Investigation of CuO Thin Films Produced by Ultrasonic Spray Pyrolysis Method Depending on Substrate Temperature

Abstract

In this study, the CuO thin films were deposited on glass substrates at different substrate temperatures (350, 400, 450, and 500 ºC) by the ultrasonic spray pyrolysis (USP) method and then annealed at 525 ºC. In X-ray diffraction (XRD) analysis, the peak intensity was not found in thin films at 350 ºC substrate temperature and as-grown conditions. Two distinct peaks were observed at ~36º and ~39º in the XRD patterns of other films. These peaks are characteristic peaks of the monoclinic crystal structure of CuO. Atomic force microscopy (AFM) and scanning electron microscope (SEM) images of the produced thin films were examined. The surfaces of thin films are not smooth. After annealing, grain agglomerations were formed. The optical properties of the CuO thin films were analyzed by ultraviolet-visible region (UV-Vis) measurements. Forbidden band gap values (Eg) were calculated from Tauc graphs for as-grown and annealed samples. It has been observed that the structural, morphological, and optical properties of CuO thin films produced by the USP method can be controlled by the substrate temperature.

Keywords

• Ultrasonic spray pyrolysis
• CuO thin film
• Energy materials
• Electronic materials

Alttaş Sıcaklığına Bağlı Olarak Ultrasonik Sprey Piroliz Yöntemi ile Üretilen CuO İnce Filmlerin İncelenmesi

Abstract

Bu çalışmada, CuO ince filmler, ultrasonik sprey piroliz (USP) yöntemi ile farklı alttaş sıcaklıklarında (350, 400, 450 ve 500 ºC) cam altlıklar üzerine biriktirilmiştir ve ardından 525 ºC’de tavlanmıştır. X-ışını kırınımı (XRD) analizlerinde, 350 ºC alttaş sıcaklığında ve tavlanmayan durumda ince filmlerde pik şiddetine rastlanmamıştır. Diğer filmlerin XRD desenlerinde ~36º ve ~39º’de iki belirgin pik gözlemlenmiştir. Bu pikler CuO’in monoklinik kristal yapısına ait karakteristik piklerdir. Atomik kuvvet mikroskobu (AFM) ve taramalı elektron mikroskobu (SEM) görüntülerinden, CuO ince filmlerin yüzeylerinin pürüzsüz olmadığı ve tavlama ile tane yığınlarının meydana geldiği gözlenmiştir. CuO ince filmlerin optik özellikleri ultraviyole- görünür bölge (UV-Vis) ölçümleri ile analiz edilmiştir. Tauc grafiklerinden yasak band aralığı değerleri (Eg), tavlanmamış ve tavlanan numuneler için hesaplanmıştır. USP yöntemiyle üretilen CuO ince filmlerin yapısal, morfolojik ve optik özelliklerinin alttaş sıcaklığı ile kontrol edilebileceği görülmüştür.

Keywords

• Ultrasonik sprey piroliz
• CuO ince film
• Enerji malzemeleri
• Elektronik malzemeler

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