Düşük Basınçta İndüktif Bağlı Radyo-Frekans Neon Akan Deşarjın Özellikleri

Year 2019, Volume: 14 Issue: 2, 213 - 226, 30.11.2019

Neslihan Şahin

https://doi.org/10.29233/sdufeffd.573326

Abstract

İndüktif olarak bağlı
radyo-frekans (RF) deşarj odasında 0,17 mbar ile 1,4 mbar arasındaki basınçlarda
bulunan neon (Ne) deşarjını karakterize etmek için optik emisyon spektrumları
kullanılmıştır. 13,56 MHz frekansında 100, 160 ve 200 W çıkış güçlerinde
çalışan RF güç kaynağı ile kuvars deşarj odasının iki farklı bölgesinde saf neon
gazının akan deşarjı elde edilmiştir. Bu farklı iki bölgenin optik emisyon
spektrumları 200-1200 nm dalga boyları aralığında elde edilmiştir. Amaç seçilen
iki farklı bölge için ayrı ayrı plazma optik özellikleri belirlemektir. Neon
akan deşarjı için elde edilen spektral çizgiler 585,248 ve 724,516 nm dalga
boyları arasındadır. İndüktif bağlı deşarj sisteminde yaklaşık 0,77 mbar
basınçta elde edilen deşarjın spektral çizgilerinin şiddetleri maksimum olarak
ortaya çıkmıştır. Her iki deşarj bölgesi için uyarılma ve elektron sıcaklıkları
matematiksel modeller ile tahmin edilmiştir.

Keywords

İndüktif bağlı deşarjlar, Düşük basınç deşarj, Deşarjın optik özelikleri, Yüksek frekans ve RF deşarjlar

Thanks

Bu çalışmanın ilerlemesine katkıda bulunan Prof. Dr. Murat TANIŞLI’ ya değerli katkıları ve desteği için teşekkürlerimi sunarım.

The Properties of Inductive Coupled Radio-Frequency Neon Flowing Discharge at Low-Pressure

Abstract

The
optical emission spectra were used to characterize the neon (Ne) discharge in
the inductive coupled radio-frequency (RF) discharge chamber at pressures
between 0.17 mbar and 1.4 mbar. With the RF power source operating at 100, 160
and 200 W output power at 13.56 MHz frequency, flowing discharge of pure neon
gas is obtained in two different regions of the quartz discharge chamber. The
optical emission spectra of these two different
regions were obtained in the wavelength range of 200-1200 nm. The aim is to
determine the optical properties of plasma for two different regions selected
separately. The spectral lines obtained for the neon flowing discharge are
between the wavelengths of 585.248 and 724.516 nm. In the inductive coupled
discharge system, the intensities of the spectral lines of discharge obtained
at a pressure of approximately 0.77 mbar were maximum. It was attempted to
estimate the excitation and electron temperatures for both discharge regions by
mathematical models. 

Keywords

Inductive coupled discharge, Low pressure discharge, Optical properties of discharge, High frequency and RF discharge

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