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Sabit azot akışında HIPİMS ile kaplanmış B4C filmlerin adezyon ve tribolojik özellikleri üzerinde artan görev süresi ve hedef voltajın etkisi

Year 2025, Volume: 18 Issue: 2, 631 - 638, 31.08.2025
https://doi.org/10.18185/erzifbed.1665148

Abstract

Mekanik, tribolojik ve kimyasal özellikleri nedeniyle nitril bazlı filmler endüstriyel uygulamalar için çok önemlidir. Nitrür bazlı filmler arasında c-BN filmler çok iyidir. Bununla birlikte, farklı güç kaynakları ile manyetik alan saçtırma kullanılarak sentezlenen c-BN filmlerin yapışma özellikleri, ultra yüksek sertlik değerlerine ulaşıldığında sıklıkla yetersiz kalmaktadır. Kaplamaların yapışmasını artırmak için son zamanlarda Yüksek Güçlü İmpuls Manyetik Alan Püskürtme (HiPIMS) güç kaynakları kullanılmaktadır. HiPIMS tekniği kullanılarak bu çalışmada 4140 çelikler, sabit N2 akışında c-BN filmleri kaplayarak hedef voltaj ve görev süresini artırmıştır. c-BN filmlerin yapısal özelliklerini incelemek için SEM ve FT-IR analizleri, mekanik özelliklerini incelemek için mikrosertlik ve çizilme testleri ve tribolojik özelliklerini belirlemek için pin-on-disk tribo testleri kullanılmıştır. Testler sonucunda, artan görev süresi ve hedef voltajda film kalınlığı artarken, sertlik değeri ve kritik yük değeri azalmıştır. Ayrıca sürtünme katsayısı artan görev süresi ve hedef gerilim ile azalmıştır.

Project Number

MAG-215M213–215M217-215M218

References

  • [1] Wang, H., Meng, D., Wu, Z., Kang, J., She, D., Qin, W., & Yue, W. (2024). Tribological Behavior of Polycrystalline Cubic Boron Nitride Sliding against WC-Co Cemented Carbide in Vacuum Conditions. Journal of Materials Engineering and Performance, 33(4), 1975-1984.
  • [2] Yang, F., Wu, Z., Meng, D., Qin, W., & She, D. (2022). Tribological Behaviors of Polycrystalline Cubic Boron Nitride Sliding against Bearing Steel in Vacuum Conditions. Coatings, 12(5), 693.
  • [3] Sell, K., Holleck, H., Leiste, H., Stuber, M., Ulrich, S., & Yë, J. Y. (2002). Synthesis and characterization of cubic boron nitride films-investigations of growth and annealing processes. Diamond and Related Materials, 11(3-6), 1272-1275.
  • [4] Soltani, A., Talbi, A., Mortetb, V., Benmoussa, A., Zhang, W. J., Gerbedoen, J. C., De Jaeger, J. C., et al. (2010). Diamond and cubic boron nitride: Properties, growth and applications. AIP Conference Proceedings, 1292, 191-196.
  • [5] Lattemann, M., Helmersson, U., & Greene, J. E. (2010). Fully dense, non-faceted 111- textured high power impulse magnetron sputtering TiN films grown in the absence of substrate heating and bias. Thin Solid Films. 518(21), 5978-5980.
  • [6] Wani, S. M., Ahmad, B., & Saleem, S. S. (2023). Nanomechanical and Nanotribological Characterization of Co-BN Nano-composite Coating on Al-Si Substrate. Journal of Materials Engineering and Performance, 180, 108281.
  • [7] Semenov, V. A., Rabotkin, S. V., Grenadyorov, A. S., Solovyev, A. A., Oskirko, V. O., Zakharov, A. N., & Shipilova, A. V. (2024). Effect of Reactive Magnetron Sputtering Modes (DCMS, HIPIMS, and DC + HIPIMS) on the Properties of Copper Oxide Films. Physics of Metals and Metallography, 25, 1593-1600.
  • [8] Raman, P., Cheng, M., Weberski, J., Xu, W., Houlahan, T., Rivera, J., Su, R., et al. (2018). Magnetic field influence on ionization zones in high-power impulse Magnetron Sputtering. Vacuum, 156, 9-19.
  • [9] Keleş, A., & Efeoğlu, İ. (2019). Effect of Target Voltage on Tribological and Adhesive Properties of c-BN Films Coated with HiPIMS. 2019 IEEE Regional Symposium on Micro and Nanoelectronics (RSM).
  • [10] Mukherjee, S., & Gall, D. (2013). Structure zone model for extreme shadowing conditions. Thin Solid Films, 527, 158-163.
  • [11] Sert, Y., Küçükömeroğlu, T., Ghahramanzadeh Asl, H., & Efeoğlu, İ. (2021). Hardness, Adhesion, and Wear Performance of Duplex Treatment Coatings of Nitride/TiAlZrN with Different Zr Target Currents. Journal of Materials Engineering and Performance, 30(1), 638-651.
  • [12] Grenadyorov, A. S., Solovyev, A. A., Oskomov, K. V., & Zhulkov, M. O. (2021). Dependence of Mechanical and Tribological Properties of a-C:H:SiOx Films on the Bias Voltage Amplitude of the Substrate. Technical Physics, 66(10), 1111-1117.
  • [13] Kvatchadze, V., Bairamashvili, I., Mikeladze, A., Gventsadze, D., Mestvirishvili, Z., & Chkhartishvili, L. (2023). Boron carbide based ceramics for dry friction units. Solid State Sciences, 142, 107244.

Effect of Increasing Duty Time and Target Voltage on Adhesion and Tribological Properties of B4C Films Coated with HiPIMS at Constant Nitrogen Flow

Year 2025, Volume: 18 Issue: 2, 631 - 638, 31.08.2025
https://doi.org/10.18185/erzifbed.1665148

Abstract

The mechanical, tribological, and chemical characteristics of nitride-based coatings make them crucial for industrial applications. C-BN films have better qualities than other nitride-based films. However, when ultra-high hardness values have been achieved, the adhesion characteristics of c-BN films produced by magnetic field sputtering with various power sources are often inadequate. High Power Impulse Magnetic Field Sputtering (HiPIMS) power sources have been applied recently to improve coating adhesion. In this study, c-BN films were coated on 4140 steels at increasing duty time and target voltage at constant N2 flow using HiPIMS technique. SEM and FT-IR analyses were performed to investigate the structural properties of c-BN films; microhardness and scratch tests were performed to investigate their mechanical properties; pin-on-disk tribo test was performed to determine their tribological properties. As a result of the tests, the film thickness increased with increasing duty time and target voltage, while the hardness value and critical load value decreased. In addition, friction coefficient decreased with increasing duty time and target voltage.

Project Number

MAG-215M213–215M217-215M218

Thanks

This research is part of the TUBITAK (The Scientific and Technical Research Council of Turkey) project was supported by Grant no: MAG-215M213–215M217-215M218. The authors would like to thank TUBITAK for funding the project.

References

  • [1] Wang, H., Meng, D., Wu, Z., Kang, J., She, D., Qin, W., & Yue, W. (2024). Tribological Behavior of Polycrystalline Cubic Boron Nitride Sliding against WC-Co Cemented Carbide in Vacuum Conditions. Journal of Materials Engineering and Performance, 33(4), 1975-1984.
  • [2] Yang, F., Wu, Z., Meng, D., Qin, W., & She, D. (2022). Tribological Behaviors of Polycrystalline Cubic Boron Nitride Sliding against Bearing Steel in Vacuum Conditions. Coatings, 12(5), 693.
  • [3] Sell, K., Holleck, H., Leiste, H., Stuber, M., Ulrich, S., & Yë, J. Y. (2002). Synthesis and characterization of cubic boron nitride films-investigations of growth and annealing processes. Diamond and Related Materials, 11(3-6), 1272-1275.
  • [4] Soltani, A., Talbi, A., Mortetb, V., Benmoussa, A., Zhang, W. J., Gerbedoen, J. C., De Jaeger, J. C., et al. (2010). Diamond and cubic boron nitride: Properties, growth and applications. AIP Conference Proceedings, 1292, 191-196.
  • [5] Lattemann, M., Helmersson, U., & Greene, J. E. (2010). Fully dense, non-faceted 111- textured high power impulse magnetron sputtering TiN films grown in the absence of substrate heating and bias. Thin Solid Films. 518(21), 5978-5980.
  • [6] Wani, S. M., Ahmad, B., & Saleem, S. S. (2023). Nanomechanical and Nanotribological Characterization of Co-BN Nano-composite Coating on Al-Si Substrate. Journal of Materials Engineering and Performance, 180, 108281.
  • [7] Semenov, V. A., Rabotkin, S. V., Grenadyorov, A. S., Solovyev, A. A., Oskirko, V. O., Zakharov, A. N., & Shipilova, A. V. (2024). Effect of Reactive Magnetron Sputtering Modes (DCMS, HIPIMS, and DC + HIPIMS) on the Properties of Copper Oxide Films. Physics of Metals and Metallography, 25, 1593-1600.
  • [8] Raman, P., Cheng, M., Weberski, J., Xu, W., Houlahan, T., Rivera, J., Su, R., et al. (2018). Magnetic field influence on ionization zones in high-power impulse Magnetron Sputtering. Vacuum, 156, 9-19.
  • [9] Keleş, A., & Efeoğlu, İ. (2019). Effect of Target Voltage on Tribological and Adhesive Properties of c-BN Films Coated with HiPIMS. 2019 IEEE Regional Symposium on Micro and Nanoelectronics (RSM).
  • [10] Mukherjee, S., & Gall, D. (2013). Structure zone model for extreme shadowing conditions. Thin Solid Films, 527, 158-163.
  • [11] Sert, Y., Küçükömeroğlu, T., Ghahramanzadeh Asl, H., & Efeoğlu, İ. (2021). Hardness, Adhesion, and Wear Performance of Duplex Treatment Coatings of Nitride/TiAlZrN with Different Zr Target Currents. Journal of Materials Engineering and Performance, 30(1), 638-651.
  • [12] Grenadyorov, A. S., Solovyev, A. A., Oskomov, K. V., & Zhulkov, M. O. (2021). Dependence of Mechanical and Tribological Properties of a-C:H:SiOx Films on the Bias Voltage Amplitude of the Substrate. Technical Physics, 66(10), 1111-1117.
  • [13] Kvatchadze, V., Bairamashvili, I., Mikeladze, A., Gventsadze, D., Mestvirishvili, Z., & Chkhartishvili, L. (2023). Boron carbide based ceramics for dry friction units. Solid State Sciences, 142, 107244.
There are 13 citations in total.

Details

Primary Language English
Subjects Tribology
Journal Section Makaleler
Authors

Ayşenur Keleş Dayauç 0000-0001-7026-8983

İhsan Efeoğlu 0000-0002-9147-2104

Project Number MAG-215M213–215M217-215M218
Early Pub Date August 14, 2025
Publication Date August 31, 2025
Submission Date March 25, 2025
Acceptance Date May 29, 2025
Published in Issue Year 2025 Volume: 18 Issue: 2

Cite

APA Keleş Dayauç, A., & Efeoğlu, İ. (2025). Effect of Increasing Duty Time and Target Voltage on Adhesion and Tribological Properties of B4C Films Coated with HiPIMS at Constant Nitrogen Flow. Erzincan University Journal of Science and Technology, 18(2), 631-638. https://doi.org/10.18185/erzifbed.1665148