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Micro machining techniques commonly used in manufacturing field

Yıl 2011, Cilt: 15 Sayı: 1, 46 - 59, 01.06.2011

Öz

-

Kaynakça

  • Malekian, M., Park, S.S., Jun, M.B.G., Tool wear monitoring of micro-milling operations, Journal of Materials Processing Technology, In Press.
  • Jackson, M.J., Robinson, G.M., Ahmed, W., Micromachining selected metals using diamond coated cutting Nanomanufacturing, Vol. 1, 304-317, 2006. Journal of
  • Adams, D.P., Vasile, M.J., Benavides, G., Campbell, A.N., Micromilling of metal alloys with focused ion beam–fabricated tools, Journal of the International Societies Nanotechnology, Vol.25, 107–113, 2001. Engineering and
  • Kaplan H., Dölen, M., MikroElektromekanik sistemler (MEMS):Üretim Teknikleri, 11. Ulusal Makina Teorisi Sempozyumu, Mimarlık Fakültesi, 4-6 Eylül 2003. Üniversitesi, Mühendislik
  • Robinson, G.M., Jackson, M.J., A review of micro and nanomachining from a materials perspective, Journal of Materials Processing Technology, Vol. 167, 316–337, 2005.
  • Chae, J., Park, S.S., Freiheit, T., Investigation of micro- cutting operations, International Journal of Machine Tools & Manufacture, Vol. 46, 313–332, 2006.
  • Asad A.B.M.A., Masaki T., Rahman M., Lim H.S., Wong Y.S., Tool-based micro-machining, Journal of Materials Processing Technology, Vol. 192–193, 204– 211, 2007.
  • Kang, I.S., Kim, J.S., Kim, J.H., Kang, M.C., Seo, Y.W., A mechanistic model of cutting force in the micro end milling process, Journal of Materials Processing Technology, Vol. 187–188, 250–255, 2007.
  • Bissacco, G., Hansen, H.N., De Chiffre, L., Micromilling of hardened tool steel for mould making applications, Technology, Vol. 167, 201–207, 2005. of Materials Processing
  • Özel T. Liu X. Dhanorker A., Modelling and simulation of micro-milling process, Çesme, Turkey.
  • Nakagawa, H., Ogawa, K., Kihara, A., Hirogaki, T., Improvement of micro-drilled hole quality for printed wiring boards, Journal of Materials Processing Technology, Vol. 191, 293–296, 2007.
  • Chae J., Park S.S., High frequency bandwidth measurements of micro cutting forces, International Journal of Machine Tools & Manufacture, Vol. 47, 1433–1441, 2007.
  • Malekian M., Park S.S., Jun M.B.G., Modeling of dynamic micro-milling cutting forces, International Journal of Machine Tools & Manufacture, Vol. 49, 586–598, 2009.
  • Demir E., Taylor-based model for micro-machining of single crystal fcc materials including frictional effects— Application to micro-milling process, International Journal of Machine Tools & Manufacture, Vol. 48, 1592–1598, 2008.
  • Venkatachalam S., Li X., Liang S.Y., Predictive modeling of transition undeformed chip thickness in ductile-regime micro-machining of single crystal brittle materials, Journal of Materials Processing Technology, Vol. 209, 3306–3319, 2009.
  • Son, S.M., Lim, H.L., Ahn, J.H., Effects of the friction coefficient on the minimum cutting thickness in micro cutting, International Journal of Machine Tools & Manufacture, Vol. 45, 529–535, 2005.
  • Aramcharoen, A., Mativenga, P.T., Size effect and tool geometry in micromilling of tool steel, Precision Engineering, In Press.
  • Schmidt, J., Tritschler, H., Micro cutting of steel, Microsystem Technologies, Vol. 10, 167–174, 2004.
  • Ng, C.K., Melkote, S.N., Rahman, M., Kumar, A.S., Experimental study of micro- and nano-scale cutting of aluminum 7075-T6, International Journal of Machine Tools & Manufacture, Vol. 46, 929–936, 2006.
  • Chen W.K., Kuriyagawa T., Huang H., Yosihara N., Machining of micro aspherical mould inserts, Precision Engineering, Vol. 29, 315–323, 2005.
  • Park S.S., Rahmana R., Robust chatter stability in micro-milling operations, CIRP Annals - Manufacturing Technology, In Press.
  • Creighton E., Honegger A., Tulsian A., Mukhopadhyay D., Analysis of thermal errors in a high-speed micro- milling spindle, International Journal of Machine Tools & Manufacture, Vol. 50, 386–393, 2010.
  • Karanth S., Sumesh M.A., Shobha V., Shanbhogue G.H., Nagendra C.L., Infrared detectors based on thin film thermistor of ternary Mn–Ni–Co–O on micro- machined thermal isolation structure, Sensors and Actuators A, Vol. 153, 69–75, 2009.
  • Sein, H., Ahmed, W., Hassan, U., Ali, N., Gracio, J.J., Jackson, M.J., Chemical vapour deposition of microdrill cutting edges for micro- and nanotechnology applications, Journal of Materıals Science, Vol. 37, 5057 – 5063, 2002.
  • Gäbler, J., Schäfer, L., Westermann, H., Chemical vapour deposition diamond coated microtools for grinding, milling and drilling, Diamond and Related Materials, Vol. 9, 921-924, 2000.
  • Torres, C.D., Heaney, P.J., Sumant, A.V., Hamilton, M.A., Carpick, R.W., Pfefferkorn, F.E., Analyzing the performance of diamond-coated micro end mills, International Journal of Machine Tools & Manufacture, Vol. 49, 599–612, 2009.
  • Heaney, P.J., Sumant, A.V., Torres, C.D., Carpick, R.W., Pfefferkorn, F.E., Diamond coatings for micro end mills: enabling the dry machining of aluminum at the micro-scale, Diamond & Related Materials, Vol. 17, 223–233, 2008.
  • Sein, H.,Ahmed, W., Jackson, M.,Woodwards, R., Riccardo, P., Performance and characterisation of CVD diamond coated, sintered diamond and WC–Co cutting tools for dental and micromachining applications, Thin Solid Films, Vol. 447–448, 455–461, 2004.
  • Park H.K., Onikura H., Ohnishi O., Sharifuddin A., Development of micro-diamond tools through electroless composite plating and investigation into micro-machining characteristics, Precision Engineering, Vol. 34, 376–386, 2010.
  • Kao, W.H., High-speed drilling performance of coated micro-drills with Zr–C:H:Nx% coatings, Wear, Vol. 267, 1068–1074, 2009.
  • Shin, S.H., Kim, M.W., Kang, M.C., Kim, K.H., Kwon, D.H., Kim, J.S., Cutting performance of CrN and Cr- Si–N coated end-mill deposited by hybrid coating system for ultra-high speed micro machining, Surface & Coatings Technology, Vol. 202, 5613–5616, 2008.
  • Ueng, H.Y., Guo, C.T., Diamond-like carbon coatings on microdrill using an ECR-CVD system, Applied Surface Science, Vol. 249, 246–256, 2005.
  • Weinert K., Petzoldt V., Machining NiTi micro-parts by micro-milling, Materials Science and Engineering A, Vol. 481–482, 672–675, 2008.
  • Filiz, S., Conley, C.M., Wasserman, M.B., Ozdoganlar, O.B., An experimental investigation of micro- machinability of copper 101 using tungsten carbide micro-end mills, International Journal of Machine Tools & Manufacture, Vol. 47, 1088–1100, 2007.
  • http://www.polydec-inc.com, 2010.
  • Lu, Z., Yoneyama, T., Micro cutting in the micro lathe turning system, International Journal of Machine Tools and Manufacture, Vol. 39, 1171-1183 ,1999.
  • Iijima, D., Ito, S., Hayashi, A., Aoyama, H., Yamanaka, M., Micro turning system: a super small CNC precision lathe for microfactories.
  • Ito S., Iijima, D., Hayashi, A., Aoyama, H., Yamanaka, M., Micro turning system 3: a super small CNC precision lathe for microfactories.
  • Okazaki, Y., Kitahara, T., Development and evaluation of a micro-lathe equipped with numerical control, Journal of the JSPE 67, Vol. 11, 1878, 2001.
  • Liu, K., Melkote, S. N., Effect of plastic side flow on surface roughness in micro-turning process , International Journal of Machine Tools & Manufacture, Vol. 46, 1778-1785, 2006.
  • Sabat, A. B., The effect of the tool cutting edge geometry on the quality of machined surface in micro turning operation, Design for Manufacturing and the Life Cycle Conference, Vol. 4b, 295-299, 2005.
  • Dornfeld, D., Min, S., Takeuchi, Y., Recent advances in mechanical micromachining, Annals of the CIRP, Vol. 55, 745-768, 2006.
  • Zhaojun, Y., Wei, L., Yanhong, C., Lijiang, W., Study for increasing micro-drill reliability by vibrating drilling, Reliability Engineering & System Safety, Vol. 61, 229-233 , 1998.
  • Chyan, H. C., Ehmann, K. F., Development of curved helical micro-drill point technology for micro-hole drilling , Mechatronics, Vol. 8, 337-358 , 1998.
  • Lin, C., Kang, S.K., Ehmann, K. F., Helical micro-drill point design and grinding, Journal of Engineering for Industry, Vol. 117, 277-287, 1995.
  • Paquette, J. L., Goncalves, P., Devouard, B., Nicollet C., Micro-drilling ID-TIMS U-Pb dating of single monazites: A new method to unravel complex poly- metamorphic evolutions. Application to the UHT granulites of Andriamena, Contrib Mineral Petrol, Vol. 147, 110-122, 2004.
  • Kagaya, K., Oishi, Y., Yada, K., Micro-electrodischarge machining using water as a working fluid-I: micro-hole drilling, Precision Engineering, Vol. 8, 157-162, 1986.
  • http://www. micromanufacturing.com, 2010.
  • Newby, G., Venkatachalam, S., Liang, S.Y., Empirical analysis of cutting force constants in micro-end-milling operations, Journal of Materials Processing Technology Vol. 192–193, 41–47, 2007.
  • Liow J.L., Mechanical micromachining: a sustainable micro-device manufacturing approach?, Journal of Cleaner Production, Vol. 17, 662–667, 2009.
  • Kaminski P.C., Capuano M.N., Micro hole machining by conventional penetration electrical discharge machine, International Journal of Machine Tools & Manufacture, Vol. 43, 1143–1149, 2003.
  • Lee S.J., Lee C.Y., Yang K.T., Kuan F.H., Lai P.H., Simulation and fabrication of micro-scaled flow channels for metallic bipolar plates by the electrochemical micro-machining process, Journal of Power Sources, Vol. 185, 1115–1121, 2008.
  • Ahn S.H., Ryu S.H., Choi D.K., Chu C.N., Electro- chemical micro drilling using ultra short pulses, Precision Engineering, Vol. 28, 129–134, 2004.
  • Bhattacharyya B., Malapati M., Munda J., Sarkar A., Influence of tool vibration on machining performance in electrochemical International Journal of Machine Tools & Manufacture, Vol. 47, 335–342, 2007. of copper,
  • Han F, Yamada Y, Kawakami T., Kunieda M., Experimental attempts of submicrometer order size machining using micro-EDM, Precis. Eng. 30: 123-131, 2006.
  • Wong Y. S, Rahman M, Lim H. S., Han H., Ravi N., Investigation characteristics using single RC-pulse discharges. J. Mater. Process.Technol. 140: 303-307, 2003. removal
  • http://www.sarix.com, 2010.
  • Park D.S., Cho M.W., Lee H., Cho W.S., Micro- grooving of glass using micro-abrasive jet machining, Journal of Materials Processing Technology, Vol. 146, 234–240, 2004.
  • Ghobeity, A., Papini M., Spelt J.K., Abrasive jet micro- machining of planar areas and transitional slopes in glass using target oscillation, Journal of Materials Processing Technology, Vol.209, 5123–5132, 2009.
  • Ghobeity A., Getu H., Krajac T., Spelt J.K., Papini M., Process repeatability in abrasive jet micro-machining, Journal of Materials Processing Technology, Vol. 190, 51–60, 2007.
  • Fan J.M., Wang C.Y., Wang J., Modelling the erosion rate in micro abrasive air jet machining of glasses, Wear, Vol. 266, 968–974, 2009.
  • Jain V.K., Magnetic field assisted abrasive based micro- /nano-finishing, Journal of Materials Processing Technology, Vol. 209, 6022–6038, 2009.
  • Menz, W., Bacher, W., Harmening, M., Michel, A., The LIGA technique - a novel concept for microstructures and the combination with Si- Technologies by injection molding, IEEE Proceedings of Micro Electro Mechanical Systems, Nara, Japan, 69- 73, 1991. 64. Guckel, H., Deep X-Ray lithographies for micromechanics, Technical Digest of the 1990 Solid State Sensor and Actuator Workshop, Hilton Head Island, SC, 118-122, Haziran 1990.
  • Guckel, H., Micromechanics for microactuators and precision engineering, Precision Engineering (Seminer Notları), University of Wisconsin – Madison, Haziran 1997.
  • Slocombe, A. Li, L., Laser ablation machining of metalrpolymer composite materials, Applied Surface Science, vol.154–155, 617–621, 2000.
  • Jebbari, N., Jebari, M., Saadallah, F., Saugnac, A., Bennaceur, R., Longuemard, J., Thermal affected zone obtained in machining steel XC42 by high-power continuous CO2 laser, Optics & Laser Technology, Vol. 40, 864–873, 2008.
  • Dubey, A., Yadava, V., Experimental study of Nd:YAG laser beam machining—An overview, Journal of Materials Processing Technology, Vol. 195, 15–26, 2008.
  • Campanelli, S.L., Ludovico, A.D., Bonserio, C. Cavalluzzi, P., Cinquepalmi, M. Experimental analysis of the laser milling process parameters, Journal of Materials Processing Technology, Vol. 191, 220–223, 2007.
  • Pham, D.T., Dimov, S.S., Petkov, P.V., Laser milling of ceramic components, International Journal of Machine Tools & Manufacture, Vol. 47, 618–626, 2007.
  • Jackson M.J., O'Neill W., Laser micro-drilling of tool steel using Nd:YAG lasers, Journal of Materials Processing Technology, Vol. 142, 517–525, 2003.
  • Jeon, Y., Pfefferkorn, F., Effect of laser preheating the workpiece on micro end milling of metals, Journal of Manufacturing Science and Engineering, Vol. 130, 2008.
  • http://www.laserimpressions.com, 2010.
  • Chatzichristidi M., Valamontes E., Argitis P., Raptis I., van Kan J.A., Zhang F., Watt F., High aspect ratio micro/nano machining with proton beam writing on aqueous developable – easily stripped negative chemically-amplified Engineering, Vol. 85, 945–948, 2008. resists, Microelectronic
  • Uchiya N., Harada T., Murai M., Nishikawa H., Haga J., Sato T., Ishii Y., Kamiya T., Micro-machining of resists on silicon by proton beam writing, Nuclear Instruments and Methods in Physics Research B, Vol. 260, 405–408, 2007.
  • He W., Poker D.B., Gonsalves K.E., Batina N., Micro/nano machining of polymeric substrates by ion beam techniques, Microelectronic Engineering, Vol. 65, 153–161, 2003.

İmalat alanında yaygın olarak kullanılan mikro işleme teknikleri

Yıl 2011, Cilt: 15 Sayı: 1, 46 - 59, 01.06.2011

Öz

Developing technology and the need for high-precision parts in manufacturing industry has revealed the micro-machining. Machine tools and work pieces are miniaturized through micro-machining, materials and power consumption reduced to a minimum level. High productiveness in the use of resources and time can be obtained through this rapidly growing industry around the world. In this paper, different micro-machining techniques have been classified revising the investigations recently performed in the field of micro-machining and discussed their contributions to manufacturing process.

Kaynakça

  • Malekian, M., Park, S.S., Jun, M.B.G., Tool wear monitoring of micro-milling operations, Journal of Materials Processing Technology, In Press.
  • Jackson, M.J., Robinson, G.M., Ahmed, W., Micromachining selected metals using diamond coated cutting Nanomanufacturing, Vol. 1, 304-317, 2006. Journal of
  • Adams, D.P., Vasile, M.J., Benavides, G., Campbell, A.N., Micromilling of metal alloys with focused ion beam–fabricated tools, Journal of the International Societies Nanotechnology, Vol.25, 107–113, 2001. Engineering and
  • Kaplan H., Dölen, M., MikroElektromekanik sistemler (MEMS):Üretim Teknikleri, 11. Ulusal Makina Teorisi Sempozyumu, Mimarlık Fakültesi, 4-6 Eylül 2003. Üniversitesi, Mühendislik
  • Robinson, G.M., Jackson, M.J., A review of micro and nanomachining from a materials perspective, Journal of Materials Processing Technology, Vol. 167, 316–337, 2005.
  • Chae, J., Park, S.S., Freiheit, T., Investigation of micro- cutting operations, International Journal of Machine Tools & Manufacture, Vol. 46, 313–332, 2006.
  • Asad A.B.M.A., Masaki T., Rahman M., Lim H.S., Wong Y.S., Tool-based micro-machining, Journal of Materials Processing Technology, Vol. 192–193, 204– 211, 2007.
  • Kang, I.S., Kim, J.S., Kim, J.H., Kang, M.C., Seo, Y.W., A mechanistic model of cutting force in the micro end milling process, Journal of Materials Processing Technology, Vol. 187–188, 250–255, 2007.
  • Bissacco, G., Hansen, H.N., De Chiffre, L., Micromilling of hardened tool steel for mould making applications, Technology, Vol. 167, 201–207, 2005. of Materials Processing
  • Özel T. Liu X. Dhanorker A., Modelling and simulation of micro-milling process, Çesme, Turkey.
  • Nakagawa, H., Ogawa, K., Kihara, A., Hirogaki, T., Improvement of micro-drilled hole quality for printed wiring boards, Journal of Materials Processing Technology, Vol. 191, 293–296, 2007.
  • Chae J., Park S.S., High frequency bandwidth measurements of micro cutting forces, International Journal of Machine Tools & Manufacture, Vol. 47, 1433–1441, 2007.
  • Malekian M., Park S.S., Jun M.B.G., Modeling of dynamic micro-milling cutting forces, International Journal of Machine Tools & Manufacture, Vol. 49, 586–598, 2009.
  • Demir E., Taylor-based model for micro-machining of single crystal fcc materials including frictional effects— Application to micro-milling process, International Journal of Machine Tools & Manufacture, Vol. 48, 1592–1598, 2008.
  • Venkatachalam S., Li X., Liang S.Y., Predictive modeling of transition undeformed chip thickness in ductile-regime micro-machining of single crystal brittle materials, Journal of Materials Processing Technology, Vol. 209, 3306–3319, 2009.
  • Son, S.M., Lim, H.L., Ahn, J.H., Effects of the friction coefficient on the minimum cutting thickness in micro cutting, International Journal of Machine Tools & Manufacture, Vol. 45, 529–535, 2005.
  • Aramcharoen, A., Mativenga, P.T., Size effect and tool geometry in micromilling of tool steel, Precision Engineering, In Press.
  • Schmidt, J., Tritschler, H., Micro cutting of steel, Microsystem Technologies, Vol. 10, 167–174, 2004.
  • Ng, C.K., Melkote, S.N., Rahman, M., Kumar, A.S., Experimental study of micro- and nano-scale cutting of aluminum 7075-T6, International Journal of Machine Tools & Manufacture, Vol. 46, 929–936, 2006.
  • Chen W.K., Kuriyagawa T., Huang H., Yosihara N., Machining of micro aspherical mould inserts, Precision Engineering, Vol. 29, 315–323, 2005.
  • Park S.S., Rahmana R., Robust chatter stability in micro-milling operations, CIRP Annals - Manufacturing Technology, In Press.
  • Creighton E., Honegger A., Tulsian A., Mukhopadhyay D., Analysis of thermal errors in a high-speed micro- milling spindle, International Journal of Machine Tools & Manufacture, Vol. 50, 386–393, 2010.
  • Karanth S., Sumesh M.A., Shobha V., Shanbhogue G.H., Nagendra C.L., Infrared detectors based on thin film thermistor of ternary Mn–Ni–Co–O on micro- machined thermal isolation structure, Sensors and Actuators A, Vol. 153, 69–75, 2009.
  • Sein, H., Ahmed, W., Hassan, U., Ali, N., Gracio, J.J., Jackson, M.J., Chemical vapour deposition of microdrill cutting edges for micro- and nanotechnology applications, Journal of Materıals Science, Vol. 37, 5057 – 5063, 2002.
  • Gäbler, J., Schäfer, L., Westermann, H., Chemical vapour deposition diamond coated microtools for grinding, milling and drilling, Diamond and Related Materials, Vol. 9, 921-924, 2000.
  • Torres, C.D., Heaney, P.J., Sumant, A.V., Hamilton, M.A., Carpick, R.W., Pfefferkorn, F.E., Analyzing the performance of diamond-coated micro end mills, International Journal of Machine Tools & Manufacture, Vol. 49, 599–612, 2009.
  • Heaney, P.J., Sumant, A.V., Torres, C.D., Carpick, R.W., Pfefferkorn, F.E., Diamond coatings for micro end mills: enabling the dry machining of aluminum at the micro-scale, Diamond & Related Materials, Vol. 17, 223–233, 2008.
  • Sein, H.,Ahmed, W., Jackson, M.,Woodwards, R., Riccardo, P., Performance and characterisation of CVD diamond coated, sintered diamond and WC–Co cutting tools for dental and micromachining applications, Thin Solid Films, Vol. 447–448, 455–461, 2004.
  • Park H.K., Onikura H., Ohnishi O., Sharifuddin A., Development of micro-diamond tools through electroless composite plating and investigation into micro-machining characteristics, Precision Engineering, Vol. 34, 376–386, 2010.
  • Kao, W.H., High-speed drilling performance of coated micro-drills with Zr–C:H:Nx% coatings, Wear, Vol. 267, 1068–1074, 2009.
  • Shin, S.H., Kim, M.W., Kang, M.C., Kim, K.H., Kwon, D.H., Kim, J.S., Cutting performance of CrN and Cr- Si–N coated end-mill deposited by hybrid coating system for ultra-high speed micro machining, Surface & Coatings Technology, Vol. 202, 5613–5616, 2008.
  • Ueng, H.Y., Guo, C.T., Diamond-like carbon coatings on microdrill using an ECR-CVD system, Applied Surface Science, Vol. 249, 246–256, 2005.
  • Weinert K., Petzoldt V., Machining NiTi micro-parts by micro-milling, Materials Science and Engineering A, Vol. 481–482, 672–675, 2008.
  • Filiz, S., Conley, C.M., Wasserman, M.B., Ozdoganlar, O.B., An experimental investigation of micro- machinability of copper 101 using tungsten carbide micro-end mills, International Journal of Machine Tools & Manufacture, Vol. 47, 1088–1100, 2007.
  • http://www.polydec-inc.com, 2010.
  • Lu, Z., Yoneyama, T., Micro cutting in the micro lathe turning system, International Journal of Machine Tools and Manufacture, Vol. 39, 1171-1183 ,1999.
  • Iijima, D., Ito, S., Hayashi, A., Aoyama, H., Yamanaka, M., Micro turning system: a super small CNC precision lathe for microfactories.
  • Ito S., Iijima, D., Hayashi, A., Aoyama, H., Yamanaka, M., Micro turning system 3: a super small CNC precision lathe for microfactories.
  • Okazaki, Y., Kitahara, T., Development and evaluation of a micro-lathe equipped with numerical control, Journal of the JSPE 67, Vol. 11, 1878, 2001.
  • Liu, K., Melkote, S. N., Effect of plastic side flow on surface roughness in micro-turning process , International Journal of Machine Tools & Manufacture, Vol. 46, 1778-1785, 2006.
  • Sabat, A. B., The effect of the tool cutting edge geometry on the quality of machined surface in micro turning operation, Design for Manufacturing and the Life Cycle Conference, Vol. 4b, 295-299, 2005.
  • Dornfeld, D., Min, S., Takeuchi, Y., Recent advances in mechanical micromachining, Annals of the CIRP, Vol. 55, 745-768, 2006.
  • Zhaojun, Y., Wei, L., Yanhong, C., Lijiang, W., Study for increasing micro-drill reliability by vibrating drilling, Reliability Engineering & System Safety, Vol. 61, 229-233 , 1998.
  • Chyan, H. C., Ehmann, K. F., Development of curved helical micro-drill point technology for micro-hole drilling , Mechatronics, Vol. 8, 337-358 , 1998.
  • Lin, C., Kang, S.K., Ehmann, K. F., Helical micro-drill point design and grinding, Journal of Engineering for Industry, Vol. 117, 277-287, 1995.
  • Paquette, J. L., Goncalves, P., Devouard, B., Nicollet C., Micro-drilling ID-TIMS U-Pb dating of single monazites: A new method to unravel complex poly- metamorphic evolutions. Application to the UHT granulites of Andriamena, Contrib Mineral Petrol, Vol. 147, 110-122, 2004.
  • Kagaya, K., Oishi, Y., Yada, K., Micro-electrodischarge machining using water as a working fluid-I: micro-hole drilling, Precision Engineering, Vol. 8, 157-162, 1986.
  • http://www. micromanufacturing.com, 2010.
  • Newby, G., Venkatachalam, S., Liang, S.Y., Empirical analysis of cutting force constants in micro-end-milling operations, Journal of Materials Processing Technology Vol. 192–193, 41–47, 2007.
  • Liow J.L., Mechanical micromachining: a sustainable micro-device manufacturing approach?, Journal of Cleaner Production, Vol. 17, 662–667, 2009.
  • Kaminski P.C., Capuano M.N., Micro hole machining by conventional penetration electrical discharge machine, International Journal of Machine Tools & Manufacture, Vol. 43, 1143–1149, 2003.
  • Lee S.J., Lee C.Y., Yang K.T., Kuan F.H., Lai P.H., Simulation and fabrication of micro-scaled flow channels for metallic bipolar plates by the electrochemical micro-machining process, Journal of Power Sources, Vol. 185, 1115–1121, 2008.
  • Ahn S.H., Ryu S.H., Choi D.K., Chu C.N., Electro- chemical micro drilling using ultra short pulses, Precision Engineering, Vol. 28, 129–134, 2004.
  • Bhattacharyya B., Malapati M., Munda J., Sarkar A., Influence of tool vibration on machining performance in electrochemical International Journal of Machine Tools & Manufacture, Vol. 47, 335–342, 2007. of copper,
  • Han F, Yamada Y, Kawakami T., Kunieda M., Experimental attempts of submicrometer order size machining using micro-EDM, Precis. Eng. 30: 123-131, 2006.
  • Wong Y. S, Rahman M, Lim H. S., Han H., Ravi N., Investigation characteristics using single RC-pulse discharges. J. Mater. Process.Technol. 140: 303-307, 2003. removal
  • http://www.sarix.com, 2010.
  • Park D.S., Cho M.W., Lee H., Cho W.S., Micro- grooving of glass using micro-abrasive jet machining, Journal of Materials Processing Technology, Vol. 146, 234–240, 2004.
  • Ghobeity, A., Papini M., Spelt J.K., Abrasive jet micro- machining of planar areas and transitional slopes in glass using target oscillation, Journal of Materials Processing Technology, Vol.209, 5123–5132, 2009.
  • Ghobeity A., Getu H., Krajac T., Spelt J.K., Papini M., Process repeatability in abrasive jet micro-machining, Journal of Materials Processing Technology, Vol. 190, 51–60, 2007.
  • Fan J.M., Wang C.Y., Wang J., Modelling the erosion rate in micro abrasive air jet machining of glasses, Wear, Vol. 266, 968–974, 2009.
  • Jain V.K., Magnetic field assisted abrasive based micro- /nano-finishing, Journal of Materials Processing Technology, Vol. 209, 6022–6038, 2009.
  • Menz, W., Bacher, W., Harmening, M., Michel, A., The LIGA technique - a novel concept for microstructures and the combination with Si- Technologies by injection molding, IEEE Proceedings of Micro Electro Mechanical Systems, Nara, Japan, 69- 73, 1991. 64. Guckel, H., Deep X-Ray lithographies for micromechanics, Technical Digest of the 1990 Solid State Sensor and Actuator Workshop, Hilton Head Island, SC, 118-122, Haziran 1990.
  • Guckel, H., Micromechanics for microactuators and precision engineering, Precision Engineering (Seminer Notları), University of Wisconsin – Madison, Haziran 1997.
  • Slocombe, A. Li, L., Laser ablation machining of metalrpolymer composite materials, Applied Surface Science, vol.154–155, 617–621, 2000.
  • Jebbari, N., Jebari, M., Saadallah, F., Saugnac, A., Bennaceur, R., Longuemard, J., Thermal affected zone obtained in machining steel XC42 by high-power continuous CO2 laser, Optics & Laser Technology, Vol. 40, 864–873, 2008.
  • Dubey, A., Yadava, V., Experimental study of Nd:YAG laser beam machining—An overview, Journal of Materials Processing Technology, Vol. 195, 15–26, 2008.
  • Campanelli, S.L., Ludovico, A.D., Bonserio, C. Cavalluzzi, P., Cinquepalmi, M. Experimental analysis of the laser milling process parameters, Journal of Materials Processing Technology, Vol. 191, 220–223, 2007.
  • Pham, D.T., Dimov, S.S., Petkov, P.V., Laser milling of ceramic components, International Journal of Machine Tools & Manufacture, Vol. 47, 618–626, 2007.
  • Jackson M.J., O'Neill W., Laser micro-drilling of tool steel using Nd:YAG lasers, Journal of Materials Processing Technology, Vol. 142, 517–525, 2003.
  • Jeon, Y., Pfefferkorn, F., Effect of laser preheating the workpiece on micro end milling of metals, Journal of Manufacturing Science and Engineering, Vol. 130, 2008.
  • http://www.laserimpressions.com, 2010.
  • Chatzichristidi M., Valamontes E., Argitis P., Raptis I., van Kan J.A., Zhang F., Watt F., High aspect ratio micro/nano machining with proton beam writing on aqueous developable – easily stripped negative chemically-amplified Engineering, Vol. 85, 945–948, 2008. resists, Microelectronic
  • Uchiya N., Harada T., Murai M., Nishikawa H., Haga J., Sato T., Ishii Y., Kamiya T., Micro-machining of resists on silicon by proton beam writing, Nuclear Instruments and Methods in Physics Research B, Vol. 260, 405–408, 2007.
  • He W., Poker D.B., Gonsalves K.E., Batina N., Micro/nano machining of polymeric substrates by ion beam techniques, Microelectronic Engineering, Vol. 65, 153–161, 2003.
Toplam 75 adet kaynakça vardır.

Ayrıntılar

Birincil Dil Türkçe
Konular Mühendislik
Bölüm Araştırma Makalesi
Yazarlar

Adem Çiçek Bu kişi benim

Yayımlanma Tarihi 1 Haziran 2011
Gönderilme Tarihi 14 Mart 2014
Yayımlandığı Sayı Yıl 2011 Cilt: 15 Sayı: 1

Kaynak Göster

APA Çiçek, A. (2011). İmalat alanında yaygın olarak kullanılan mikro işleme teknikleri. Sakarya University Journal of Science, 15(1), 46-59. https://doi.org/10.16984/saufbed.89891
AMA Çiçek A. İmalat alanında yaygın olarak kullanılan mikro işleme teknikleri. SAUJS. Haziran 2011;15(1):46-59. doi:10.16984/saufbed.89891
Chicago Çiçek, Adem. “İmalat alanında yaygın Olarak kullanılan Mikro işleme Teknikleri”. Sakarya University Journal of Science 15, sy. 1 (Haziran 2011): 46-59. https://doi.org/10.16984/saufbed.89891.
EndNote Çiçek A (01 Haziran 2011) İmalat alanında yaygın olarak kullanılan mikro işleme teknikleri. Sakarya University Journal of Science 15 1 46–59.
IEEE A. Çiçek, “İmalat alanında yaygın olarak kullanılan mikro işleme teknikleri”, SAUJS, c. 15, sy. 1, ss. 46–59, 2011, doi: 10.16984/saufbed.89891.
ISNAD Çiçek, Adem. “İmalat alanında yaygın Olarak kullanılan Mikro işleme Teknikleri”. Sakarya University Journal of Science 15/1 (Haziran 2011), 46-59. https://doi.org/10.16984/saufbed.89891.
JAMA Çiçek A. İmalat alanında yaygın olarak kullanılan mikro işleme teknikleri. SAUJS. 2011;15:46–59.
MLA Çiçek, Adem. “İmalat alanında yaygın Olarak kullanılan Mikro işleme Teknikleri”. Sakarya University Journal of Science, c. 15, sy. 1, 2011, ss. 46-59, doi:10.16984/saufbed.89891.
Vancouver Çiçek A. İmalat alanında yaygın olarak kullanılan mikro işleme teknikleri. SAUJS. 2011;15(1):46-59.

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