MICROFABRICATION PROCESS of GRAPHENE FIELD EFFECT DEVICES and INVESTIGATION of LITHOGRAPHIC RESIDUES by SURFACE ENHANCED RAMAN SPECTROSCOPY

Hidayet Çetin

EN

MICROFABRICATION PROCESS of GRAPHENE FIELD EFFECT DEVICES and INVESTIGATION of LITHOGRAPHIC RESIDUES by SURFACE ENHANCED RAMAN SPECTROSCOPY

Abstract

At the fabrication of Graphene Field Effect Transistor (GFET), microfabrication process has been extensively used. Microfabrication process has usually left impurities. However, impurities could be much more important at graphene-like two dimensional systems. In this work, pristine and photolithography-applied graphene samples were investigated by Surface Enhanced Raman Spectroscopy (SERS) which is a powerful method to detect molecules even if only one molecule [1- 2]. Furthermore, after the photolithography process, to obtain more clean graphene surface, several methods were applied. The obtained electrical and SERS results were associated and compared to each other’s to propound a new lift-off solvents.

Keywords

Graphene, SERS, Lithographic Residues.

Details

Primary Language

English

Subjects

-

Journal Section

-

Authors

Hidayet Çetin This is me

Publication Date

August 1, 2016

Submission Date

August 1, 2016

Acceptance Date

-

Published in Issue

Year 2016 Volume: 12 Number: 2

IZ

https://izlik.org/JA76BZ63PE

Cite

RIS / Bibtex

APA

Çetin, H. (2016). MICROFABRICATION PROCESS of GRAPHENE FIELD EFFECT DEVICES and INVESTIGATION of LITHOGRAPHIC RESIDUES by SURFACE ENHANCED RAMAN SPECTROSCOPY. Electronic Letters on Science and Engineering, 12(2), 6-6. https://izlik.org/JA76BZ63PE

AMA

1.Çetin H. MICROFABRICATION PROCESS of GRAPHENE FIELD EFFECT DEVICES and INVESTIGATION of LITHOGRAPHIC RESIDUES by SURFACE ENHANCED RAMAN SPECTROSCOPY. Electronic Letters on Science and Engineering. 2016;12(2):6-6. https://izlik.org/JA76BZ63PE

Chicago

Çetin, Hidayet. 2016. “MICROFABRICATION PROCESS of GRAPHENE FIELD EFFECT DEVICES and INVESTIGATION of LITHOGRAPHIC RESIDUES by SURFACE ENHANCED RAMAN SPECTROSCOPY”. Electronic Letters on Science and Engineering 12 (2): 6-6. https://izlik.org/JA76BZ63PE.

EndNote

Çetin H (August 1, 2016) MICROFABRICATION PROCESS of GRAPHENE FIELD EFFECT DEVICES and INVESTIGATION of LITHOGRAPHIC RESIDUES by SURFACE ENHANCED RAMAN SPECTROSCOPY. Electronic Letters on Science and Engineering 12 2 6–6.

IEEE

[1]H. Çetin, “MICROFABRICATION PROCESS of GRAPHENE FIELD EFFECT DEVICES and INVESTIGATION of LITHOGRAPHIC RESIDUES by SURFACE ENHANCED RAMAN SPECTROSCOPY”, Electronic Letters on Science and Engineering, vol. 12, no. 2, pp. 6–6, Aug. 2016, [Online]. Available: https://izlik.org/JA76BZ63PE

ISNAD

Çetin, Hidayet. “MICROFABRICATION PROCESS of GRAPHENE FIELD EFFECT DEVICES and INVESTIGATION of LITHOGRAPHIC RESIDUES by SURFACE ENHANCED RAMAN SPECTROSCOPY”. Electronic Letters on Science and Engineering 12/2 (August 1, 2016): 6-6. https://izlik.org/JA76BZ63PE.

JAMA

1.Çetin H. MICROFABRICATION PROCESS of GRAPHENE FIELD EFFECT DEVICES and INVESTIGATION of LITHOGRAPHIC RESIDUES by SURFACE ENHANCED RAMAN SPECTROSCOPY. Electronic Letters on Science and Engineering. 2016;12:6–6.

MLA

Çetin, Hidayet. “MICROFABRICATION PROCESS of GRAPHENE FIELD EFFECT DEVICES and INVESTIGATION of LITHOGRAPHIC RESIDUES by SURFACE ENHANCED RAMAN SPECTROSCOPY”. Electronic Letters on Science and Engineering, vol. 12, no. 2, Aug. 2016, pp. 6-6, https://izlik.org/JA76BZ63PE.

Vancouver

1.Hidayet Çetin. MICROFABRICATION PROCESS of GRAPHENE FIELD EFFECT DEVICES and INVESTIGATION of LITHOGRAPHIC RESIDUES by SURFACE ENHANCED RAMAN SPECTROSCOPY. Electronic Letters on Science and Engineering [Internet]. 2016 Aug. 1;12(2):6-. Available from: https://izlik.org/JA76BZ63PE