PECVD Yöntemi ile Polimerik Hidrojel İnce Filmlerin Üretimi

Year 2019, , 1019 - 1028, 30.09.2019

Mehmet Gürsoy

https://doi.org/10.17798/bitlisfen.527902

Abstract

Bu çalışma ile ilk kez hidrojel özellikteki PHPMA (poli(hidroksipropil metakrilat)) ince filmleri gaz fazı bir yöntem olan plazma destekli kimyasal buhar biriktirme (PECVD) yöntemi ile üretilmiştir. Substrat sıcaklığının, reaktör basıncının ve plazma gücünün, PHPMA ince filmlerinin kaplama hızları üzerine etkileri incelenmiştir. PECVD parametrelerinin, PHPMA ince filmlerinin morfolojileri, kimyasal yapıları ve ıslanabilirlik özellikleri üzerine etkileri açığa çıkarılmıştır. Ayrıca, bu çalışma kapsamında PHPMA ince filmlerinin, kaplama mekanizması ve kinetiği de incelenmiştir. En yüksek kaplama hızı (120,2 nm/dk) 20 °C substrat sıcaklığında, 250 mtorr reaktör basıncında ve 20 W plazma gücündeelde edilmiştir. PHPMA kaplamasının aktivasyon enerjisi -22,16 kJ/mol olarak bulunmuştur. 

Keywords

CVD, PHPMA, Hidrojel, İnce film

Synthesis of Polymeric Hydrogel Thin Films by PECVD Method

Abstract

In this study, for the first time, PHPMA (poly (hydroxypropyl methacrylate)) thin films, which have hydrogel properties, were synthesized by gas phase plasma enhanced chemical vapor deposition (PECVD) method. The effects of substrate temperature, reactor pressure and plasma power on the deposition rates of PHPMA thin films were investigated. The effect of PECVD parameters on the morphology, chemical structure and wettability properties of PHPMA thin films were revealed. Furthermore, the deposition mechanisms and kinetics of PHPMA thin films were also investigated in this study. The highest deposition rate (120.2 nm/min) was obtained at the substrate temperature of 20 °C, reactor pressure of 250 mtorr and plasma power of 20 W. The activation energy of PHPMA deposition was found to be -22.16 kJ / mol.

Keywords

CVD, PHPMA, Hydrogel, Thin film

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