Year 2021, Volume , Issue 21, Pages 572 - 580 2021-01-31

Isıl Gerilmelerin MEMS Fabry-Perot Optik Basınç Sensörünün Performansına Etkilerinin Araştırılması

Fikret YILDIZ [1]


Bu çalışmada Poly-Silikon ve Si3Ni4 malzemelerinden oluşan FPI diyaframları için ısıl gerilmelerin diyaframın hassasiyeti ve frekans cevabı üzerindeki etkileri teorik olarak incelenmiştir ve değerlendirilmiştir. Analitik hesaplamalar için liteatürde mevcut olan denklemler kullanılmıştır. Diyafram kalınlık ve yarıçap değerleri ortamdaki basınç değişimi ile diyaframın yerdeğiştimesinin arasında doğrusal bir ilişki olması için gerekli kısıtlamalar göz önünde bulundurularak belirlenmiştir. Diyaframların kalınlıkları 3 ve 4 µm olarak seçilmiştir. Yarıçapları ise 100 µm,120 µm ve 130 µm olarak seçilmiştir. Poly-Silikon diyafram sıkıştırma gerilmesine sahip olduğu ve -80 MPa ile -5MPa aralığında değiştiği kabul edilmiştir. Si3Ni4 diyaframı da germe gerilmesine sahip olduğu ve gerilme değeride 1000 MPa ile 1750 MPa arasında olduğu varsayılmıştır. Silikon diyafram da sonuçların karşılaştırılması için referans olarak kullanılmıştır. Elde edilen sonuçlara göre sıkıştırma gerilmesinin artması diyaframın hassasiyetini azaltırken frekans cevabını daha yüksek değerlere çıkarmaktadır. Poly-Silikon diyafram için -80 MPa ile -5 MPa aralığındaki sıkıştırma gerilme değerlerinde Silikon diyaframa göre daha yüksek hasssasiyete sahip iken daha düşük frekans cevabına sahiptir. Benzer olarak germe gerilmesine sahip Si3Ni4 diyaframının hassaslığı gerilme arttıkça azalmaktadır ve frekans cevabı da gerilme arttıkça artmaktadır. 1000MPa ile 1750 MPa arasında germe gerilmesine sahip Si3Ni4 diyaframı Silikon diyaframa göre daha düşük hasssasiyet göstermesine rağmen daha yüksek frekans cevabına sahiptir. Diyaframların üretimleri sırasında oluşan ısıl gerilmeler kaplama şartlarına göre kontrol edilebildiğinden bu gerilme değerlerine göre diyaframın hassasiyeti ve frekans cevabı gibi sensörün performansını belirleyen parametreler kontrol edilebilir. Literatürde mevcut olan farklı geometrilerde diyafram tasarımı ve farklı özelliklere sahip malzeme kullanılmasına ek olarak diyaframın üretimi esnasında oluşan ısıl gerilmelerde göz önüne alınarak daha geniş hassasiyete ve frekans cevabına sahip sensör tasarımı mümkün olabilir.
ısıl gerilme, diyafram, MEMS tabanlı FPI optik basınç sensör
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Primary Language tr
Subjects Engineering
Journal Section Articles
Authors

Orcid: 0000-0003-4846-3998
Author: Fikret YILDIZ (Primary Author)
Institution: Hakkari Üniversitesi
Country: Turkey


Dates

Publication Date : January 31, 2021

APA Yıldız, F . (2021). Isıl Gerilmelerin MEMS Fabry-Perot Optik Basınç Sensörünün Performansına Etkilerinin Araştırılması . Avrupa Bilim ve Teknoloji Dergisi , (21) , 572-580 . Retrieved from https://dergipark.org.tr/en/pub/ejosat/issue/59648/792956