MATHEMATICAL MODEL OF THE DEVELOPMENT OF MANUFACTURING DEFECTS IN THE SURFACE LAYER OF SUBSTRATES OF MOEMS’ FUNCTIONAL COMPONENTS

Yıl 2020, Cilt: 21 , 113 - 127, 27.11.2020

İgor Nevlıudov Murad Omarov Olena Chala

https://doi.org/10.18038/estubtda.823088

Cited By: 1

Öz

A mathematical model of the development of manufacturing defects, with the prediction of the random component of the model in the substrates of functional components of MOEMS, which are made of semiconductors, in particular, silicon, are developed in the article.
The main manufacturing defects that arise in the surface layer of the substrates of the MOEMS functional components taking into account the technological processes of their production and dynamic processes were used when developing the model.
The developed mathematical model takes into account the occurrence of a random component of the model with its predictive ability.
The possibility of such control is the basis for the development of the scientific direction of technology and equipment for the production of semiconductors, materials and electronic devices - defect engineering, based on the management and forecasting of defect formation processes.

Anahtar Kelimeler

mathematical model, defect, MOEMS, functional components

Destekleyen Kurum

THE PROBLEM SCIENTIFIC – RESEARCH LABORATORY «MICROELECTROMECHANICAL AND MICROOPTOELECTROMECHANICAL SYSTEMS» (PRL MEMS AND MOEMS) Department of Computer-Integrated Technologies, Automation and Mechatronics (CITAM) Head of Department – Igor Nevliudov Scientific director – Razumov-Fryziuk Ievgenii Associate Professor Contacts: room 160-2 [phone] [e-mail] Kharkiv National University of Radio Electronics, Nauky Ave. 14, Kharkiv, 61166, Ukraine

Teşekkür

Gratitude for assistance in research and testing THE PROBLEM SCIENTIFIC - RESEARCH LABORATORY "MICROELECTROMECHANICAL AND MICROOPTOELECTROMECHANICAL SYSTEMS" (PRL MEMS AND MOEMS) Department of Computer-Integrated Technologies, Automation and Mechatronics (CITAM) Head of Department - Igor Nevliudov Scientific director - Razumov-Fryziuk Ievgenii Associate Professor

Kaynakça

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