LORENTZ KUVVETİ TABANLI, TINLAYAN ve TİTREŞİM GENLİĞİ ÖLÇÜMÜ İLE ÇALIŞAN BİR MEMS MANYETOMETRE

Kıvanç Azgın

doi:10.17482/uumfd.325923

Research Article

LORENTZ KUVVETİ TABANLI, TINLAYAN ve TİTREŞİM GENLİĞİ ÖLÇÜMÜ İLE ÇALIŞAN BİR MEMS MANYETOMETRE

Year 2017, Volume: 22 Issue: 3, 61 - 80, 08.12.2017

Kıvanç Azgın

https://doi.org/10.17482/uumfd.325923

Abstract

Bu çalışmada titreşim genliği ölçümü ile çalışan
Lorentz kuvveti tabanlı ve algılayıcısı tınlaşan MEMS yük hücresi olan bir
manyetometre sunulmaktadır. Manyetometre, tarak elektrotlara sahip Çift Bağlı
Diyapazon (ÇBD) bir tınlatıcı ile, uçlarından ve ortalarından birbirlerine
bağlanmış kirişlerden oluşan bir ızgara yapısından oluşmaktadır. Izgara yapısı,
üzerinden geçen akımla Lorentz kuvvetini oluştururken, elektriksel direncin ve
yapının sıcaklığının yükselmesini engellemektedir. Maksimum hassasiyet için
yapının genlik frekans tepkisinin eğiminin en büyük olduğu tahrik frekansı seçilmiştir.
Manyetometre standart SOI (Yalıtkan-Üzeri-Silisyum) mikro-işleme teknikleri
kullanılarak 35µm yapısal kalınlıkla üretilmiştir. Yapılan frekans tepkisi
testinde ÇBD yapısının tınlaşım frekansının 63812,1 Hz ve 0,2 mTorr'daki kalite
faktörünün de 5950 olduğu belirlenmiştir. Testler yapıya dik olarak oluşturulan
30mT manyetik alan altında, 100mA ızgara akımı ve 70mV tahrik genliği ile
yapılmıştır. Manyetometrenin orantı katsayısı 113.7 mV/T ve duyarlılığı 965 µT/Hz^½ olarak ölçülmüştür.

Keywords

Manyetometre, ÇBD (Çift Bağlı Diyapazon), MEMS, Lorentz Kuvveti, Genlik Ölçüm

References

1. Azgin, K. ve Valdevit, L. (2013) The effects of tine coupling and geometrical imperfections on the response of DETF resonators, Journal of Micromechanics and Microengineering, 23, 125011-(1-12). DOI:10.1088/0960-1317/23/12/125011
2. Bahreyni, B. ve Shafai, C. (2005) A micromachined magnetometer with frequency modulation at the output, IEEE Sensors 2005, Irvine, 580-583. DOI: 10.1109/ICSENS.2005.1597765
3. Blom, F. R., Bouwstra, S., Fluitman, J. H. J. ve Elwenspoek, M. (1989) Resonating silicon beam force sensor, Sensors and Actuators, 17, 513-519. DOI:10.1016/0250-6874(89)80039-3
4. Brugger, S. ve Paul, O. (2008) Resonant magnetic microsensor with microT resolution, IEEE 21st International Conference on MEMS, Tucson, 944-947. DOI:10.1109/MEMSYS.2008.4443813
5. Chang, S. C., Putty, M. W., Hicks, D. B., Li, C. H. ve Howe, R. T. (1990) Resonant-bridge two-axis microaccelerometer, Sensors and Actuators A: Physical, 21, 342-345. DOI:10.1016/0924-4247(90)85068-F
6. Cheshmehdoost, A., Jones, B. E. ve O'Connor, B. (1991) Characteristics of a force transducer incorporating a mechanical DETF resonator, Sensors and Actuators A: Physical, 26, 307-312. DOI:10.1016/0924-4247(91)87009-R
7. DiLella, D., Whitman, L. J., Colton, R. J., Kenny, T. W., Kaiser, W. J., Vote, E. C., Podosek, J. A. ve Miller, L. M. (2000) A micromachined magnetic-field sensor based on an electron tunneling displacement transducer, Sensors and Actuators A: Physical, 86, 8-20. DOI:10.1016/S0924-4247(00)00303-4
8. Emmerich, H. ve Schofthaler, M. (2000) Magnetic field measurements with a novel surface micromachined magnetic-field sensor, Electron Devices, IEEE Transactions on, 47, 972-977. DOI:10.1109/16.841228
9. Erdem, U. (1982) Force and weight measurement, Journal of Physics E: Scientific Instruments, 15, 857-872.
10. Ettelt, D., Rey, P., Jourdan, G., Walther, A., Robert, P. and Delamare, J. (2013) 3D Magnetic Field Sensor Concept for Use in Inertial Measurement Units (IMUs), Microelectromechanical Systems, Journal of, 23(2), 324-333. DOI:10.1109/JMEMS.2013.2273362
11. Eyre, B., Pister, K. S. J., ve Kaiser, W. (1998) Resonant mechanical magnetic sensor in standard CMOS, Electron Device Letters, IEEE, 19, 496-498. DOI:10.1109/55.735758
12. Herrera-May, A. L., Garcia-Ramirez, P. J., Aguilera-Cortes, L. A., Figueras, E., Martinez-Castillo, J., Manjarrez, E., Sauceda, A., Garcia-Gonzalez, L. ve Juarez-Aguirre, R. (2010) Mechanical design and characterization of a resonant magnetic field microsensor with linear response and high resolution, Sensors and Actuators A: Physical, 165, 399-409. DOI:10.1016/j.sna.2010.07.005
13. Howe, R. T., Boser, B. E. ve Pisano, A. P. (1996) Polysilicon integrated microsystems: technologies and applications, Sensors and Actuators A: Physical, 56, 167-177. DOI:10.1016/0924-4247(96)01291-5
14. Jha, C. M., Salvia, J., Chandorkar, S. A., Melamud, R., Kuhl, E. ve Kenny, T. W. (2008) Acceleration insensitive encapsulated silicon microresonator, Applied Physics Letters, 93, 234103-(1-3). DOI:10.1063/1.3036536
15. Kadar, Z., Bossche, A., Sarro, P. M. ve Mollinger, J. R. (1998) Magnetic-field measurements using an integrated resonant magnetic-field sensor, Sensors and Actuators A: Physical, 70, 225-232. DOI:10.1016/S0924-4247(98)00143-5
16. Keplinger, F., Kvasnica, S., Jachimowicz, A., Kohl, F., Steurer, J. ve Hauser, H. (2004) Lorentz force based magnetic field sensor with optical readout, Sensors and Actuators A: Physical, 110, 112-118. DOI:10.1016/j.sna.2003.10.025
17. Kyynarainen, J., Saarilahti, J., Kattelus, H., Karkkainen, A., Meinander, T., Oja, A., Pekko, P., Seppa, H., Suhonen, M., Kuisma, H., Ruotsalainen, S. ve Tilli, M. (2008) A 3D micromechanical compass, Sensors and Actuators A: Physical, 142, 561-568. DOI:10.1016/j.sna.2007.08.025
18. Lee, J. E. Y., Bahreyni, B. ve Seshia, A. A. (2008) An axial strain modulated double-ended tuning fork electrometer, Sensors and Actuators A: Physical, 148, 395-400. DOI:10.1016/j.sna.2008.09.010
19. Mo, L., Rouf, V. T., Jaramillo, G. ve Horsley, D. A. (2013) MEMS Lorentz force magnetic sensor based on a balanced torsional resonator, Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), Barcelona, 66-69. DOI:10.1109/Transducers.2013.6626702
20. Myers, D. R., Cheng, K. B., Jamshidi, B., Azevedo, R. G., Senesky, D. G., Chen, L., Mehregany, M., Wijesundara, M. B. J. ve Pisano, A. P. (2009) Silicon carbide resonant tuning fork for microsensing applications in high-temperature and high G-shock environments, Journal of Micro/Nanolithography, MEMS and MOEMS, 8, 021116-(1-7). DOI:10.1117/1.3143192
21. Niarchos, D. (2003) Magnetic MEMS: key issues and some applications, Sensors and Actuators A: Physical, 109, 166-173. DOI:10.1016/S0924-4247(03)00179-1
22. Pala, S., Çiçek, M. ve Azgın, K (2016) A Lorentz force MEMS magnetometer, 2016 IEEE Sensors Conference, Orlando, 1-3. DOI: 10.1109/ICSENS.2016.7808507
23. Paros, J. M. (1973) Precision Digital Pressure Transducer, ISA Transactions, 12, 173-179.
24. Rodriguez, B. J., Callahan, C., Kalinin S. V. and Proksch, R (2007) Dual-frequency resonance-tracking atomic force microscopy, Nanotechnology, 18, 475504-(1-6). DOI:10.1088/0957-4484/18/47/475504
25. Roessig, T. A., Howe, R. T., Pisano, A. P. ve Smith, J. H. (1997) Surface-micromachined resonant accelerometer, International Conference on Solid State Sensors and Actuators, TRANSDUCERS '97, Chicago, 859-862. DOI:10.1109/SENSOR.1997.635237
26. Seshia, A. A., Howe, R. T. ve Montague, S. (2002) An integrated microelectromechanical resonant output gyroscope, The Fifteenth IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas, 722-726. DOI: 10.1109/MEMSYS.2002.984372
27. Tang, W. C., Nguyen T.-C. H. ve Howe, R. T. (1989) Laterally Driven Polysilicon Resonant Microstructures, Sensors and Actuators, 20, 25-32. DOI:10.1109/MEMSYS.1989.77961
28. Tilmans, H. A. C., Elwenspoek, M. ve Fluitman, J. H. J. (1992) Micro resonant force gauges, Sensors and Actuators A: Physical, 30, 35-53. DOI:10.1016/0924-4247(92)80194-8
29. Torrents, A., Azgin, K., Godfrey, S. W., Topalli, E. S., Akin, T. ve Valdevit, L. (2010) MEMS resonant load cells for micro-mechanical test frames: feasibility study and optimal design, Journal of Micromechanics and Microengineering, 20, 125004-(1-17). DOI:10.1088/0960-1317/20/12/125004
30. Ueda, T., Kohsaka, F. ve Ogita, E. (1985) Precision force transducers using mechanical resonators, Measurement, 3, 89-94. DOI:10.1016/0263-2241(85)90010-7
31. Van Mullem, C. J., Tilmans, H. A. C., Mouthaan, A. J. ve Fluitman, J. H. J. (1992) Electrical cross-talk in two-port resonators - the resonant silicon beam force sensor, Sensors and Actuators A: Physical, 31, 168-173. DOI:10.1016/0924-4247(92)80099-O
32. Wickenden, D. K., Champion, J. L., Osiander, R., Givens, R. B., Lamb, J. L., Miragliotta, J. A., Oursler, D. A. ve Kistenmacher, T. J. (2003) Micromachined polysilicon resonating xylophone bar magnetometer, Acta Astronautica, 52, 421-425. DOI:10.1016/S0094-5765(02)00183-2
33. Wojciechowski, K. E., Boser, B. E. ve Pisano, A. P. (2004) A MEMS resonant strain sensor operated in air, 17th IEEE International Conference on Micro Electro Mechanical Systems, Maastricht, 841-845. DOI: 10.1109/MEMS.2004.1290718
34. Yang, H. H., Myung N. V., Yee, J., Park, D. Y., Yoo, B. Y., Schwartz, M., Nobe, K., ve Judy, J. W. (2002) Ferromagnetic micromechanical magnetometer, Sensors and Actuators A: Physical, 97 ve 98, 88-97. DOI:10.1016/S0924-4247(01)00809-3
35. Yee, J. K., Yang, H. H. ve Judy, J. W. (2002) Dynamic response and shock resistance of ferromagnetic micromechanical magnetometers, The Fifteenth IEEE International Conference on Micro Electro Mechanical Systems, 2002, Las Vegas, 308-311. DOI: 10.1109/MEMSYS.2002.984264
36. Zulliger, H. R. (1983) Precise measurement of small forces, Sensors and Actuators, 4, 483-495. DOI:10.1016/0250-6874(83)85061-6

A Resonant MEMS Lorentz Force Based Magnetometer with Amplitude Detection

Year 2017, Volume: 22 Issue: 3, 61 - 80, 08.12.2017

Kıvanç Azgın

https://doi.org/10.17482/uumfd.325923

Abstract

This study presents a Lorentz force magnetometer based
on vibration amplitude detection with a resonant MEMS load cell structure as a
sensor. Magnetometer is composed of a DETF (Double-Ended Tuning Fork) resonator
with comb type electrode and a grill structure formed by beams connected from
their centers end ends. The grill structure reduces electrical resistance and prevents
overheating while generating the Lorentz force. For maximum sensitivity, the
maxima of the slope of the magnitude response is chosen for excitation
frequency. The proposed sensor is fabricated using a standard SOI
micromachining processes with a device layer thickness of 35 μm. The resonance
frequency of the DETF is measured to be 63812,1 Hz, Q-factor of 5950 at around
0.2 mTorr ambient pressure. Tests are done for 30 mT magnetic field normal to
the resonator plane, with the grill current of 100 mA and excitation amplitude
of 70mV. The scale factor of the magnetometer is measured to be 113.7 mV/T with
a resolution of 965 µT/Hz^½.

Keywords

Magnetometer, DETF, MEMS, Lorentz Force, Amplitude Detection

References

1. Azgin, K. ve Valdevit, L. (2013) The effects of tine coupling and geometrical imperfections on the response of DETF resonators, Journal of Micromechanics and Microengineering, 23, 125011-(1-12). DOI:10.1088/0960-1317/23/12/125011
2. Bahreyni, B. ve Shafai, C. (2005) A micromachined magnetometer with frequency modulation at the output, IEEE Sensors 2005, Irvine, 580-583. DOI: 10.1109/ICSENS.2005.1597765
3. Blom, F. R., Bouwstra, S., Fluitman, J. H. J. ve Elwenspoek, M. (1989) Resonating silicon beam force sensor, Sensors and Actuators, 17, 513-519. DOI:10.1016/0250-6874(89)80039-3
4. Brugger, S. ve Paul, O. (2008) Resonant magnetic microsensor with microT resolution, IEEE 21st International Conference on MEMS, Tucson, 944-947. DOI:10.1109/MEMSYS.2008.4443813
5. Chang, S. C., Putty, M. W., Hicks, D. B., Li, C. H. ve Howe, R. T. (1990) Resonant-bridge two-axis microaccelerometer, Sensors and Actuators A: Physical, 21, 342-345. DOI:10.1016/0924-4247(90)85068-F
6. Cheshmehdoost, A., Jones, B. E. ve O'Connor, B. (1991) Characteristics of a force transducer incorporating a mechanical DETF resonator, Sensors and Actuators A: Physical, 26, 307-312. DOI:10.1016/0924-4247(91)87009-R
7. DiLella, D., Whitman, L. J., Colton, R. J., Kenny, T. W., Kaiser, W. J., Vote, E. C., Podosek, J. A. ve Miller, L. M. (2000) A micromachined magnetic-field sensor based on an electron tunneling displacement transducer, Sensors and Actuators A: Physical, 86, 8-20. DOI:10.1016/S0924-4247(00)00303-4
8. Emmerich, H. ve Schofthaler, M. (2000) Magnetic field measurements with a novel surface micromachined magnetic-field sensor, Electron Devices, IEEE Transactions on, 47, 972-977. DOI:10.1109/16.841228
9. Erdem, U. (1982) Force and weight measurement, Journal of Physics E: Scientific Instruments, 15, 857-872.
10. Ettelt, D., Rey, P., Jourdan, G., Walther, A., Robert, P. and Delamare, J. (2013) 3D Magnetic Field Sensor Concept for Use in Inertial Measurement Units (IMUs), Microelectromechanical Systems, Journal of, 23(2), 324-333. DOI:10.1109/JMEMS.2013.2273362
11. Eyre, B., Pister, K. S. J., ve Kaiser, W. (1998) Resonant mechanical magnetic sensor in standard CMOS, Electron Device Letters, IEEE, 19, 496-498. DOI:10.1109/55.735758
12. Herrera-May, A. L., Garcia-Ramirez, P. J., Aguilera-Cortes, L. A., Figueras, E., Martinez-Castillo, J., Manjarrez, E., Sauceda, A., Garcia-Gonzalez, L. ve Juarez-Aguirre, R. (2010) Mechanical design and characterization of a resonant magnetic field microsensor with linear response and high resolution, Sensors and Actuators A: Physical, 165, 399-409. DOI:10.1016/j.sna.2010.07.005
13. Howe, R. T., Boser, B. E. ve Pisano, A. P. (1996) Polysilicon integrated microsystems: technologies and applications, Sensors and Actuators A: Physical, 56, 167-177. DOI:10.1016/0924-4247(96)01291-5
14. Jha, C. M., Salvia, J., Chandorkar, S. A., Melamud, R., Kuhl, E. ve Kenny, T. W. (2008) Acceleration insensitive encapsulated silicon microresonator, Applied Physics Letters, 93, 234103-(1-3). DOI:10.1063/1.3036536
15. Kadar, Z., Bossche, A., Sarro, P. M. ve Mollinger, J. R. (1998) Magnetic-field measurements using an integrated resonant magnetic-field sensor, Sensors and Actuators A: Physical, 70, 225-232. DOI:10.1016/S0924-4247(98)00143-5
16. Keplinger, F., Kvasnica, S., Jachimowicz, A., Kohl, F., Steurer, J. ve Hauser, H. (2004) Lorentz force based magnetic field sensor with optical readout, Sensors and Actuators A: Physical, 110, 112-118. DOI:10.1016/j.sna.2003.10.025
17. Kyynarainen, J., Saarilahti, J., Kattelus, H., Karkkainen, A., Meinander, T., Oja, A., Pekko, P., Seppa, H., Suhonen, M., Kuisma, H., Ruotsalainen, S. ve Tilli, M. (2008) A 3D micromechanical compass, Sensors and Actuators A: Physical, 142, 561-568. DOI:10.1016/j.sna.2007.08.025
18. Lee, J. E. Y., Bahreyni, B. ve Seshia, A. A. (2008) An axial strain modulated double-ended tuning fork electrometer, Sensors and Actuators A: Physical, 148, 395-400. DOI:10.1016/j.sna.2008.09.010
19. Mo, L., Rouf, V. T., Jaramillo, G. ve Horsley, D. A. (2013) MEMS Lorentz force magnetic sensor based on a balanced torsional resonator, Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), Barcelona, 66-69. DOI:10.1109/Transducers.2013.6626702
20. Myers, D. R., Cheng, K. B., Jamshidi, B., Azevedo, R. G., Senesky, D. G., Chen, L., Mehregany, M., Wijesundara, M. B. J. ve Pisano, A. P. (2009) Silicon carbide resonant tuning fork for microsensing applications in high-temperature and high G-shock environments, Journal of Micro/Nanolithography, MEMS and MOEMS, 8, 021116-(1-7). DOI:10.1117/1.3143192
21. Niarchos, D. (2003) Magnetic MEMS: key issues and some applications, Sensors and Actuators A: Physical, 109, 166-173. DOI:10.1016/S0924-4247(03)00179-1
22. Pala, S., Çiçek, M. ve Azgın, K (2016) A Lorentz force MEMS magnetometer, 2016 IEEE Sensors Conference, Orlando, 1-3. DOI: 10.1109/ICSENS.2016.7808507
23. Paros, J. M. (1973) Precision Digital Pressure Transducer, ISA Transactions, 12, 173-179.
24. Rodriguez, B. J., Callahan, C., Kalinin S. V. and Proksch, R (2007) Dual-frequency resonance-tracking atomic force microscopy, Nanotechnology, 18, 475504-(1-6). DOI:10.1088/0957-4484/18/47/475504
25. Roessig, T. A., Howe, R. T., Pisano, A. P. ve Smith, J. H. (1997) Surface-micromachined resonant accelerometer, International Conference on Solid State Sensors and Actuators, TRANSDUCERS '97, Chicago, 859-862. DOI:10.1109/SENSOR.1997.635237
26. Seshia, A. A., Howe, R. T. ve Montague, S. (2002) An integrated microelectromechanical resonant output gyroscope, The Fifteenth IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas, 722-726. DOI: 10.1109/MEMSYS.2002.984372
27. Tang, W. C., Nguyen T.-C. H. ve Howe, R. T. (1989) Laterally Driven Polysilicon Resonant Microstructures, Sensors and Actuators, 20, 25-32. DOI:10.1109/MEMSYS.1989.77961
28. Tilmans, H. A. C., Elwenspoek, M. ve Fluitman, J. H. J. (1992) Micro resonant force gauges, Sensors and Actuators A: Physical, 30, 35-53. DOI:10.1016/0924-4247(92)80194-8
29. Torrents, A., Azgin, K., Godfrey, S. W., Topalli, E. S., Akin, T. ve Valdevit, L. (2010) MEMS resonant load cells for micro-mechanical test frames: feasibility study and optimal design, Journal of Micromechanics and Microengineering, 20, 125004-(1-17). DOI:10.1088/0960-1317/20/12/125004
30. Ueda, T., Kohsaka, F. ve Ogita, E. (1985) Precision force transducers using mechanical resonators, Measurement, 3, 89-94. DOI:10.1016/0263-2241(85)90010-7
31. Van Mullem, C. J., Tilmans, H. A. C., Mouthaan, A. J. ve Fluitman, J. H. J. (1992) Electrical cross-talk in two-port resonators - the resonant silicon beam force sensor, Sensors and Actuators A: Physical, 31, 168-173. DOI:10.1016/0924-4247(92)80099-O
32. Wickenden, D. K., Champion, J. L., Osiander, R., Givens, R. B., Lamb, J. L., Miragliotta, J. A., Oursler, D. A. ve Kistenmacher, T. J. (2003) Micromachined polysilicon resonating xylophone bar magnetometer, Acta Astronautica, 52, 421-425. DOI:10.1016/S0094-5765(02)00183-2
33. Wojciechowski, K. E., Boser, B. E. ve Pisano, A. P. (2004) A MEMS resonant strain sensor operated in air, 17th IEEE International Conference on Micro Electro Mechanical Systems, Maastricht, 841-845. DOI: 10.1109/MEMS.2004.1290718
34. Yang, H. H., Myung N. V., Yee, J., Park, D. Y., Yoo, B. Y., Schwartz, M., Nobe, K., ve Judy, J. W. (2002) Ferromagnetic micromechanical magnetometer, Sensors and Actuators A: Physical, 97 ve 98, 88-97. DOI:10.1016/S0924-4247(01)00809-3
35. Yee, J. K., Yang, H. H. ve Judy, J. W. (2002) Dynamic response and shock resistance of ferromagnetic micromechanical magnetometers, The Fifteenth IEEE International Conference on Micro Electro Mechanical Systems, 2002, Las Vegas, 308-311. DOI: 10.1109/MEMSYS.2002.984264
36. Zulliger, H. R. (1983) Precise measurement of small forces, Sensors and Actuators, 4, 483-495. DOI:10.1016/0250-6874(83)85061-6

There are 36 citations in total.

Details

Subjects	Engineering
Journal Section	Research Articles
Authors	Kıvanç Azgın 0000-0002-1778-963X
Publication Date	December 8, 2017
Submission Date	July 4, 2017
Acceptance Date	September 22, 2017
Published in Issue	Year 2017 Volume: 22 Issue: 3

Cite

APA	Azgın, K. (2017). LORENTZ KUVVETİ TABANLI, TINLAYAN ve TİTREŞİM GENLİĞİ ÖLÇÜMÜ İLE ÇALIŞAN BİR MEMS MANYETOMETRE. Uludağ Üniversitesi Mühendislik Fakültesi Dergisi, 22(3), 61-80. https://doi.org/10.17482/uumfd.325923
AMA	Azgın K. LORENTZ KUVVETİ TABANLI, TINLAYAN ve TİTREŞİM GENLİĞİ ÖLÇÜMÜ İLE ÇALIŞAN BİR MEMS MANYETOMETRE. UUJFE. December 2017;22(3):61-80. doi:10.17482/uumfd.325923
Chicago	Azgın, Kıvanç. “LORENTZ KUVVETİ TABANLI, TINLAYAN Ve TİTREŞİM GENLİĞİ ÖLÇÜMÜ İLE ÇALIŞAN BİR MEMS MANYETOMETRE”. Uludağ Üniversitesi Mühendislik Fakültesi Dergisi 22, no. 3 (December 2017): 61-80. https://doi.org/10.17482/uumfd.325923.
EndNote	Azgın K (December 1, 2017) LORENTZ KUVVETİ TABANLI, TINLAYAN ve TİTREŞİM GENLİĞİ ÖLÇÜMÜ İLE ÇALIŞAN BİR MEMS MANYETOMETRE. Uludağ Üniversitesi Mühendislik Fakültesi Dergisi 22 3 61–80.
IEEE	K. Azgın, “LORENTZ KUVVETİ TABANLI, TINLAYAN ve TİTREŞİM GENLİĞİ ÖLÇÜMÜ İLE ÇALIŞAN BİR MEMS MANYETOMETRE”, UUJFE, vol. 22, no. 3, pp. 61–80, 2017, doi: 10.17482/uumfd.325923.
ISNAD	Azgın, Kıvanç. “LORENTZ KUVVETİ TABANLI, TINLAYAN Ve TİTREŞİM GENLİĞİ ÖLÇÜMÜ İLE ÇALIŞAN BİR MEMS MANYETOMETRE”. Uludağ Üniversitesi Mühendislik Fakültesi Dergisi 22/3 (December 2017), 61-80. https://doi.org/10.17482/uumfd.325923.
JAMA	Azgın K. LORENTZ KUVVETİ TABANLI, TINLAYAN ve TİTREŞİM GENLİĞİ ÖLÇÜMÜ İLE ÇALIŞAN BİR MEMS MANYETOMETRE. UUJFE. 2017;22:61–80.
MLA	Azgın, Kıvanç. “LORENTZ KUVVETİ TABANLI, TINLAYAN Ve TİTREŞİM GENLİĞİ ÖLÇÜMÜ İLE ÇALIŞAN BİR MEMS MANYETOMETRE”. Uludağ Üniversitesi Mühendislik Fakültesi Dergisi, vol. 22, no. 3, 2017, pp. 61-80, doi:10.17482/uumfd.325923.
Vancouver	Azgın K. LORENTZ KUVVETİ TABANLI, TINLAYAN ve TİTREŞİM GENLİĞİ ÖLÇÜMÜ İLE ÇALIŞAN BİR MEMS MANYETOMETRE. UUJFE. 2017;22(3):61-80.

Article Files

Full Text

Announcements:

30.03.2021-Beginning with our April 2021 (26/1) issue, in accordance with the new criteria of TR-Dizin, the Declaration of Conflict of Interest and the Declaration of Author Contribution forms fulfilled and signed by all authors are required as well as the Copyright form during the initial submission of the manuscript. Furthermore two new sections, i.e. ‘Conflict of Interest’ and ‘Author Contribution’, should be added to the manuscript. Links of those forms that should be submitted with the initial manuscript can be found in our 'Author Guidelines' and 'Submission Procedure' pages. The manuscript template is also updated. For articles reviewed and accepted for publication in our 2021 and ongoing issues and for articles currently under review process, those forms should also be fulfilled, signed and uploaded to the system by authors.