Sol-Gel Döndürerek Kaplama Tekniği ile Saydam İletken ZnO İnce Filmlerin Üretilmesi ve Karakterizasyonu

Öz

Sürekli gelişen optoelektronik teknolojisi alternatif saydam iletken oksit (SİO) malzemelere ihtiyaç duymaktadır. Optik geçirgenliklerinin yüksek olmasından ve iletken olmalarından dolayı SİO malzemelerin birçok uygulama alanı vardır. Çinko oksit (ZnO) ince filmler de, SİO malzemelerin en önemlilerinden biri olup optoelektronik teknolojisinde sıklıkla kullanılır. Bu çalışmada, ZnO ince filmler basit ve düşük maliyetli bir ince film kaplama tekniği olan sol-gel döndürerek kaplama tekniği ile cam taban üzerine üretilmiş ve üretilen ince filmler farklı sıcaklıklarda hava ortamında tavlanmıştır. Döndürerek kaplama tekniğinin parametreleri değiştirilerek üretilen ince filmlerde en iyi kristalleşmeyi gösteren filmlerin oluşacağı şartlar X-Işını Kırınımı (XRD) ile belirlenmiştir. Ayrıca üretilen filmlerin yüzeysel ve optiksel özellikleri sırasıyla, Alan Emisyonu Taramalı Elektron Mikroskobu (FESEM) ve UV-Visible Spektroskopisi kullanılarak karakterize edilmiştir. Yapılan bu incelemeler sonucunda, elde edilen ince filmlerin kristal yapıları ayrıntılı olarak incelenerek deney parametrelerinin ve tavlama sıcaklığının ince filmlerin kristalleşmesine etkisi belirlenmiştir.

Anahtar Kelimeler

• Sol-Gel,Saydam İletken Oksit,(SİO),ZnO,İnce Filmler

Deposition and Characterization of Transparent Conductive Oxide ZnO Thin Films By Sol-Gel Spin Coating Technique

Abstract

Continuously developing optoelectronic technology needs alternative transparent conductive oxide (TCO) materials. TCO materials have many application areas due to their high optical transmittance and being conductive materials. Zinc Oxide (ZnO) thin films are one of the most important members of TCO materials and they are widely used in optoelectronic technology. In this study, ZnO thin films were produced on glass substrate by sol-gel spin coating technique which is a simple and low cost thin film coating technique and produced thin films were annealed at different temperatures in air. By changing parameters of spin coating technique, the conditions of the best film that produced were determined X-Ray Diffraction (XRD). Also the surface and optical properties of the films were characterized by using Field Emission Scanning Electron Microscopy (FESEM) and UV-Visible Spectroscopy respectively. As a result of these studies, by examining the crystal structures of the obtained thin films in detail, the effects of the experimental parameters and the annealing temperature on the crystallization of the thin films were determined.

Keywords

• Sol-Gel,Transparent Conductive,Oxides (TCO),ZnO,Thin Films

References

1. [1] Ginley, D.S., 2010, Handbook of transparent conductors, Springer, New York.
2. [2] Shim, Y.S., 2011, Transparent conducting oxide electrodes for novel metal oxide gas sensors, Sensors and Actuators B, 160, 357–363.
3. [3] Shimizu, M., 2014, High-temperature solar selective absorbers using transparent conductive oxide coated metal, Energy Procedia, 57, 418 – 426.
4. [4] Kang, D.W., 2015, Highly transparent Zn1-xMgxO/ITO multilayer for window of thin film solar cells, Current Applied Physics, doi: 10.1016/j.cap.2015.05.017.
5. [5] Alexander, J.N., 2015, Development and characterization of transparent and conductive InZnO films by magnetron sputtering at room temperature, Journal of Alloys and Compounds, 633, 157–164.
6. [6] Addonizio, M.L., 2014, Sol–gel synthesis of ZnO transparent conductive films: the role of pH, Applied Surface Science, 305, 194–202.
7. [7] Steiner, T., 2004, Nanostructures for optoelectronic applications, Artech House Inc., London.
8. [8] Salam S., 2013, Sol–gel synthesis of intrinsic and aluminum-doped zinc oxide thin films as transparent conducting oxides for thin film solar cells, thin Solid Films, 529, 242-247.

9. [9] Tsay, C., Fan, K., Chen, S., Tsai, C., 2010, Preparation and characterization of ZnO transparent semiconductor thin films by sol–gel method, Journal of Alloys and Compounds, 495, 126–130.
10. [10] Minemoto T, T. Negami, S. Nishiwaki, H. Takakura, Y. Hamakawa, 2000, Preparation of Zn1-xMgxO films by radio frequency magnetron sputtering, Thin Solid Films, 372, 173–176.
11. [11] Cho, S.W. Shin, Y. Bin Kwon, H.-K. Lee, K.U. Sim, H.S. Kim, J.-H. Moon, J.H. Kim, 2011, The effect of Mg0.1Zn0.9O layer thickness on optical band gap of ZnO/Mg0.1Zn0.9O nano-scale multilayer thin films prepared by pulsed laser deposition method, Thin Solid Films, 519, 4282–4285.
12. [12] Zhang, X.M. Li, T.L. Chen, J.M. Bian, C.Y. Zhang, 2005, Structural and optical properties of Zn1-xMgxO thin films deposited by ultrasonic spray pyrolysis, Thin Solid Films, 492, 248–252.
13. [13] Ashraf, S.M.J. Akhtar, A. Qayyum, 2012, Characterization of ternary MgxZn1−xO thin films deposited by electron beam evaporation, Mater. Sci. Semicond. Process, 15, 251–257.
14. [14] Tari, A. Aronne, M.L. Addonizio, S. Daliento, E. Fanelli, P. Pernice, 2012, Sol-gel synthesis of ZnO transparent and conductive films: A critical approach, Sol. Energy Mater. Sol. Cells, 105, 179–186.
15. [15] Sengupta, R.K. Sahoo, C.D. Mukherjee, 2012, Effect of annealing on the structural, topographical and optical properties of sol-gel derived ZnO and AZO thin films, Mater. Lett., 83, 84–87.
16. [16] Huang K., 2012, Preparation and characterization of Mg-doped ZnO thin films by sol–gel method, Applied Surface Science, 258, 3710– 3713.
17. [17] Wang M., 2008, Optical and structural properties of sol-gel prepared MgZnO alloy thin films, Thin Solid Films, 516, 1124–1129.
18. [18] Cullity, B.D., Stock S.R., 2001, Elements of x-ray diffraction, Pearson Prentice Hall, New Jersey, USA.
19. [19] Ivanova, T., Harizanova, A., Koutzarova, T., Vertruyen, B., 2010, Study of ZnO sol–gel films: Effect of annealing, Materials Letters, 64, 1147–1149.
20. [20] Manoj, P.K., 2006, Growth and characterization of indium oxide thin films prepared by spray pyrolysis., Optical Materials, 28, 1405-1411.
21. [21] Nair, J.P., 1998, In situ Sb-doped CdTe films., Semiconductor Science and Technology, 13, 0268-1242.
22. [22] Tauc J., 1974, Amorphous and liquid semiconductors, Plenum.
23. [23] Caglar, S. Ilican, Y. Caglar, F. Yakuphanoglu, 2009, Electrical conductivity and optical properties of ZnO nanostructured thin film, Applied Surface Science, 255, 4491–4496.
24. [24] Pati, 2017, Highly textured ZnO thin films grown using sol-gel route for gas sensing application, J. Alloys Compd., 695, 3552–3558.
25. [25] Tsang, F.L. Wong, M.K. Fung, J.C. Chang, C.S. Lee, S.T. Lee, 2008, Transparent conducting aluminum-doped zinc oxide thin film prepared by sol-gel process followed by laser irradiation treatment, Thin Solid Films, 517, 891–895.
26. [26] Kim, W. Tai, S. Shu, 2005, Effect of preheating temperature on structural and optical properties of ZnO thin films by sol – gel process, Thin Solid Films, 491, 153–160.