Ultrasonik Sprey Piroliz ile Üretilen Flor Katkılı Kalay Oksit İnce Filmlerin Yapısal, Morfolojik, Optiksel ve Elektriksel Analizleri

Yıl 2019, , 2107 - 2115, 31.07.2019

Murat Kaleli , Durmuş Ali Aldemir , Ahmet Buğrahan Bayram , Celal Alp Yavru

https://doi.org/10.29130/dubited.549547

Cited By: 2

Öz

Bu çalışmada yüksek şeffaflığa
sahip Flor katkılı Kalay Oksit ince filmleri ultrasonik sprey piroliz tekniği
ile başarılı bir şekilde üretilmiştir. İnce filmlerin yapısal ve morfolojik
karakterizasyonu için X-ışını kırınımı, taramalı elektron mikroskobu ve atomik
kuvvet mikroskobu analizleri yapılmıştır. X-ışını kırınımı desenleri göstermiştir
ki filmler polikristal haldedir ve (200) tercihli yönelimi boyunca
büyümüşlerdir. 3,16 eV’luk bir band aralığı UV-Vis ölçümlerinden elde
edilmiştir. İnce filmlerin öz direnci 1,35×10-3W-cm
olarak bulunmuştur.

Anahtar Kelimeler

Flor katkılı Kalay Oksit, Ultrasonik sprey piroliz, Fiziksel özellikler

Structural, Morphological, Optical and Electrical Analysis of Fluorine Doped Tin Oxide Thin Films Fabricated by Ultrasonic Spray Pyrolysis

Öz

In this study, Fluorine doped Tin Oxide (FTO) thin films with high
transparency were fabricated by ultrasonic spray pyrolysis technique, successfully.
The analyses of X-ray diffraction, scanning electron microscopy and atomic
force microscopy were used for the structural and morphological
characterization of the thin films. X-ray diffraction patterns showed that the
films were polycrystalline and grow along to preferred orientation of (200).
The band gap value of 3.16 eV was obtained from UV-Vis measurements. The
resistivity of the thin films was found to be as 1.35×10-3W-cm.

Anahtar Kelimeler

Fluorine doped Tin Oxide, Ultrasonic Spray Pyrolysis, Physical properties

Kaynakça

• [1] O. Malik, F. J. De la Hidalga-Wade, and R. R. Amador, ‘Fluorine-doped Tin Oxide Films with A High Figure of Merit Fabricated by Spray Pyrolysis,’ Journal of Materials Research, vol. 30, no. 13, pp. 2040–2045, 2015.
• [2] T. Jäger, B. Bissig, M. Döbeli, A. N. Tiwari, and Y. E. Romanyuk, ‘Thin films of SnO2:F by Reactive Magnetron Sputtering with Rapid Thermal Post-Annealing,’ Thin Solid Films, vol. 553, pp. 21–25, 2014.
• [3] A. E. Rakhshani, Y. Makdisi, and H. A. Ramazaniyan, ‘Electronic and Optical Properties of Fluorine-Doped Tin Oxide Films,’ Journal of Applied Physics, vol. 83, no. 2, pp. 1049–1057, 1998.
• [4] K. Nomura, Y. Ujihira, S. S. Sharma, A. Fueda, and T. Murakami, ‘Gas Sensitivity of Metal Oxide Mixed Tin Oxide Films Prepared by Spray Pyrolysis,’ Journal of Materials Science , vol. 24, no. 3, pp. 2653–2658, 1989.
• [5] A. Abdelkrim, S. Rahmane, O. Abdelouahab, N. Abdelmalek, and G. Brahim, ‘Effect of Solution Concentration on The Structural, Optical and Electrical Properties of SnO2 Thin Films Prepared by Spray Pyrolysis,’ Optik (Stuttg), vol. 127, no. 5, pp. 2653–2658, 2016.
• [6] A. Andersson et al., ‘Fluorine Tin Oxide as an Alternative to Indium Tin Oxide in Polymer LEDs,’ Advanced Materials, vol. 10, no. 11, pp. 859–863, 1998.
• [7] T. Fukano and T. Motohiro, ‘Low-temperature Growth of Highly Crystallized Transparent Conductive Fluorine-Doped Tin Oxide Films by İntermittent Spray Pyrolysis Deposition,’ Solar Energy Materials and Solar Cells, 2004.
• [8] J. W. Bae, S. W. Lee, and G. Y. Yeom, ‘Doped-Fluorine on Electrical and Optical Properties of Tin Oxide Films Grown by Ozone-Assisted Thermal CVD,’ Journal of The Electrochemical Society, vol. 154, no. 1, p. D34, 2006.
• [9] Z. Banyamin, P. Kelly, G. West, and J. Boardman, ‘Electrical and Optical Properties of Fluorine Doped Tin Oxide Thin Films Prepared by Magnetron Sputtering,’ Coatings, vol. 4, no. 4, pp. 732–746, 2014.
• [10] A. N. Banerjee, S. Kundoo, P. Saha, and K. K. Chattopadhyay, ‘Synthesis and Characterization of Nano-Crystalline Fluorine-Doped Tin Oxide Thin Films by Sol-Gel Method’, Journal of Sol-Gel Science and Technology, vol. 28, no. 1, pp. 105–110, 2003.
• [11] B. Thangaraju, ‘Structural and Electrical Studies On Highly Conducting Spray Deposited Fluorine And Antimony Doped SnO2 Thin Films from SnCl2 Precursor,’ Thin Solid Films, vol. 402, no. 1–2, pp. 71–78, 2002.
• [12] A. Purwanto, H. Widiyandari, and A. Jumari, ‘Fabrication of High-Performance Fluorine Doped-Tin Oxide Film Using Flame-Assisted Spray Deposition,’ Thin Solid Films, vol. 520, no. 6, pp. 2092–2095, 2012.
• [13] C. C. Lin, M. C. Chiang, and Y. W. Chen, ‘Temperature Dependence of Fluorine-doped Tin Oxide Films Produced by Ultrasonic Spray Pyrolysis,’ Thin Solid Films, vol. 518, no. 4, pp. 1241–1244, 2009.
• [14] S. Kose et al., ‘Electrical, Structural and Surface Properties of Fluorine Doped Tin Oxide Films,’ Applied Surface Science, vol. 256, no. 22, pp. 6586–6591, 2010.
• [15] L. H. Lalasari, T. Arini, L. Andriyah, F. Firdiyono, and A. H. Yuwono, ‘Electrical, Optical and Structural Properties of FTO Thin Films Fabricated by Spray Ultrasonic Nebulizer Technique from SnCl4 Precursor,’ AIP Conference Proceedings, p. 020001, 2018.
• [16] T. Şimşek, K. Gökşen, ‘Çeşitli Gaz Akış Hızı Koşullarında Üretilen Hidrojenlenmiş Amorf Karbon İnce Filmlerin Optik Bant Aralıklarının İncelenmesi,’ Düzce Üniversitesi Bilim ve Teknoloji Dergisi, cilt. 5, pp. 84-95, 2017.
• [17] E. Elangovan and K. Ramamurthi, ‘Studies on Micro-Structural and Electrical Properties of Spray-Deposited Fluorine-Doped Tin Oxide Thin Films From Low-Cost Precursor,’ Thin Solid Films, vol. 476, no. 2, pp. 231–236, 2005.
• [18] B. D. Viezbicke, S. Patel, B. E. Davis, and P. Birnie, ‘Evaluation of the Tauc Method for Optical Absorption Edge Determination: ZnO Thin Films as a Model System,’ Physica Status Solidi (b), vol. 252, no. 8, pp. 1700–1710, 2015.