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Microstructure and Mechanical Properties of TiN/TiCN/TiC Multilayer Thin Films Deposited by Magnetron Sputtering

Year 2021, Volume: 5 Issue: 1, 15 - 20, 15.07.2021

Abstract

Enhancement of scratch and hardness mechanical properties of TiN/TiCN/TiC multilayer thin films deposited on commercially pure Titanium (Cp-Ti) and silicon (Si) substrates via magnetron sputtering technique were investigated in this study. The structural, chemical and mechanical properties of the coatings were characterized by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM), nanoindentation and scratch tests. Results of the XRD analysis showed reflections corresponded to cubic and polycrystalline structure for TiN/TiCN/TiC films. XPS analysis of the uppermost layer of TiN/TiCN/TiC film revealed that titanium nitride and titanium carbide were formed in the coatings. According to SEM cross-sectional images, the coatings demonstrated dense structure as well as good adhesion to the substrate with a thickness of 3.035 μm. Nanoindentation hardness and critical load valueof scratch test results of TiN/TiCN/TiCmultilayer filmcoated on Cp-Ti substrate materials obtained 19.75 GPa and 21 N, respectively.

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There are 33 citations in total.

Details

Primary Language English
Subjects Engineering
Journal Section Research Articles
Authors

Abbas Razmı This is me 0000-0002-5012-6694

Ruhi Yesıldag This is me

Publication Date July 15, 2021
Submission Date December 1, 2021
Published in Issue Year 2021 Volume: 5 Issue: 1

Cite

APA Razmı, A., & Yesıldag, R. (2021). Microstructure and Mechanical Properties of TiN/TiCN/TiC Multilayer Thin Films Deposited by Magnetron Sputtering. International Journal of Innovative Research and Reviews, 5(1), 15-20.