The Properties of Inductive Coupled Radio-Frequency Neon Flowing Discharge at Low-Pressure

Abstract

The optical emission spectra were used to characterize the neon (Ne) discharge in the inductive coupled radio-frequency (RF) discharge chamber at pressures between 0.17 mbar and 1.4 mbar. With the RF power source operating at 100, 160 and 200 W output power at 13.56 MHz frequency, flowing discharge of pure neon gas is obtained in two different regions of the quartz discharge chamber. The optical emission spectra of these two different regions were obtained in the wavelength range of 200-1200 nm. The aim is to determine the optical properties of plasma for two different regions selected separately. The spectral lines obtained for the neon flowing discharge are between the wavelengths of 585.248 and 724.516 nm. In the inductive coupled discharge system, the intensities of the spectral lines of discharge obtained at a pressure of approximately 0.77 mbar were maximum. It was attempted to estimate the excitation and electron temperatures for both discharge regions by mathematical models. 

Keywords

• Inductive coupled discharge,Low pressure discharge,Optical properties of discharge,High frequency and RF discharge

Düşük Basınçta İndüktif Bağlı Radyo-Frekans Neon Akan Deşarjın Özellikleri

Abstract

İndüktif olarak bağlı radyo-frekans (RF) deşarj odasında 0,17 mbar ile 1,4 mbar arasındaki basınçlarda bulunan neon (Ne) deşarjını karakterize etmek için optik emisyon spektrumları kullanılmıştır. 13,56 MHz frekansında 100, 160 ve 200 W çıkış güçlerinde çalışan RF güç kaynağı ile kuvars deşarj odasının iki farklı bölgesinde saf neon gazının akan deşarjı elde edilmiştir. Bu farklı iki bölgenin optik emisyon spektrumları 200-1200 nm dalga boyları aralığında elde edilmiştir. Amaç seçilen iki farklı bölge için ayrı ayrı plazma optik özellikleri belirlemektir. Neon akan deşarjı için elde edilen spektral çizgiler 585,248 ve 724,516 nm dalga boyları arasındadır. İndüktif bağlı deşarj sisteminde yaklaşık 0,77 mbar basınçta elde edilen deşarjın spektral çizgilerinin şiddetleri maksimum olarak ortaya çıkmıştır. Her iki deşarj bölgesi için uyarılma ve elektron sıcaklıkları matematiksel modeller ile tahmin edilmiştir.

Keywords

• İndüktif bağlı deşarjlar,Düşük basınç deşarj,Deşarjın optik özelikleri,Yüksek frekans ve RF deşarjlar

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