MEMS kapasitif ivmeölçer: Bir inceleme

Year 2023, Volume: 6 Issue: 2, 41 - 58, 31.12.2023

Cihat Ediz Akbaba Yusuf Tanrıkulu

https://doi.org/10.55198/artibilimfen.1386846

Abstract

Mikro-elektro-mekanik sistem sensörleri tüketici elektroniği, otomobil endüstrisi, biyomedikal gibi birçok alanda kullanılan, boyutları mikrometre ile milimetre arasında değişen entegre sistemlerdir. MEMS kapasitif ivmeölçerler, MEMS ivmeölçer sensörleri arasında en yaygın kullanılan sensör türüdür. Kapasitif ivmeölçer sensörüne uygulanan dış kuvvet sonucunda sensörün içindeki kanıt kütlesi hareket eder ve kapasitif değişim, okuma devreleri kullanılarak elektrik sinyali olarak ölçülür. Bu inceleme yazısında MEMS sensörleri hakkında genel bilgiler verilmiş olup, MEMS kapasitif ivmeölçerler hakkında kapsamlı bir inceleme yapılmıştır. Çalışmada MEMS kapasitif ivmeölçerin dinamik devresi verilmiş, kapasitif MEMS ivmeölçerin tasarımı sırasında mekanik ve elektronik yapı için önemli değerlerin hesaplanması anlatılmıştır. Ayrıca kapasitif değişimi gerilime dönüştürmek için kullanılan okuma devreleri hakkında da bilgi verilmiştir. Son olarak nihai ürünü üretmek için kullanılan imalat süreçleri açıklanmış ve literatürde bulunan örnek imalat süreçlerine ilişkin çalışmalara değinilmiştir.

Keywords

Kapasitif ivmeölçer, MEMS ivmeölçer, MEMS kapasitif ivmeölçer

MEMS capacitive accelerometer: A review

Abstract

Micro-electro-mechanical systems sensors are integrated systems used in many fields such as consumer electronics, the automobile industry, and biomedical, and their dimensions change between micrometers and millimeters. MEMS capacitive accelerometers are the most widely used sensor type among MEMS accelerometer sensors. As a result of the external force applied to the capacitive accelerometer sensor, the proof mass inside the sensor moves, and the capacitive change is measured as an electrical signal using reading circuits. In this review paper, general information about MEMS sensors is given, and a comprehensive review is made of MEMS capacitive accelerometers. In the study, the dynamic circuit of the MEMS capacitive accelerometer is given, and the calculation of the important values for the mechanical and electronic structure during the design of the capacitive MEMS accelerometer is explained. In addition, information about the readout circuits used to convert the capacitive change to voltage is given. Finally, the fabrication processes used to produce the final product are explained, and the studies on sample fabrication processes found in the literature are mentioned.

Keywords

Capacitive accelerometer, MEMS accelerometer, MEMS capacitive accelerometer, MEMS devices

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