Structural, Surface and Optical Characterization of ZnO Thin Films Deposited by SILAR and Spin-Coating Methods

Year 2022, Volume: 15 Issue: 3, 931 - 941, 30.12.2022

Melih Özden , Çağlar Duman

https://doi.org/10.18185/erzifbed.1101771

Abstract

In this study, ZnO thin films were deposited on (1 1 1) oriented n-type and (1 0 0) oriented p-type Si substrates using SILAR and spin-coating methods, respectively. The XRD, SEM, and PL measurements of the samples were performed. The XRD results showed the presence of ZnO peaks. The SEM results showed that the surfaces were homogeneous in both methods, and nanorods were present in the samples grown by the SILAR method. The PL results showed that the samples emitted light at different wavelengths. The PL results under different powers were interpreted from the samples, and it was determined that this sample reached a higher emission intensity with increasing excitation power.

Keywords

ZnO, SILAR, spin-coating, thin film

Supporting Institution

Erzurum Teknik Üniversitesi

Project Number

ETÜ BAP 2017/24

Thanks

This paper is supported by Erzurum Technical University BAP Program (Project No: ETÜ BAP 2017/24).

SILAR ve Dönel Kaplama Yöntemleri Kullanılarak Büyütülen ZnO İnce Filmlerin Yapısal, Yüzeysel ve Optik Karakterizasyonu

Abstract

Bu çalışmada, ZnO ince filmler sırasıyla (1 1 1) yönelimli n-tipi ve (1 0 0) yönelimli p-tipi Si altlıklar üzerine SILAR ve dönel kaplama (spin-coating) yöntemleri kullanılarak büyütülmüştür. Numunelerin XRD, SEM ve PL ölçümleri alınmıştır. XRD sonuçları, ZnO piklerinin varlığını göstermiştir. SEM sonuçları, yüzeylerin her iki yöntemde de homojen olduğunu ve SILAR yöntemiyle büyütülen örneklerde nano çubukların bulunduğunu göstermiştir. PL sonuçları, numunelerin farklı dalga boylarında ışık yaydığını göstermiştir. Örneklerden farklı güçler altında PL ölçümleri alınmış ve yorumlanmış ve bir örneğin artan uyartım gücü ile daha yüksek bir emisyon yoğunluğuna ulaştığı tespit edilmiştir.

Keywords

ZnO, SILAR, dönel kaplama, ince film

Project Number

ETÜ BAP 2017/24

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