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NUMERICAL STUDY ON PULL-IN INSTABILITY ANALYSIS OF GEOMETRICALLY NONLINEAR EULER-BERNOULLI MICRO BEAM BASED ON MODIFIED COUPLE STRESS THEORY

Year 2012, Volume: 4 Issue: 4, 41 - 53, 01.12.2012

Abstract

In this paper, the static pull-in instability of beam-type micro-electromechanical systems (MEMS) is theoretically investigated. Two engineering cases including cantilever and double cantilever micro-beam are considered. Considering the mid-plane stretching as the source of the nonlinearity in the beam behavior, a nonlinear sizedependent Euler-Bernoulli beam model is used based on a modified couple stress theory, capable of capturing the size effect. By selecting a range of geometric parameters such as beam lengths, width, thickness, gaps and size effect, we identify the static pull-in instability voltage. A MAPLE package is employed to solve the nonlinear differential governing equations to obtain the static pull-in instability voltage of microbeams. The results reveal significant influences of size effect and geometric parameters on the static pull-in instability voltage of MEMS

References

  • [1] Khatami, I., Pashai, M.H., Tolou, N., Comparative vibration analysis of a parametrically nonlinear excited oscillator using HPM and numerical method, Mathematical Problems in Engineering, doi:10.1155/2008/956170.
  • [2] Gasparini, A.M., Saetta, A.V., Vitaliani, R.V., on the stability and instability regions of nonconservative continuous system under partially follower forces, Comput. Meth. Appl. Mech. Eng., 124 (1-2), 63-78, 1995.
  • [3] Osterberg, P.M., Senturia, S.D., M-TEST: A test chip for MEMS material property measurements using electrostatically actuated test structures, J. Microelectromech. Syst., 6 (2), 107-118, 1997.
  • [4] Osterberg, P.M., Gupta, R.K., Gilbert, J.R., Senturia, S.D., Quantitative models for the measurement of residual stress, poisson ratio and young’s modulus using electrostatic pullin of beams and diaphragms, Proceedings of the Solid- State Sensor and Actuator Workshop, Hilton Head, SC, 1994.
  • [5] Sadeghian, H., Rezazadeh, G., Osterberg, P., Application of the generalized differential quadrature method to the study of pull-in phenomena of MEMS switches, IEEE/ASME J. Micro Electro Mech. Sys., 16 (6), 1334-1340, 2007.
  • [6] Salekdeh, Y.A., Koochi, A., Beni, Y.T., Abadyan, M., Modeling effect of three nano-scale physical phenomena on instability voltage of multi-layer MEMS/NEMS: Material size dependency, van der waals force and non-classic support conditions, Trends in Applied Sciences Research, 7(1), 1-17, 2012.
  • [7] Batra, R.C., Porfiri, M., Spinello, D., Review of modeling electrostatically actuated microelectromechanical systems, Smart Mater. Struct., 16, R23-R31, 2007.
  • [8] Lin, W.H., Zhao, Y.P., Pull-in instability of micro-switch actuators: Model review, Int. J. Nonlinear Sci. Numer. Simulation, 9 (2), 175-184, 2008.
  • [9] Koiter, W.T., Couple-stresses in the theory of elasticity: I and II. Proceedings of the Koninklijke Nederlandse Akademie van Wetenschappen Series B, 6717-6744, 1964.
  • [10] Mindlin, R.D., Tiersten, H.F., Effects of couple-stresses in linear elasticity, Archive for Rational Mechanics and Analysis, 11(1), 415-448, 1962.
  • [11] Toupin, R.A., Elastic materials with couple-stresses, Archive for Rational Mechanics and Analysis, 11(1), 385–414, 1962.
  • [12] Anthoine, A., Effect of couple-stresses on the elastic bending of beams, International Journal of Solids and Structures, 37, 1003-1018, 2000.
  • [13] Yang, F., Chong, A.C. M., Lam, D.C.C., Tong, P., Couple stress based strain gradient theory for elasticity, International Journal of Solids and Structures, 39(10), 2731-2743, 2002.
  • [14] Xia, W., Wang, L., Yin, L., Nonlinear non-classical microscale beams: Static bending, postbuckling and free vibration, International Journal of Engineering Science, 48, 2044- 2053, 2010.
  • [15] Asghari, M., Rahaeifard, M., Kahrobaiyan, M.H., Ahmadian, M.T., on the size-dependent behavior of functionally graded micro-beams, Materials and Design, 32, 1435-1443, 2011.
  • [16] Rong, H., Huang, Q.A., Nie, M., Li, W., An analytical model for pull-in voltage of clamped–clamped multilayer beams, Sens. Actuators A, 116, 15-21, 2004.
  • [17] Yang, F., Chong, A.C.M., Lam, D.C.C., Tong, P., Couple stress based strain gradient theory for elasticity, International Journal of Solids and Structures, 39 (10), 2731-2743, 2002.
  • [18] Shengli, K., Shenjie, Z., Zhifeng, N., Kai, W., The size-dependent natural frequency of Bernoulli–Euler micro-beams, Journal of Engineering Science, 46, 427-437, 2008.
  • [19] Ma, H.M., Gao, X.L., Reddy, J.N., A microstructure-dependent Timoshenko beam model based on a modified couple stress theory, Journal of the Mechanics and Physics of Solids, 56, 3379–3391, 2008.
  • [20] Gupta, R.K., Electrostatic pull-in test structure design for in-situ mechanical property measurements of microelectromechanical systems, Ph.D. Disserta-tion, Massachusetts Institute of Technology (MIT), Cambridge, MA., 1997.
  • [21] Zhao, J., Zhou, S., Wanga, B., Wang, X., Nonlinear microbeam model based on strain gradient theory, Applied Mathematical Modelling, 36, 2674-2686, 2012.
Year 2012, Volume: 4 Issue: 4, 41 - 53, 01.12.2012

Abstract

References

  • [1] Khatami, I., Pashai, M.H., Tolou, N., Comparative vibration analysis of a parametrically nonlinear excited oscillator using HPM and numerical method, Mathematical Problems in Engineering, doi:10.1155/2008/956170.
  • [2] Gasparini, A.M., Saetta, A.V., Vitaliani, R.V., on the stability and instability regions of nonconservative continuous system under partially follower forces, Comput. Meth. Appl. Mech. Eng., 124 (1-2), 63-78, 1995.
  • [3] Osterberg, P.M., Senturia, S.D., M-TEST: A test chip for MEMS material property measurements using electrostatically actuated test structures, J. Microelectromech. Syst., 6 (2), 107-118, 1997.
  • [4] Osterberg, P.M., Gupta, R.K., Gilbert, J.R., Senturia, S.D., Quantitative models for the measurement of residual stress, poisson ratio and young’s modulus using electrostatic pullin of beams and diaphragms, Proceedings of the Solid- State Sensor and Actuator Workshop, Hilton Head, SC, 1994.
  • [5] Sadeghian, H., Rezazadeh, G., Osterberg, P., Application of the generalized differential quadrature method to the study of pull-in phenomena of MEMS switches, IEEE/ASME J. Micro Electro Mech. Sys., 16 (6), 1334-1340, 2007.
  • [6] Salekdeh, Y.A., Koochi, A., Beni, Y.T., Abadyan, M., Modeling effect of three nano-scale physical phenomena on instability voltage of multi-layer MEMS/NEMS: Material size dependency, van der waals force and non-classic support conditions, Trends in Applied Sciences Research, 7(1), 1-17, 2012.
  • [7] Batra, R.C., Porfiri, M., Spinello, D., Review of modeling electrostatically actuated microelectromechanical systems, Smart Mater. Struct., 16, R23-R31, 2007.
  • [8] Lin, W.H., Zhao, Y.P., Pull-in instability of micro-switch actuators: Model review, Int. J. Nonlinear Sci. Numer. Simulation, 9 (2), 175-184, 2008.
  • [9] Koiter, W.T., Couple-stresses in the theory of elasticity: I and II. Proceedings of the Koninklijke Nederlandse Akademie van Wetenschappen Series B, 6717-6744, 1964.
  • [10] Mindlin, R.D., Tiersten, H.F., Effects of couple-stresses in linear elasticity, Archive for Rational Mechanics and Analysis, 11(1), 415-448, 1962.
  • [11] Toupin, R.A., Elastic materials with couple-stresses, Archive for Rational Mechanics and Analysis, 11(1), 385–414, 1962.
  • [12] Anthoine, A., Effect of couple-stresses on the elastic bending of beams, International Journal of Solids and Structures, 37, 1003-1018, 2000.
  • [13] Yang, F., Chong, A.C. M., Lam, D.C.C., Tong, P., Couple stress based strain gradient theory for elasticity, International Journal of Solids and Structures, 39(10), 2731-2743, 2002.
  • [14] Xia, W., Wang, L., Yin, L., Nonlinear non-classical microscale beams: Static bending, postbuckling and free vibration, International Journal of Engineering Science, 48, 2044- 2053, 2010.
  • [15] Asghari, M., Rahaeifard, M., Kahrobaiyan, M.H., Ahmadian, M.T., on the size-dependent behavior of functionally graded micro-beams, Materials and Design, 32, 1435-1443, 2011.
  • [16] Rong, H., Huang, Q.A., Nie, M., Li, W., An analytical model for pull-in voltage of clamped–clamped multilayer beams, Sens. Actuators A, 116, 15-21, 2004.
  • [17] Yang, F., Chong, A.C.M., Lam, D.C.C., Tong, P., Couple stress based strain gradient theory for elasticity, International Journal of Solids and Structures, 39 (10), 2731-2743, 2002.
  • [18] Shengli, K., Shenjie, Z., Zhifeng, N., Kai, W., The size-dependent natural frequency of Bernoulli–Euler micro-beams, Journal of Engineering Science, 46, 427-437, 2008.
  • [19] Ma, H.M., Gao, X.L., Reddy, J.N., A microstructure-dependent Timoshenko beam model based on a modified couple stress theory, Journal of the Mechanics and Physics of Solids, 56, 3379–3391, 2008.
  • [20] Gupta, R.K., Electrostatic pull-in test structure design for in-situ mechanical property measurements of microelectromechanical systems, Ph.D. Disserta-tion, Massachusetts Institute of Technology (MIT), Cambridge, MA., 1997.
  • [21] Zhao, J., Zhou, S., Wanga, B., Wang, X., Nonlinear microbeam model based on strain gradient theory, Applied Mathematical Modelling, 36, 2674-2686, 2012.
There are 21 citations in total.

Details

Other ID JA66BB47CG
Journal Section Articles
Authors

Y. Tadi Beni This is me

M. Heidari This is me

Publication Date December 1, 2012
Published in Issue Year 2012 Volume: 4 Issue: 4

Cite

APA Beni, Y. T., & Heidari, M. (2012). NUMERICAL STUDY ON PULL-IN INSTABILITY ANALYSIS OF GEOMETRICALLY NONLINEAR EULER-BERNOULLI MICRO BEAM BASED ON MODIFIED COUPLE STRESS THEORY. International Journal of Engineering and Applied Sciences, 4(4), 41-53.
AMA Beni YT, Heidari M. NUMERICAL STUDY ON PULL-IN INSTABILITY ANALYSIS OF GEOMETRICALLY NONLINEAR EULER-BERNOULLI MICRO BEAM BASED ON MODIFIED COUPLE STRESS THEORY. IJEAS. December 2012;4(4):41-53.
Chicago Beni, Y. Tadi, and M. Heidari. “NUMERICAL STUDY ON PULL-IN INSTABILITY ANALYSIS OF GEOMETRICALLY NONLINEAR EULER-BERNOULLI MICRO BEAM BASED ON MODIFIED COUPLE STRESS THEORY”. International Journal of Engineering and Applied Sciences 4, no. 4 (December 2012): 41-53.
EndNote Beni YT, Heidari M (December 1, 2012) NUMERICAL STUDY ON PULL-IN INSTABILITY ANALYSIS OF GEOMETRICALLY NONLINEAR EULER-BERNOULLI MICRO BEAM BASED ON MODIFIED COUPLE STRESS THEORY. International Journal of Engineering and Applied Sciences 4 4 41–53.
IEEE Y. T. Beni and M. Heidari, “NUMERICAL STUDY ON PULL-IN INSTABILITY ANALYSIS OF GEOMETRICALLY NONLINEAR EULER-BERNOULLI MICRO BEAM BASED ON MODIFIED COUPLE STRESS THEORY”, IJEAS, vol. 4, no. 4, pp. 41–53, 2012.
ISNAD Beni, Y. Tadi - Heidari, M. “NUMERICAL STUDY ON PULL-IN INSTABILITY ANALYSIS OF GEOMETRICALLY NONLINEAR EULER-BERNOULLI MICRO BEAM BASED ON MODIFIED COUPLE STRESS THEORY”. International Journal of Engineering and Applied Sciences 4/4 (December 2012), 41-53.
JAMA Beni YT, Heidari M. NUMERICAL STUDY ON PULL-IN INSTABILITY ANALYSIS OF GEOMETRICALLY NONLINEAR EULER-BERNOULLI MICRO BEAM BASED ON MODIFIED COUPLE STRESS THEORY. IJEAS. 2012;4:41–53.
MLA Beni, Y. Tadi and M. Heidari. “NUMERICAL STUDY ON PULL-IN INSTABILITY ANALYSIS OF GEOMETRICALLY NONLINEAR EULER-BERNOULLI MICRO BEAM BASED ON MODIFIED COUPLE STRESS THEORY”. International Journal of Engineering and Applied Sciences, vol. 4, no. 4, 2012, pp. 41-53.
Vancouver Beni YT, Heidari M. NUMERICAL STUDY ON PULL-IN INSTABILITY ANALYSIS OF GEOMETRICALLY NONLINEAR EULER-BERNOULLI MICRO BEAM BASED ON MODIFIED COUPLE STRESS THEORY. IJEAS. 2012;4(4):41-53.

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