CALCULATION OF COVERAGE AND FLAKE SIZE OF MONOLAYERS GROWN BY CHEMICAL VAPOR DEPOSITION TECHNIQUE

Abstract

Two-dimensional (2D) materials such as transition metal dichalcogenides (TMDs) are prominent candidates to be utilized in integrated circuits. However, growing uniform and large-area 2D materials, specifically monolayers, that can be used in electronic component production is still one of the main challenges for these 2D materials to be incorporated in integrated circuits or other active device applications. The aim of this study is to demonstrate a practical and reliable MATLAB computational method, which calculates the ratio of the chemical vapor deposited monolayers to the whole substrate surface and the maximum area of the deposited flakes. In this study, we used the K-means clustering method to calculate surface coverage where we obtained accuracy of ~96% for the simple test images (single star and hexagonal shapes). For the multi-numbered and distributed shapes example, we achieved higher accuracy of ~98%. We also realized calculation of each flake area with ~99% accuracy indicating the flake with the maximum area. The practical calculation of the surface coverage ratio and flake size will allow for easy identification of the effects of the process parameters during novel material growth, which will pave way for future optoelectronic and electronic devices.

Keywords

• Two-dimensional materials
• Image processing
• Transition metal dichalcogenides
• Clustering algorithms

Kimyasal Buhar Biriktirme Tekniği ile Büyütülmüş Tek Katmanlı Yapıların Kaplama Oranı ve Yaprak Büyüklüğünün Hesaplanması

Abstract

Geçiş metal dikalkojenitleri (GMK'lar) gibi iki boyutlu (2B) malzemeler, entegre devrelerde kullanılmak için büyük bir potansiyele sahiptir. Bununla birlikte, elektronik bileşen üretiminde kullanılabilen tekdüze ve geniş alanlı 2B malzemelerin büyütülmesi, özellikle tek katlı yapıların, entegre devrelere veya diğer aktif cihaz uygulamalarına dahil edilmesi için hala ana zorluklardan biridir. Bu çalışmanın amacı, tek tabakalı yapılarla kaplanmış yüzeyin tüm alttaş yüzeyine oranını ve büyütülen pulların maksimum alanını hesaplayan pratik ve güvenilir bir MATLAB hesaplama yöntemini göstermektir. Bu çalışmada, yüzey kaplama oranını hesaplamak için K-ortalamalı kümeleme yöntemi kullanılmıştır, çalışma sonucunda basit test görüntüleri (tek yıldız ve tek altıgen şekilleri) için %~96 doğruluk oranı elde edilmiştir. Bununla birlikte içinde birden fazla şekil içeren test görüntülerinde %~98 doğruluk oranı elde edilmiştir. Ayrıca üretilen pulların alanının %~99 doğruluk oranıyla hesaplanması ve maksimum alanda büyütülen pulun bulunması gösterilmiştir. Yüzeyin kaplama oranı ve pul boyutu bilgilerinin pratik bir şekilde hesaplanması, gelecekteki optoelektronik ve elektronik uygulamalar için yeni malzeme büyütülmesi sırasında deney parametrelerinin yüzey kaplamasına etkisinin kolayca tanımlanmasını sağlayacaktır.

Keywords

• İki boyutlu malzemeler
• Görüntü işleme
• Geçiş metal kalkojenitleri
• Kümeleme algoritmaları

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