Geçmişten Günümüze Gaz Basınç Sensörleri “Piezorezistif Sensörler ÜzerineBir Derleme

Öz

Çalışmamız, endüstri, havacılık ve uzay, iklimlendirme, otomotiv ve biyomedikal alanlarında kullanılan gaz basınç sensörlerine odaklanmaktadır. Basınç sensörlerinin tarihsel gelişimi ele alındıktan sonra, sensörler iki ana başlık altında incelenmiştir: mekanik temelli sensörler ve modern teknolojilerle geliştirilen sensörler. Derleme makalemizin odağı, piezorezistif basınç sensörleridir; çünkü bu sensörler, yaygın kullanım alanlarının yanı sıra, malzeme ve üretim teknolojilerindeki gelişmelerin ışığında birçok geliştirme çalışmasına konu olarak bugün sahip oldukları üstün özelliklere ulaşmıştır. Sıcaklık değişimlerine karşı direnç göstermeleri, ölçüm sonuçlarının zamana bağlı stabilitesini korumaları, geniş basınç ve sıcaklık aralıklarında kullanılabilir hale gelmeleri, bu sensörlerin öne çıkan niteliklerindendir. Bu sensörlerin fabrikasyon ve tasarım süreçleri, kullanılan malzemeler ve tarihçeleri üzerine kapsamlı bir literatür taraması yapılmıştır. Ayrıca, piezorezistif sensörlerin kullanım alanları ve performansları detaylı bir şekilde incelenmiştir. Bu bilgiler, mühendislerin ve akademisyenlerin basınç sensörü seçimlerini kolaylaştıracak ve çalışmalarını hızlandıracaktır. Makalede, piezorezistif gaz basınç sensörlerinin temel özellikleri, tasarımları ve kullanım alanları ele alınacak, ayrıca gelecekteki gelişmeleri hakkında öngörüler sunulacaktır. Farklı sensör tipleri arasında yapılan kıyaslamalarla, bu sensörlerin çeşitli uygulamalardaki etkileri değerlendirilmiştir.

Anahtar Kelimeler

• Basınç Sensörleri
• Piezorezistif
• MEMS

Gas Pressure Sensors From Past To Present “A Review On Piezoresistive Sensors”

Abstract

Our study focuses on gas pressure sensors used in industries, aerospace, HVAC(Heating, Ventilating and Air Conditioning), automotive, and biomedical fields. After discussing the historical development of pressure sensors, the sensors will be examined under two main categories: mechanical-based sensors and sensors developed with modern technologies. The focus of our review article is on piezoresistive pressure sensors, as these sensors have not only widespread applications but have also reached their superior characteristics today due to ongoing developments in materials and manufacturing technologies. Their resistance to temperature variations, stability of measurement results over time long-term stability of measurements, and ability to operate in a wide range of pressure and temperature conditions are some of the key features that make these sensors stand out. A comprehensive literature review has been conducted on the fabrication and design processes of these sensors, the materials used, and their history. Additionally, the applications and performances of piezoresistive sensors have been thoroughly analyzed. This information will facilitate pressure sensor selection for engineers and academics, accelerating their work. The paper will cover the basic features, designs, and applications of piezoresistive gas pressure sensors, as well as provide insights into future developments. By comparing different sensor types, the impacts of these sensors in various applications will be evaluated.

Keywords

• Pressure Sensor
• Piezoresistive
• MEMS

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