Structural, Surface and Optical Characterization of ZnO Thin Films Deposited by SILAR and Spin-Coating Methods

Year 2022, , 931 - 941, 30.12.2022

Melih Özden , Çağlar Duman

https://doi.org/10.18185/erzifbed.1101771

Abstract

In this study, ZnO thin films were deposited on (1 1 1) oriented n-type and (1 0 0) oriented p-type Si substrates using SILAR and spin-coating methods, respectively. The XRD, SEM, and PL measurements of the samples were performed. The XRD results showed the presence of ZnO peaks. The SEM results showed that the surfaces were homogeneous in both methods, and nanorods were present in the samples grown by the SILAR method. The PL results showed that the samples emitted light at different wavelengths. The PL results under different powers were interpreted from the samples, and it was determined that this sample reached a higher emission intensity with increasing excitation power.

Keywords

ZnO, SILAR, spin-coating, thin film

Supporting Institution

Erzurum Teknik Üniversitesi

Project Number

ETÜ BAP 2017/24

Thanks

This paper is supported by Erzurum Technical University BAP Program (Project No: ETÜ BAP 2017/24).

SILAR ve Dönel Kaplama Yöntemleri Kullanılarak Büyütülen ZnO İnce Filmlerin Yapısal, Yüzeysel ve Optik Karakterizasyonu

Abstract

Bu çalışmada, ZnO ince filmler sırasıyla (1 1 1) yönelimli n-tipi ve (1 0 0) yönelimli p-tipi Si altlıklar üzerine SILAR ve dönel kaplama (spin-coating) yöntemleri kullanılarak büyütülmüştür. Numunelerin XRD, SEM ve PL ölçümleri alınmıştır. XRD sonuçları, ZnO piklerinin varlığını göstermiştir. SEM sonuçları, yüzeylerin her iki yöntemde de homojen olduğunu ve SILAR yöntemiyle büyütülen örneklerde nano çubukların bulunduğunu göstermiştir. PL sonuçları, numunelerin farklı dalga boylarında ışık yaydığını göstermiştir. Örneklerden farklı güçler altında PL ölçümleri alınmış ve yorumlanmış ve bir örneğin artan uyartım gücü ile daha yüksek bir emisyon yoğunluğuna ulaştığı tespit edilmiştir.

Keywords

ZnO, SILAR, dönel kaplama, ince film

Project Number

ETÜ BAP 2017/24

References

• Ashour, A., Kaid, M. A., El-Sayed, N. Z., Ibrahim, A. A 2006. “Physical properties of ZnO thin films deposited by spray pyrolysis technique”, Applied Surface Science, 252(22), 7844–7848.
• Barnes, T. M., Leaf, J., Fry, C., Wolden, C. A 2005. “Room temperature chemical vapor deposition of c-axis ZnO”, Journal of Crystal Growth, 274(3–4), 412–417.
• Fallert, J., Dietz, R. J. B., Hauser, M., Stelzl, F., Klingshirn, C., Kalt, H 2009. “Random lasing in ZnO nanocrystals”, Journal of Luminescence, Special Issue based on The 15th International Conference on Luminescence and Optical Spectroscopy of Condensed Matter (ICL’08), 129(12), 1685–1688.
• Guidelli, E. J., Baffa, O., Clarke, D. R 2015. “Enhanced UV Emission From Silver/ZnO And Gold/ZnO Core-Shell Nanoparticles: Photoluminescence, Radioluminescence, And Optically Stimulated Luminescence”, Scientific Reports, 5(1), 14004.
• Gupta, T. K 1990. “Application of Zinc Oxide Varistors”, Journal of the American Ceramic Society, 73(7), 1817–1840.
• Kaviyarasu, K., Maria Magdalane, C., Kanimozhi, K., Kennedy, J., Siddhardha, B., Subba Reddy, E., Rotte, N. K., et al. 2017. “Elucidation of photocatalysis, photoluminescence and antibacterial studies of ZnO thin films by spin coating method”, Journal of Photochemistry and Photobiology B: Biology, 173, 466–475.
• King, S. L., Gardeniers, J. G. E., Boyd, I. W 1996. “Pulsed-laser deposited ZnO for device applications”, Applied Surface Science, 96(98), 811–818.
• Kodigala, S. R 2011. “Cu(In1-xGax)Se2 Based Thin Film Solar Cells”, Academic Press.
• Kumar, P. S., Raj, A. D., Mangalaraj, D., Nataraj, D 2010. “Hydrophobic ZnO nanostructured thin films on glass substrate by simple successive ionic layer absorption and reaction (SILAR) method”, Thin Solid Films, Symposium on Functional Ceramic Materials, Oxide Thin Films and Heterostructures (ICMAT 2009), 518(24, Supplement), e183–e186.
• Lanjewar, M., Gohel, J. V 2017. “Enhanced performance of Ag-doped ZnO and pure ZnO thin films DSSCs prepared by sol-gel spin coating” Inorganic and Nano-Metal Chemistry, 47(7), 1090–1096.
• Liang, W. Y., Yoffe, A. D 1968. “Transmission Spectra of ZnO Single Crystals”, Physical Review Letters, 20(2), 59–62.
• Liu, Y., Gorla, C. R., Liang, S., Emanetoglu, N., Lu, Y., Shen, H., Wraback, M 2000. “Ultraviolet detectors based on epitaxial ZnO films grown by MOCVD”, Journal of Electronic Materials, 29(1), 69–74.
• Look, D. C 2001. “Recent advances in ZnO materials and devices”, Materials Science and Engineering: B, 80(1–3), 383–387.
• Pathan, H. M., Lokhande, C. D 2004. “Deposition of metal chalcogenide thin films by successive ionic layer adsorption and reaction (SILAR) method”, Bulletin of Materials Science, 27(2), 85–111.
• Raoufi, D., Raoufi, T 2009. “The effect of heat treatment on the physical properties of sol–gel derived ZnO thin films”, Applied Surface Science, 255(11), 5812–5817.
• Rauwel, P., Salumaa, M., Aasna, A., Galeckas, A., Rauwel, E 2016. “A Review of the Synthesis and Photoluminescence Properties of Hybrid ZnO and Carbon Nanomaterials”, Journal of Nanomaterials, 2016, e5320625.
• Shei, S. C., Lee, P. Y 2013. “Influence of rinsing temperature on properties of ZnO thin films prepared by SILAR method with propylene glycol”, Journal of Alloys and Compounds, 546, 165–170.
• Wan, Q., Li, Q. H., Chen, Y. J., Wang, T. H., He, X. L., Li, J. P., Lin, C. L 2004. “Fabrication and ethanol sensing characteristics of ZnO nanowire gas sensors”, Applied Physics Letters, 84(18), 3654.
• Water, W., Chu, S.Y 2002. “Physical and structural properties of ZnO sputtered films”, Materials Letters, 55(1–2), 67–72.
• Weng, J., Zhang, Y., Han, G., Zhang, Y., Xu, L., Xu, J., Huang, X., et al. 2005. “Electrochemical deposition and characterization of wide band semiconductor ZnO thin film”, Thin Solid Films, 478(1), 25–29.
• Yi, S.-H., Choi, S.-K., Jang, J.-M., Kim, J.-A., Jung, W.-G 2007. “Low-temperature growth of ZnO nanorods by chemical bath deposition”, Journal of Colloid and Interface Science, 313(2), 705–710.
• Youl Bae, H., Man Choi, G 1999. “Electrical and reducing gas sensing properties of ZnO and ZnO–CuO thin films fabricated by spin coating method”, Sensors and Actuators B: Chemical, 55(1), 47–54.