focuses on the impact of oxygen (O2) flow rates in the deposition of indium tin oxide (ITO) films on n-type crystalline silicon (c-Si) substrates by DC magnetron sputtering. The structural, optical, and electrical properties were analyzed. Based on the results, the optimal O2 ratio was determined and used in the fabrication of SHJ solar cells, achieving an efficiency of 18.6%.

Keywords

Silicon heterojunction (SHJ) solar cell DC magnetron sputtering Transparent conductive oxides (TCOs) indium tin oxide (ITO).

Project Number

20AG002 ve 20AG014

References

  • T. Damgacı, Küreselleşme Sürecinin Havayolu Ulaştırmasına Etkileri: Küresel Havayolu İş Birlikleri. in: H.A. Kutlu (Ed.), Sosyal, Beşeri ve İdari Bilimler Alanında Gelişmeler 4, Platanus Publishing, pp. 229-252, Ankara, 2023.
  • J. Khan and M. H. Arsalan, Solar power technologies for sustainable electricity generation–A review. Renewable and Sustainable Energy Reviews, 55, 414-425, 2016. https://doi.org/10.1016/j.rser.2015.10.135
  • K. O. Ukoba and F. L. Inambao, Study of optoelectronic properties of nanostructured TiO2/NiO heterojunction solar cells. Proceedings of the World Congress on Engineering and Computer Science, 1, 2018. https://doi.org/10.1016/j.conbuildmat.2020.11996
  • A. Shrestha, G. Mizuno, P. Oduor, R. Olah, S. Islam, A. K. Dutta and N. K. Dhar, High efficiency c-Si solar cells utilizing light-trapping phenomenon. Energy Harvesting and Storage: Materials, Devices, and Applications VI, 9493, pp. 75-81, 2015. https://doi.org/10.1117/12.2183411
  • A. Yadav, G. Singh, R. Nekovei and R. Jeyakumar, c-Si solar cells formed from spin-on phosphoric acid and boric acid. Renewable Energy, 80, 80-84, 2015. https://doi.org/10.1016/j.renene.2015.01.055
  • S. Calnan and A. N. Tiwari, High mobility transparent conducting oxides for thin film solar cells. Thin Solid Films, 518(7), 1839-1849, 2010. https://doi.org/10.1016/j.tsf.2009.09.044
  • A. Varanytsia, L. Weng, T. C. Lin, J. Yang and L. C. Chien, High-performance and low-cost aluminum zinc oxide and gallium zinc oxide electrodes for liquid crystal displays. Journal of Display Technology, 12(10), 1033-1039, 2016. https://doi.org/10.1119/jdt.2016.2584779
  • A. Ambrosini, A. Duarte, K. R. Poeppelmeier, M. Lane, C. R. Kannewurf and T. O. Mason, Electrical, optical, and structural properties of tin-doped In2O3–M2O3 solid solutions (M= Y, Sc). Journal of Solid State Chemistry, 153(1), 41-47, 2000. https://doi.org/10.1006/jssc.2000.8737
  • J. M. Gaskell and D. W. Sheel, Deposition of indium tin oxide by atmospheric pressure chemical vapour deposition. Thin Solid Films, 520(12), 4110-4113, 2012. https://doi.org/10.1016/j.tsf.2011.04.191
  • M. J. Alam and D. C. Cameron, Optical and electrical properties of transparent conductive ITO thin films deposited by sol–gel process. Thin Solid Films, 377, 455-459, 2000. https://doi.org/10.1016/S0040-6090(00)01369-9
  • H. N. Cui, V. Teixeira, L. J. Meng, R. Martins and E. Fortunato, Influence of oxygen/argon pressure ratio on the morphology, optical and electrical properties of ITO thin films deposited at room temperature. Vacuum, 82(12), 1507-1511, 2008. https://doi.org/10.1016/j.vacuum.2008.03.061
  • A. Iljinas, I. Mockevičius, M. Andrulevičius, Š. Meškinis and S. Tamulevičius, Growth of ITO thin films by magnetron sputtering: OES study, optical and electrical properties. Vacuum, 83, S118-S120, 2009. https://doi.org/10.1016/j.vacuum.2009.01.040
  • S. Q. Hussain, S. Kim, S. Ahn, N. Balaji, Y. Lee, J. H. Lee and J. Yi, Influence of high work function ITO: Zr films for the barrier height modification in a-Si: H/c-Si heterojunction solar cells. Solar Energy Materials and Solar Cells, 122, 130-135, 2014. https://doi.org/10.1016/j.solmat.2013.11.031
  • Y. Demirhan, H. Koseoglu, F. Turkoglu, Z. Uyanik, M. Ozdemir, G. Aygun and L. Ozyuzer, The controllable deposition of large area roll-to-roll sputtered ito thin films for photovoltaic applications. Renewable Energy, 146, 1549-1559, 2020. https://doi.org/10.1016/j.renene.2019.07.038
  • S. Boycheva, A. K. Sytchkova, M. L. Grilli and A. Piegari, Structural, optical and electrical peculiarities of rf plasma sputtered indium tin oxide films. Thin Solid Films, 515(24), 8469-8473, 2007. https://doi.org/10.1016/j.tsf.2007.03.165
  • M. Shakiba, A. Kosarian and E. Farshidi, Effects of processing parameters on crystalline structure and optoelectronic behavior of DC sputtered ITO thin film. Journal of Materials Science: Materials in Electronics, 28, 787-797, 2017. https://doi.org/10.1007/s10854-016-5591-1
  • A. Seyhan and E. Kartal, Optical, Electrical and Structural Properties of ITO/IZO and IZO/ITO Multilayer Transparent Conductive Oxide Films Deposited via Radio frequency Magnetron Sputtering. Coatings, 13(10), 1719, 2023. https://doi.org/10.3390/coatings13101719
  • E. Kartal, İ. Duran, E. Damgaci and A. Seyhan, Investigation of Structural, Optical, and Electrical Properties of ITO Films Deposited at Different Plasma Powers: Enhanced Performance and Efficiency in SHJ Solar Cells. Eurasian Journal of Science Engineering and Technology, 4(1), 25-35, 2023. https://doi.org/10.55696/ejset.1297942
  • S. Parthiban, E. Elangovan, K. Ramamurthi, D. Kanjilal, K. Asokan, R. Martins and E. Fortunato, Effect of Li3+ heavy ion irradiation on the Mo doped In2O3 thin films prepared by spray pyrolysis technique. Journal of Physics D: Applied Physics, 44(8), 085404, 2011. https://doi.org/10.1088/0022-3727/44/8/085404
  • M. N. Rezaie, N. Manavizadeh, F. D. Nayeri, M. M. Bidgoli, E. Nadimi and F. A. Boroumand, Effect of seed layers on low-temperature, chemical bath deposited ZnO nanorods-based near UV-OLED performance. Ceramics International, 44(5), 4937-4945, 2018. https://doi.org/10.1016/j.ceramint.2017.12.086
  • M. Thirumoorthi and J. T. J. Prakash, Structural, morphological characteristics and optical properties of Y doped ZnO thin films by sol–gel spin coating method. Superlattices and Microstructures, 85, 237-247, 2015. https://doi.org/10.1016/j.spmi.2015.05.005
  • K. Mageshwari and R. Sathyamoorthy, Physical properties of nanocrystalline CuO thin films prepared by the SILAR method. Materials Science in Semiconductor Processing, 16(2), 337-343, 2013. https://doi.org/10.1016/j.mssp.2012.09.016
  • P. Sarker, S. K. Sen, M. N. H. Mia, M. F. Pervez, A. A. Mortuza, S. Hossain and M. A. M. Chowdhury, Effect of gamma irradiation on structural, morphological and optical properties of thermal spray pyrolysis deposited CuO thin film. Ceramics International, 47(3), 3626-3633, 2021. https://doi.org/10.1016/j.ceramint.2020.09.211
  • K. Zhang, F. Zhu, C. H. A. Huan and A. T. S. Wee, Indium tin oxide films prepared by radio frequency magnetron sputtering method at a low processing temperature. Thin Solid Films, 376(1-2), 255-263, 2000. https://doi.org/10.1016/S0040-6090(00)01418-8
  • K. Kacha, F. Djeffal, H. Ferhati, L. Foughali, A. Bendjerad, A. Benhaya and A. Saidi, Efficiency improvement of CIGS solar cells using RF sputtered TCO/Ag/TCO thin-film as prospective buffer layer. Ceramics International, 20194-20200, 2022. https://doi.org/10.1016/j.ceramint.2022.03.298
  • B. Aïssa, Y. Zakaria, A. A. Abdallah, M. M. Kivambe, A. Samara, A. R. Shetty and C. Ballif, Impact of the Oxygen Flow during the Magnetron Sputtering Deposition on the Indium Tin Oxide thin films for Silicon Heterojunction Solar Cell. In 2019 IEEE 46th Photovoltaic Specialists Conference (PVSC), pp. 2659-2666, IEEE, 2019. https://doi.org/10.1109/PVSC40753.2019.8980906
  • W. Gong, G. Wang, Y. Gong, L. Zhao, L. Mo, H. Diao and W. Wang, Investigation of In2O3: SnO2 films with different doping ratio and application as transparent conducting electrode in silicon heterojunction solar cell. Solar Energy Materials and Solar Cells, 111404, 2022. https://doi.org/10.1016/j.solmat.2021.111404
  • A. Chen and K. Zhu, Effects of TCO work function on the performance of TCO/n-Si hetero-junction solar cells. Solar Energy, 195-201, 2014. https://doi.org/10.1016/j.solener.2014.06.005

SHJ güneş hücrelerinin performansını artırmak için oksijen akış modülasyonunun ITO film özellikleri üzerine etkisinin araştırılması

Year 2024, Volume: 13 Issue: 3, 1027 - 1033, 15.07.2024

Emre Kartal , Furkan Güçlüer , Elif Damgacı , Ali Ogün Sarp , Ayşe Seyhan , Yüksel Kaplan

https://doi.org/10.28948/ngumuh.1461409

Abstract

Fotovoltaik teknolojisi, dünyanın artan enerji ihtiyaçlarına sürdürülebilir bir çözüm sunarken çevresel etkiyi de azaltmaktadır. Fotovoltaik teknolojide önemli olan şeffaf iletken oksitler (TCO'lar), yüksek ışık geçirgenliği ve etkili yük taşıyıcı ekstraksiyonu sunar. Bu araştırma, DC magnetron püskürtme ile n-tipi kristal silisyum (c-Si) alt tabakalar üzerine indiyum kalay oksit (ITO) filmlerin biriktirilmesinde oksijen (O2) akış hızlarının etkisine odaklanmaktadır. Yapısal, optik ve elektriksel özellikler analiz edilmiştir. Elde edilen sonuçlara dayanarak, optimum O2 oranı belirlenmiş ve SHJ güneş pillerinin üretiminde kullanılarak %18,6'lık bir verimlilik elde edilmiştir.

Keywords

Silisyum heteroeklem (SHJ) güneş hücresi DC magnetron püskürtme Şeffaf iletken oksitler (TCO indiyum kalay oksit (ITO).

Supporting Institution

TÜBITAK

Project Number

20AG002 ve 20AG014

Thanks

This work is supported by the Scientific and Technological Research Council of Turkey (TÜBITAK) under grant numbers 20AG002 and 20AG014.

References

  • T. Damgacı, Küreselleşme Sürecinin Havayolu Ulaştırmasına Etkileri: Küresel Havayolu İş Birlikleri. in: H.A. Kutlu (Ed.), Sosyal, Beşeri ve İdari Bilimler Alanında Gelişmeler 4, Platanus Publishing, pp. 229-252, Ankara, 2023.
  • J. Khan and M. H. Arsalan, Solar power technologies for sustainable electricity generation–A review. Renewable and Sustainable Energy Reviews, 55, 414-425, 2016. https://doi.org/10.1016/j.rser.2015.10.135
  • K. O. Ukoba and F. L. Inambao, Study of optoelectronic properties of nanostructured TiO2/NiO heterojunction solar cells. Proceedings of the World Congress on Engineering and Computer Science, 1, 2018. https://doi.org/10.1016/j.conbuildmat.2020.11996
  • A. Shrestha, G. Mizuno, P. Oduor, R. Olah, S. Islam, A. K. Dutta and N. K. Dhar, High efficiency c-Si solar cells utilizing light-trapping phenomenon. Energy Harvesting and Storage: Materials, Devices, and Applications VI, 9493, pp. 75-81, 2015. https://doi.org/10.1117/12.2183411
  • A. Yadav, G. Singh, R. Nekovei and R. Jeyakumar, c-Si solar cells formed from spin-on phosphoric acid and boric acid. Renewable Energy, 80, 80-84, 2015. https://doi.org/10.1016/j.renene.2015.01.055
  • S. Calnan and A. N. Tiwari, High mobility transparent conducting oxides for thin film solar cells. Thin Solid Films, 518(7), 1839-1849, 2010. https://doi.org/10.1016/j.tsf.2009.09.044
  • A. Varanytsia, L. Weng, T. C. Lin, J. Yang and L. C. Chien, High-performance and low-cost aluminum zinc oxide and gallium zinc oxide electrodes for liquid crystal displays. Journal of Display Technology, 12(10), 1033-1039, 2016. https://doi.org/10.1119/jdt.2016.2584779
  • A. Ambrosini, A. Duarte, K. R. Poeppelmeier, M. Lane, C. R. Kannewurf and T. O. Mason, Electrical, optical, and structural properties of tin-doped In2O3–M2O3 solid solutions (M= Y, Sc). Journal of Solid State Chemistry, 153(1), 41-47, 2000. https://doi.org/10.1006/jssc.2000.8737
  • J. M. Gaskell and D. W. Sheel, Deposition of indium tin oxide by atmospheric pressure chemical vapour deposition. Thin Solid Films, 520(12), 4110-4113, 2012. https://doi.org/10.1016/j.tsf.2011.04.191
  • M. J. Alam and D. C. Cameron, Optical and electrical properties of transparent conductive ITO thin films deposited by sol–gel process. Thin Solid Films, 377, 455-459, 2000. https://doi.org/10.1016/S0040-6090(00)01369-9
  • H. N. Cui, V. Teixeira, L. J. Meng, R. Martins and E. Fortunato, Influence of oxygen/argon pressure ratio on the morphology, optical and electrical properties of ITO thin films deposited at room temperature. Vacuum, 82(12), 1507-1511, 2008. https://doi.org/10.1016/j.vacuum.2008.03.061
  • A. Iljinas, I. Mockevičius, M. Andrulevičius, Š. Meškinis and S. Tamulevičius, Growth of ITO thin films by magnetron sputtering: OES study, optical and electrical properties. Vacuum, 83, S118-S120, 2009. https://doi.org/10.1016/j.vacuum.2009.01.040
  • S. Q. Hussain, S. Kim, S. Ahn, N. Balaji, Y. Lee, J. H. Lee and J. Yi, Influence of high work function ITO: Zr films for the barrier height modification in a-Si: H/c-Si heterojunction solar cells. Solar Energy Materials and Solar Cells, 122, 130-135, 2014. https://doi.org/10.1016/j.solmat.2013.11.031
  • Y. Demirhan, H. Koseoglu, F. Turkoglu, Z. Uyanik, M. Ozdemir, G. Aygun and L. Ozyuzer, The controllable deposition of large area roll-to-roll sputtered ito thin films for photovoltaic applications. Renewable Energy, 146, 1549-1559, 2020. https://doi.org/10.1016/j.renene.2019.07.038
  • S. Boycheva, A. K. Sytchkova, M. L. Grilli and A. Piegari, Structural, optical and electrical peculiarities of rf plasma sputtered indium tin oxide films. Thin Solid Films, 515(24), 8469-8473, 2007. https://doi.org/10.1016/j.tsf.2007.03.165
  • M. Shakiba, A. Kosarian and E. Farshidi, Effects of processing parameters on crystalline structure and optoelectronic behavior of DC sputtered ITO thin film. Journal of Materials Science: Materials in Electronics, 28, 787-797, 2017. https://doi.org/10.1007/s10854-016-5591-1
  • A. Seyhan and E. Kartal, Optical, Electrical and Structural Properties of ITO/IZO and IZO/ITO Multilayer Transparent Conductive Oxide Films Deposited via Radio frequency Magnetron Sputtering. Coatings, 13(10), 1719, 2023. https://doi.org/10.3390/coatings13101719
  • E. Kartal, İ. Duran, E. Damgaci and A. Seyhan, Investigation of Structural, Optical, and Electrical Properties of ITO Films Deposited at Different Plasma Powers: Enhanced Performance and Efficiency in SHJ Solar Cells. Eurasian Journal of Science Engineering and Technology, 4(1), 25-35, 2023. https://doi.org/10.55696/ejset.1297942
  • S. Parthiban, E. Elangovan, K. Ramamurthi, D. Kanjilal, K. Asokan, R. Martins and E. Fortunato, Effect of Li3+ heavy ion irradiation on the Mo doped In2O3 thin films prepared by spray pyrolysis technique. Journal of Physics D: Applied Physics, 44(8), 085404, 2011. https://doi.org/10.1088/0022-3727/44/8/085404
  • M. N. Rezaie, N. Manavizadeh, F. D. Nayeri, M. M. Bidgoli, E. Nadimi and F. A. Boroumand, Effect of seed layers on low-temperature, chemical bath deposited ZnO nanorods-based near UV-OLED performance. Ceramics International, 44(5), 4937-4945, 2018. https://doi.org/10.1016/j.ceramint.2017.12.086
  • M. Thirumoorthi and J. T. J. Prakash, Structural, morphological characteristics and optical properties of Y doped ZnO thin films by sol–gel spin coating method. Superlattices and Microstructures, 85, 237-247, 2015. https://doi.org/10.1016/j.spmi.2015.05.005
  • K. Mageshwari and R. Sathyamoorthy, Physical properties of nanocrystalline CuO thin films prepared by the SILAR method. Materials Science in Semiconductor Processing, 16(2), 337-343, 2013. https://doi.org/10.1016/j.mssp.2012.09.016
  • P. Sarker, S. K. Sen, M. N. H. Mia, M. F. Pervez, A. A. Mortuza, S. Hossain and M. A. M. Chowdhury, Effect of gamma irradiation on structural, morphological and optical properties of thermal spray pyrolysis deposited CuO thin film. Ceramics International, 47(3), 3626-3633, 2021. https://doi.org/10.1016/j.ceramint.2020.09.211
  • K. Zhang, F. Zhu, C. H. A. Huan and A. T. S. Wee, Indium tin oxide films prepared by radio frequency magnetron sputtering method at a low processing temperature. Thin Solid Films, 376(1-2), 255-263, 2000. https://doi.org/10.1016/S0040-6090(00)01418-8
  • K. Kacha, F. Djeffal, H. Ferhati, L. Foughali, A. Bendjerad, A. Benhaya and A. Saidi, Efficiency improvement of CIGS solar cells using RF sputtered TCO/Ag/TCO thin-film as prospective buffer layer. Ceramics International, 20194-20200, 2022. https://doi.org/10.1016/j.ceramint.2022.03.298
  • B. Aïssa, Y. Zakaria, A. A. Abdallah, M. M. Kivambe, A. Samara, A. R. Shetty and C. Ballif, Impact of the Oxygen Flow during the Magnetron Sputtering Deposition on the Indium Tin Oxide thin films for Silicon Heterojunction Solar Cell. In 2019 IEEE 46th Photovoltaic Specialists Conference (PVSC), pp. 2659-2666, IEEE, 2019. https://doi.org/10.1109/PVSC40753.2019.8980906
  • W. Gong, G. Wang, Y. Gong, L. Zhao, L. Mo, H. Diao and W. Wang, Investigation of In2O3: SnO2 films with different doping ratio and application as transparent conducting electrode in silicon heterojunction solar cell. Solar Energy Materials and Solar Cells, 111404, 2022. https://doi.org/10.1016/j.solmat.2021.111404
  • A. Chen and K. Zhu, Effects of TCO work function on the performance of TCO/n-Si hetero-junction solar cells. Solar Energy, 195-201, 2014. https://doi.org/10.1016/j.solener.2014.06.005
There are 28 citations in total.

Details

Primary Language English
Subjects Nanomanufacturing
Journal Section Research Articles
Authors

Emre Kartal 0000-0002-8602-2512

Furkan Güçlüer 0000-0002-8708-8994

Elif Damgacı 0000-0003-2119-1435

Ali Ogün Sarp 0000-0002-7904-1678

Ayşe Seyhan 0000-0001-8090-1404

Yüksel Kaplan 0000-0002-0186-6063

Project Number 20AG002 ve 20AG014
Early Pub Date July 10, 2024
Publication Date July 15, 2024
Submission Date March 29, 2024
Acceptance Date June 27, 2024
Published in Issue Year 2024 Volume: 13 Issue: 3

Cite

APA Kartal, E., Güçlüer, F., Damgacı, E., Sarp, A. O., et al. (2024). Investigation of the effect of oxygen flow modulation on ITO film properties to improve the performance of SHJ solar cells. Niğde Ömer Halisdemir Üniversitesi Mühendislik Bilimleri Dergisi, 13(3), 1027-1033. https://doi.org/10.28948/ngumuh.1461409
AMA Kartal E, Güçlüer F, Damgacı E, Sarp AO, Seyhan A, Kaplan Y. Investigation of the effect of oxygen flow modulation on ITO film properties to improve the performance of SHJ solar cells. NOHU J. Eng. Sci. July 2024;13(3):1027-1033. doi:10.28948/ngumuh.1461409
Chicago Kartal, Emre, Furkan Güçlüer, Elif Damgacı, Ali Ogün Sarp, Ayşe Seyhan, and Yüksel Kaplan. “Investigation of the Effect of Oxygen Flow Modulation on ITO Film Properties to Improve the Performance of SHJ Solar Cells”. Niğde Ömer Halisdemir Üniversitesi Mühendislik Bilimleri Dergisi 13, no. 3 (July 2024): 1027-33. https://doi.org/10.28948/ngumuh.1461409.
EndNote Kartal E, Güçlüer F, Damgacı E, Sarp AO, Seyhan A, Kaplan Y (July 1, 2024) Investigation of the effect of oxygen flow modulation on ITO film properties to improve the performance of SHJ solar cells. Niğde Ömer Halisdemir Üniversitesi Mühendislik Bilimleri Dergisi 13 3 1027–1033.
IEEE E. Kartal, F. Güçlüer, E. Damgacı, A. O. Sarp, A. Seyhan, and Y. Kaplan, “Investigation of the effect of oxygen flow modulation on ITO film properties to improve the performance of SHJ solar cells”, NOHU J. Eng. Sci., vol. 13, no. 3, pp. 1027–1033, 2024, doi: 10.28948/ngumuh.1461409.
ISNAD Kartal, Emre et al. “Investigation of the Effect of Oxygen Flow Modulation on ITO Film Properties to Improve the Performance of SHJ Solar Cells”. Niğde Ömer Halisdemir Üniversitesi Mühendislik Bilimleri Dergisi 13/3 (July 2024), 1027-1033. https://doi.org/10.28948/ngumuh.1461409.
JAMA Kartal E, Güçlüer F, Damgacı E, Sarp AO, Seyhan A, Kaplan Y. Investigation of the effect of oxygen flow modulation on ITO film properties to improve the performance of SHJ solar cells. NOHU J. Eng. Sci. 2024;13:1027–1033.
MLA Kartal, Emre et al. “Investigation of the Effect of Oxygen Flow Modulation on ITO Film Properties to Improve the Performance of SHJ Solar Cells”. Niğde Ömer Halisdemir Üniversitesi Mühendislik Bilimleri Dergisi, vol. 13, no. 3, 2024, pp. 1027-33, doi:10.28948/ngumuh.1461409.
Vancouver Kartal E, Güçlüer F, Damgacı E, Sarp AO, Seyhan A, Kaplan Y. Investigation of the effect of oxygen flow modulation on ITO film properties to improve the performance of SHJ solar cells. NOHU J. Eng. Sci. 2024;13(3):1027-33.
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