Yıl 2019, Cilt 14 , Sayı 2, Sayfalar 213 - 226 2019-11-30

Düşük Basınçta İndüktif Bağlı Radyo-Frekans Neon Akan Deşarjın Özellikleri
The Properties of Inductive Coupled Radio-Frequency Neon Flowing Discharge at Low-Pressure

Neslihan ŞAHİN [1]


İndüktif olarak bağlı radyo-frekans (RF) deşarj odasında 0,17 mbar ile 1,4 mbar arasındaki basınçlarda bulunan neon (Ne) deşarjını karakterize etmek için optik emisyon spektrumları kullanılmıştır. 13,56 MHz frekansında 100, 160 ve 200 W çıkış güçlerinde çalışan RF güç kaynağı ile kuvars deşarj odasının iki farklı bölgesinde saf neon gazının akan deşarjı elde edilmiştir. Bu farklı iki bölgenin optik emisyon spektrumları 200-1200 nm dalga boyları aralığında elde edilmiştir. Amaç seçilen iki farklı bölge için ayrı ayrı plazma optik özellikleri belirlemektir. Neon akan deşarjı için elde edilen spektral çizgiler 585,248 ve 724,516 nm dalga boyları arasındadır. İndüktif bağlı deşarj sisteminde yaklaşık 0,77 mbar basınçta elde edilen deşarjın spektral çizgilerinin şiddetleri maksimum olarak ortaya çıkmıştır. Her iki deşarj bölgesi için uyarılma ve elektron sıcaklıkları matematiksel modeller ile tahmin edilmiştir.

The optical emission spectra were used to characterize the neon (Ne) discharge in the inductive coupled radio-frequency (RF) discharge chamber at pressures between 0.17 mbar and 1.4 mbar. With the RF power source operating at 100, 160 and 200 W output power at 13.56 MHz frequency, flowing discharge of pure neon gas is obtained in two different regions of the quartz discharge chamber. The optical emission spectra of these two different regions were obtained in the wavelength range of 200-1200 nm. The aim is to determine the optical properties of plasma for two different regions selected separately. The spectral lines obtained for the neon flowing discharge are between the wavelengths of 585.248 and 724.516 nm. In the inductive coupled discharge system, the intensities of the spectral lines of discharge obtained at a pressure of approximately 0.77 mbar were maximum. It was attempted to estimate the excitation and electron temperatures for both discharge regions by mathematical models. 
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Birincil Dil tr
Konular Fizik, Uygulamalı
Bölüm Makaleler
Yazarlar

Orcid: 0000-0003-2120-8516
Yazar: Neslihan ŞAHİN
Kurum: FEN FAKÜLTESİ
Ülke: Turkey


Teşekkür Bu çalışmanın ilerlemesine katkıda bulunan Prof. Dr. Murat TANIŞLI’ ya değerli katkıları ve desteği için teşekkürlerimi sunarım.
Tarihler

Yayımlanma Tarihi : 30 Kasım 2019

Bibtex @araştırma makalesi { sdufeffd573326, journal = {Süleyman Demirel Üniversitesi Fen Edebiyat Fakültesi Fen Dergisi}, issn = {}, eissn = {1306-7575}, address = {}, publisher = {Süleyman Demirel Üniversitesi}, year = {2019}, volume = {14}, pages = {213 - 226}, doi = {10.29233/sdufeffd.573326}, title = {Düşük Basınçta İndüktif Bağlı Radyo-Frekans Neon Akan Deşarjın Özellikleri}, key = {cite}, author = {ŞAHİN, Neslihan} }
APA ŞAHİN, N . (2019). Düşük Basınçta İndüktif Bağlı Radyo-Frekans Neon Akan Deşarjın Özellikleri. Süleyman Demirel Üniversitesi Fen Edebiyat Fakültesi Fen Dergisi , 14 (2) , 213-226 . DOI: 10.29233/sdufeffd.573326
MLA ŞAHİN, N . "Düşük Basınçta İndüktif Bağlı Radyo-Frekans Neon Akan Deşarjın Özellikleri". Süleyman Demirel Üniversitesi Fen Edebiyat Fakültesi Fen Dergisi 14 (2019 ): 213-226 <https://dergipark.org.tr/tr/pub/sdufeffd/issue/50336/573326>
Chicago ŞAHİN, N . "Düşük Basınçta İndüktif Bağlı Radyo-Frekans Neon Akan Deşarjın Özellikleri". Süleyman Demirel Üniversitesi Fen Edebiyat Fakültesi Fen Dergisi 14 (2019 ): 213-226
RIS TY - JOUR T1 - Düşük Basınçta İndüktif Bağlı Radyo-Frekans Neon Akan Deşarjın Özellikleri AU - Neslihan ŞAHİN Y1 - 2019 PY - 2019 N1 - doi: 10.29233/sdufeffd.573326 DO - 10.29233/sdufeffd.573326 T2 - Süleyman Demirel Üniversitesi Fen Edebiyat Fakültesi Fen Dergisi JF - Journal JO - JOR SP - 213 EP - 226 VL - 14 IS - 2 SN - -1306-7575 M3 - doi: 10.29233/sdufeffd.573326 UR - https://doi.org/10.29233/sdufeffd.573326 Y2 - 2019 ER -
EndNote %0 Süleyman Demirel Üniversitesi Fen Edebiyat Fakültesi Fen Dergisi Düşük Basınçta İndüktif Bağlı Radyo-Frekans Neon Akan Deşarjın Özellikleri %A Neslihan ŞAHİN %T Düşük Basınçta İndüktif Bağlı Radyo-Frekans Neon Akan Deşarjın Özellikleri %D 2019 %J Süleyman Demirel Üniversitesi Fen Edebiyat Fakültesi Fen Dergisi %P -1306-7575 %V 14 %N 2 %R doi: 10.29233/sdufeffd.573326 %U 10.29233/sdufeffd.573326
ISNAD ŞAHİN, Neslihan . "Düşük Basınçta İndüktif Bağlı Radyo-Frekans Neon Akan Deşarjın Özellikleri". Süleyman Demirel Üniversitesi Fen Edebiyat Fakültesi Fen Dergisi 14 / 2 (Kasım 2019): 213-226 . https://doi.org/10.29233/sdufeffd.573326
AMA ŞAHİN N . Düşük Basınçta İndüktif Bağlı Radyo-Frekans Neon Akan Deşarjın Özellikleri. SDÜFEFFD. 2019; 14(2): 213-226.
Vancouver ŞAHİN N . Düşük Basınçta İndüktif Bağlı Radyo-Frekans Neon Akan Deşarjın Özellikleri. Süleyman Demirel Üniversitesi Fen Edebiyat Fakültesi Fen Dergisi. 2019; 14(2): 226-213.